Optical characterization of nonabsorbing and weakly absorbing thin films with the wavelengths ...

@article{378151,
   author = {Ohlídal, Ivan and Franta, Daniel and Ohlídal, Miloslav and Navrátil, Karel},
   article_location = {USA},
   article_number = {31},
   keywords = {REFLECTION; CONSTANTS; THICKNESS; SILICON; SYSTEM},
   language = {eng},
   issn = {0003-6935},
   journal = {Applied Optics},
   title = {Optical characterization of nonabsorbing and weakly absorbing thin films with the wavelengths related to extrema in spectral reflectances},
   url = {http://hydra.physics.muni.cz/~franta/bib/AO40_5711.html},
   volume = {40},
   year = {2001}
}

TY  - JOUR
ID  - 378151
AU  - Ohlídal, Ivan - Franta, Daniel - Ohlídal, Miloslav - Navrátil, Karel
PY  - 2001
TI  - Optical characterization of nonabsorbing and weakly absorbing thin films with the wavelengths related to extrema in spectral reflectances
JF  - Applied Optics
VL  - 40
IS  - 31
SP  - 5711
EP  - 5711
PB  - Optical Society of America
SN  - 00036935
KW  - REFLECTION
KW  - CONSTANTS
KW  - THICKNESS
KW  - SILICON
KW  - SYSTEM
UR  - http://hydra.physics.muni.cz/~franta/bib/AO40_5711.html
N2  - In this contribution a new efficient modification of a method that enables us to perform the optical characterization of nonabsorbing and weakly absorbing thin films without using the absolute values of the reflectances measured is presented. Namely, this modification is based on determining the values of the wavelengths corresponding to touching the spectral dependences of the reflectances of the studied films measured for several angles of incidence with the envelopes of maxima and minima of these spectral dependences. By means of combining the explicit formulas containing the wavelengths mentioned and the suitable iteration procedure one can evaluate the values of the thicknesses and spectral dependences of the refractive indices of the films analyzed in reliable and precise ways.
ER  - 

OHLÍDAL, Ivan, Daniel FRANTA, Miloslav OHLÍDAL a Karel NAVRÁTIL. Optical characterization of nonabsorbing and weakly absorbing thin films with the wavelengths related to extrema in spectral reflectances. Online. \textit{Applied Optics}. USA: Optical Society of America, 2001, roč.~40, č.~31, s.~5711-5717. ISSN~0003-6935. [citováno 2024-04-24]