| LÜBBERT, D., Petr MIKULÍK, P. PERNOT, L. HELFEN, M.D. CRAVEN, S. KELLER, S. DENBAARS a T. BAUMBACH. X-ray microdiffraction imaging investigations of wing tilt in epitaxially overgrown GaN. Online. Physica stat.sol.(a). 2006, roč. 203, č. 7, s. 1733-1738. ISSN 0031-8965. [citováno 2024-04-24] |
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@article{698743,
author = {Lübbert, D. and Mikulík, Petr and Pernot, P. and Helfen, L. and Craven, M.D. and Keller, S. and DenBaars, S. and Baumbach, T.},
article_number = {7},
keywords = {lattice tilt; diffraction; X-ray diffraction; GaN; ELO},
language = {eng},
issn = {0031-8965},
journal = {Physica stat.sol.(a)},
title = {X-ray microdiffraction imaging investigations of wing tilt in epitaxially overgrown GaN},
url = {http://www.sci.muni.cz/~mikulik/Publications.html#LubbertMikulikPernot-pssa-2006},
volume = {203},
year = {2006}
}
TY - JOUR
ID - 698743
AU - Lübbert, D. - Mikulík, Petr - Pernot, P. - Helfen, L. - Craven, M.D. - Keller, S. - DenBaars, S. - Baumbach, T.
PY - 2006
TI - X-ray microdiffraction imaging investigations of wing tilt in epitaxially overgrown GaN
JF - Physica stat.sol.(a)
VL - 203
IS - 7
SP - 1733-1738
EP - 1733-1738
SN - 00318965
KW - lattice tilt
KW - diffraction
KW - X-ray diffraction
KW - GaN
KW - ELO
UR - http://www.sci.muni.cz/~mikulik/Publications.html#LubbertMikulikPernot-pssa-2006
N2 - The crystalline quality in epitaxially laterally overgrown (ELO) GaN and the amount of wing tilt is characterized on a local basis, with high spatial and angular resolution. A method of full-field X-ray microdiffraction imaging, termed rocking curve imaging, is used to record simultaneously a large set of local X-ray diffraction profiles originating from sample surface areas of micrometer size. x-omega maps of diffracted intensity allow to quantify the amount of wing tilt in individual lateral ELO periods as well as to monitor the fluctuations of tilt between adjacent periods. Automated shape analysis of the full set of local rocking curves provides a means to quantitatively characterize the local crystalline perfection of GaN. The ELO window and wing regions can be clearly separated; comparison indicates an average improvement of crystal quality by a factor 3–4 due to the lateral overgrowth process.
ER -
LÜBBERT, D., Petr MIKULÍK, P. PERNOT, L. HELFEN, M.D. CRAVEN, S. KELLER, S. DENBAARS a T. BAUMBACH. X-ray microdiffraction imaging investigations of wing tilt in epitaxially overgrown GaN. Online. \textit{Physica stat.sol.(a)}. 2006, roč.~203, č.~7, s.~1733-1738. ISSN~0031-8965. [citováno 2024-04-24]
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