Podrobný výpis o publikaci

The present communication will report on nanostructured multilayer films containing metal nitride (NbN or ZrN) and carbon nitride. Alcatel 650 and Leybold Z550 sputtering systems equipped with two magnetrons and two r.f. generators were used for the deposition of nanocomposite coatings by r.f. reactive sputtering. The composite coatings, typically 2-3 mum thick, were deposited at a total pressure ranging from 0.2 to 1 Pa and at a relatively low substrate temperature not exceeding 200 degreesC. Various substrates, such as silicon, highly polished steel and tungsten carbide were used. The friction coefficient and wear rate were measured at room temperature in a ball-on-disc tribometer. We also investigated the structure of the multilayer by means of low-angle X-ray reflection and high angle X-ray diffraction. We determined the multilayer period and its changes with temperature from X-ray reflection. It follows from the X-ray diffraction that the polycrystalline structure of the multilayer is developed after annealing. Multilayer nanocomposites can be deposited at low substrate temperatures in conventional PVD coaters and they will combine good adhesion, low wear and low friction coefficient in one system.