Multilayer gratings for X-UV optics

@article{327331,
   author = {Jergel, M. and Mikulík, Petr and Majková, E. and Pinčík, E. and Luby, Š. and Brunel, M. and Hudek, P. and Kostič, I.},
   article_location = {Bratislava},
   article_number = {4},
   keywords = {xrr; x-uv optics; gratings; w/si},
   language = {eng},
   issn = {0323-0465},
   journal = {Acta physica slovaca},
   title = {Multilayer gratings for X-UV optics},
   url = {http://www.sci.muni.cz/~mikulik/Publications.html#JergelMikulikMPLBHK_APL2000},
   volume = {50},
   year = {2000}
}

TY  - JOUR
ID  - 327331
AU  - Jergel, M. - Mikulík, Petr - Majková, E. - Pinčík, E. - Luby, Š. - Brunel, M. - Hudek, P. - Kostič, I.
PY  - 2000
TI  - Multilayer gratings for X-UV optics
JF  - Acta physica slovaca
VL  - 50
IS  - 4
SP  - 427
EP  - 427
PB  - Institute of Physics, SAS
SN  - 03230465
KW  - xrr
KW  - x-uv optics
KW  - gratings
KW  - w/si
UR  - http://www.sci.muni.cz/~mikulik/Publications.html#JergelMikulikMPLBHK_APL2000
N2  - Multilayer gratings are thin film structures possessing periodicities both in the normal and lateral directions. They combine the properties of surface gratings and planar multilayers thus providing a high throughput and high spectral resolution on higher diffraction orders. The unique diffraction properties are utilized in the X-ray and ultraviolet optics where no lenses or mirrors comparable with those for visible light are available. Multilayer gratings act as constant resolution dispersion elements in a broad spectral range. A fan of grating diffractions in real space is represented by a set of points on equidistant truncation rods in the reciprocal space. The kinematical theory of X-ray scattering explains well the positions of the grating truncation rods while the dynamical theory is inevitable to calculate the intensities along the truncation rods (grating efficiency). The properties of multilayer gratings are exemplified on two differently prepared lamellar gratings with the nominal normal and lateral periods of 8 nm and 800 nm, respectively. The fabrication steps are described in detail. The specular and non-specular X-ray reflectivities at wavelength 0.15418 nm were measured on one of the samples. The dynamical theory of X-ray scattering with a matrix modal eigenvalue approach was applied to extract the real structural parameters such as the surface and interface roughnesses, individual layer thicknesses, and the lamella width to the grating period ratio. The X-ray reflectometry is completed by microscopy observations which provide complementary and direct information on the local surface profile.
ER  - 

JERGEL, M., Petr MIKULÍK, E. MAJKOVÁ, E. PINČÍK, Š. LUBY, M. BRUNEL, P. HUDEK a I. KOSTIČ. Multilayer gratings for X-UV optics. \textit{Acta physica slovaca}. Bratislava: Institute of Physics, SAS, 2000, roč.~50, č.~4, s.~427-864. ISSN~0323-0465.