Deposition of CNx Films in Inductively Coupled RF Discharge

@inproceedings{234491,
   author = {Zajíčková, Lenka and Eliáš, Marek and Buršíková, Vilma and Janča, Jan and Lorenc, Michal},
   address = {Warszaw},
   booktitle = {Proceedings of ICPIG XXIV},
   edition = {1999},
   language = {eng},
   location = {Warszaw},
   pages = {41-42},
   publisher = {Institute of Plasma Phycics and Laser Miscofusion},
   title = {Deposition of CNx Films in Inductively Coupled RF Discharge},
   year = {1999}
}

TY  - JOUR
ID  - 234491
AU  - Zajíčková, Lenka - Eliáš, Marek - Buršíková, Vilma - Janča, Jan - Lorenc, Michal
PY  - 1999
TI  - Deposition of CNx Films in Inductively Coupled RF Discharge
PB  - Institute of Plasma Phycics and Laser Miscofusion
CY  - Warszaw
N2  - Deposition of CNx Films in Inductively Coupled RF Discharge
ER  - 

ZAJÍČKOVÁ, Lenka, Marek ELIÁŠ, Vilma BURŠÍKOVÁ, Jan JANČA a Michal LORENC. Deposition of CNx Films in Inductively Coupled RF Discharge. In \textit{Proceedings of ICPIG XXIV}. 1999. vyd. Warszaw: Institute of Plasma Phycics and Laser Miscofusion, 1999, s.~41-42.