F3390 Micro- and nano- structures preparation

Faculty of Science
Autumn 2020
Extent and Intensity
2/0/0. 2 credit(s) (plus extra credits for completion). Type of Completion: zk (examination).
Teacher(s)
Mgr. Ondřej Jašek, Ph.D. (lecturer)
doc. RNDr. Jozef Ráheľ, PhD. (lecturer)
Guaranteed by
doc. RNDr. Jozef Ráheľ, PhD.
Department of Plasma Physics and Technology – Physics Section – Faculty of Science
Supplier department: Department of Plasma Physics and Technology – Physics Section – Faculty of Science
Course Enrolment Limitations
The course is also offered to the students of the fields other than those the course is directly associated with.
fields of study / plans the course is directly associated with
Course objectives
The lecture course will introduce students with the basic methods and principles of micro and nano-structures fabrication.
Learning outcomes
Student will be able to:
- describe the principles of main wet-methods for preparing thick films;
- explain the principles if main dry-methods for preparing thin films, especially CVD, ALD and PECVD;
- explain principles and novel trends in surface patterning by means of optical, electron beam or atomic probe litography;
- characterize various methods for preparing 1D structures - nanoparticles;
- Describe in detail synthesis and characterization of known nanostructured carbon materials.
Syllabus
  • Physical and chemical methods of nanoparticels synthesis • Nanoparticles separation and material analysis • Plasma deposition and plasma etching • Electrospinning a nanofibers • Nanostructured carbon (nanotubes, graphene, fullerenes) • Template-based synthesis methods • Fabrication of micro and nano-mechanical structures • Nanoimprinting methods
Literature
  • Springer handbook of nanotechnology. Edited by Bharat Bhushan. 2nd/3rd ed. Berlin: Springer, 2010, 1 DVD-ROM. ISBN 9783642025242. info
Teaching methods
lectures
Assessment methods
oral examination
Language of instruction
Czech
Further Comments
Study Materials
The course is taught annually.
The course is taught: every week.
Listed among pre-requisites of other courses
The course is also listed under the following terms spring 2012 - acreditation, Spring 2014, Spring 2015, Spring 2016, Spring 2017, spring 2018, Spring 2019, Spring 2020, autumn 2021, Autumn 2022, Autumn 2023, Autumn 2024.
  • Enrolment Statistics (Autumn 2020, recent)
  • Permalink: https://is.muni.cz/course/sci/autumn2020/F3390