X-ray grazing incidence study of inhomogeneous strain relaxation in Si/SiGe wires

@article{492374,
   author = {Holý, Václav},
   article_number = {4},
   keywords = {X-ray grazing incidence study of inhomogeneous strain relaxation in Si/SiGe wires},
   language = {eng},
   issn = {0168-9002},
   journal = {Nuclear Instruments & Methods in Physics Research A},
   title = {X-ray grazing incidence study of inhomogeneous strain relaxation in Si/SiGe wires},
   volume = {200},
   year = {2003}
}

TY  - JOUR
ID  - 492374
AU  - Holý, Václav
PY  - 2003
TI  - X-ray grazing incidence study of inhomogeneous strain relaxation in Si/SiGe wires
JF  - Nuclear Instruments & Methods in Physics Research A
VL  - 200
IS  - 4
SP  - 267-272
EP  - 267-272
SN  - 01689002
KW  - X-ray grazing incidence study of inhomogeneous strain relaxation in Si/SiGe wires
N2  - X-ray grazing incidence study of inhomogeneous strain relaxation in Si/SiGe wires
ER  - 

HOLÝ, Václav. X-ray grazing incidence study of inhomogeneous strain relaxation in Si/SiGe wires. \textit{Nuclear Instruments \&{} Methods in Physics Research A}. roč.~200, č.~4, s.~267-272. ISSN~0168-9002. 2003.