F7030 X-ray structural analysis of thin layers

Faculty of Science
Autumn 2024
Extent and Intensity
2/1/0. 1 credit(s) (plus extra credits for completion). Type of Completion: k (colloquium).
Taught online.
Teacher(s)
Mgr. Ondřej Caha, Ph.D. (lecturer)
Guaranteed by
Mgr. Ondřej Caha, Ph.D.
Department of Condensed Matter Physics – Physics Section – Faculty of Science
Contact Person: Mgr. Ondřej Caha, Ph.D.
Supplier department: Department of Condensed Matter Physics – Physics Section – Faculty of Science
Prerequisites
A basic knowledge of solid state physics and optics
Course Enrolment Limitations
The course is also offered to the students of the fields other than those the course is directly associated with.
fields of study / plans the course is directly associated with
Course objectives
The goal of this course is to allow the students to
- list and describe basic properties of x-ray diffraction and x-ray reflection at thin films
- apply the knowledge to a study of dstructural propeties of thin films
Learning outcomes
Student will be able to: - select optimal experimental conditions for a given structural analysis - evaluate experimental data
Syllabus
  • 1. Experimental techniques: x-ray generation, x-ray sources, goniometers, optical elements (monochromators, collimators, mirrors, focusing optics), detectors. Basic experiments: polycrystal and monocrystal methods, reciprocal space mapping 2. Kinematic scattering theory: Introduction to scattering theory, scattering on an electron, isolated atom, crystal, structure and geometrical factor, limited crystal size. 3. Polycrystalline diffraction: structure factor, crystallite size (Scherrer formula), deformation effect on position and width of diffraction maxima, residual stress, Full profile fitting, phase quantification (inner normal) Texture, ODF Debye formula, PDF 4. SAXS: theoretical description, limit of thin solution – Guinier and Porod formula, ordered particles – long range and short-range order 5. Perfect and almost perfect crystals, epitaxial layers: Kinematic theory on monocrystal and epitaxial layer – diffraction positions, truncation rod, strain in epitaxial layer, relaxation. Mosaic crystal model. 6. Dynamical theory of x-ray reflectivity: one-wave approach – reflectivity, penetration depth, multilayers (transfer matrix formalism), TRXRF 7. Dynamical theory of x-ray diffraction: Two-wave approach: Bragg and Laue case, Borrmann effect, standing wave, GID, epitaxial layers 8. Semikinematical theory DWBA Scattering on rough interfaces – rough interface description, examples: fractal interface, two-level interface, vicinal, specular reflection and diffuse scattering, rough multilayers 9. Semikinematical theory for nanostructures GISAXS Diffuse scattering on defects in crystal 10. Experimental resolution and coherence analyzer streak, detector streak, monochromator streak, DuMond graphs, dispersive and nedispersive setup, coherence width and length 11. X-ray methods beyond elastic scattering Fluorescence spectroscopy, absorption spectroscopy – XAFS, XMCD.
Literature
  • ALS-NIELSEN, Jens and Des MCMORROW. Elements of modern X-ray physics. 2nd ed. Chichester: Wiley, 2011, xii, 419. ISBN 9780470973943. info
  • HOLÝ, Václav, U. PIETSCH and T. BAUMBACH. High-resolution x-ray scattering from thin films and multilayers. Germany Berlin: High-resolution x-ray scattering from thin films and multilayers, 1998, 256 pp. Springer Tracts in Modern Physics. ISBN 3-540-62029-X. info
  • BIRKHOLZ, Mario. Thin film analysis by X-ray scattering. Edited by Paul F. Fewster - Christoph Genzel. Weinheim: Wiley-VCH, 2006, xxii, 356. ISBN 3527310525. info
  • VALVODA, Václav, Milena POLCAROVÁ and Pavel LUKÁČ. Základy strukturní analýzy. 1. vyd. Praha: Univerzita Karlova, 1992, 489 s. ISBN 807066648X. info
  • AUTHIER, André. Dynamical theory of X-ray diffraction. 1st pub. Oxford: Oxford University Press, 2004, xviii, 674. ISBN 0198528922. info
Teaching methods
lectures with class discussion
Assessment methods
colloquium
Language of instruction
Czech
Further Comments
The course can also be completed outside the examination period.
The course is taught annually.
The course is taught: every week.
The course is also listed under the following terms Autumn 2007 - for the purpose of the accreditation, Autumn 2010 - only for the accreditation, Autumn 2000, Autumn 2001, Autumn 2002, Autumn 2003, Autumn 2004, Autumn 2005, Autumn 2006, Autumn 2007, Autumn 2008, Autumn 2009, Autumn 2010, Autumn 2011, Autumn 2011 - acreditation, spring 2012 - acreditation, Autumn 2012, Autumn 2013, Autumn 2014, Autumn 2015, Autumn 2016, autumn 2017, Autumn 2018, Autumn 2019, Autumn 2020, autumn 2021, Autumn 2022, Autumn 2023.
  • Enrolment Statistics (Autumn 2024, recent)
  • Permalink: https://is.muni.cz/course/sci/autumn2024/F7030