Project of a clean room laboratory for silicon device technology at the Masaryk University

@inproceedings{566485,
   author = {Mikulík, Petr},
   address = {Rožnov pod Radhoštěm},
   booktitle = {Proceedings of International Conference Silicon-2004},
   keywords = {clean room; silicon; chip},
   language = {eng},
   location = {Rožnov pod Radhoštěm},
   pages = {54-55},
   publisher = {Karel Vojtěchovský},
   title = {Project of a clean room laboratory for silicon device technology at the Masaryk University},
   year = {2004}
}

TY  - JOUR
ID  - 566485
AU  - Mikulík, Petr
PY  - 2004
TI  - Project of a clean room laboratory for silicon device technology at the Masaryk University
PB  - Karel Vojtěchovský
CY  - Rožnov pod Radhoštěm
KW  - clean room
KW  - silicon
KW  - chip
N2  - The paper presents ideas, motivation and plans the the projection of a clean room laboratory for silicon device technology at the Masaryk University.
ER  - 

MIKULÍK, Petr. Project of a clean room laboratory for silicon device technology at the Masaryk University. In \textit{Proceedings of International Conference Silicon-2004}. Rožnov pod Radhoštěm: Karel Vojtěchovský, 2004, s.~54-55.