IN-SITU INVESTIGATIONS OF SI AND GE INTERDIFFUSION IN SIGE MULTILAYERS AND CASCADE STRUCTURES

@inproceedings{710322,
   author = {Meduňa, Mojmír and Novák, Jiří and Holý, Václav and Bauer, Günther and Falub, Claudiu and Tsujino, Soichiro and Grützmacher, Detlev},
   address = {Karlsruhe},
   booktitle = {XTOP 2006 - 8th Biennial Conference on High Resolution X-Ray Diffraction and Imaging},
   keywords = {interdiffusion; x-ray diffraction; thin films},
   language = {eng},
   location = {Karlsruhe},
   pages = {124-124},
   publisher = {Forchungszentrum Karlsruhe},
   title = {IN-SITU INVESTIGATIONS OF SI AND GE INTERDIFFUSION IN SIGE MULTILAYERS AND CASCADE STRUCTURES},
   year = {2006}
}

TY  - JOUR
ID  - 710322
AU  - Meduňa, Mojmír - Novák, Jiří - Holý, Václav - Bauer, Günther - Falub, Claudiu - Tsujino, Soichiro - Grützmacher, Detlev
PY  - 2006
TI  - IN-SITU INVESTIGATIONS OF SI AND GE INTERDIFFUSION IN SIGE MULTILAYERS AND CASCADE STRUCTURES
PB  - Forchungszentrum Karlsruhe
CY  - Karlsruhe
KW  - interdiffusion
KW  - x-ray diffraction
KW  - thin films
N2  - We have performed in-situ x-ray reflectivity and diffraction measurements in the range around 700 C. The Ge content profile in SiGe multilayers was used for simulating the x-ray reflectivity or diffraction spectra.
ER  - 

MEDUŇA, Mojmír, Jiří NOVÁK, Václav HOLÝ, Günther BAUER, Claudiu FALUB, Soichiro TSUJINO a Detlev GRÜTZMACHER. IN-SITU INVESTIGATIONS OF SI AND GE INTERDIFFUSION IN SIGE MULTILAYERS AND CASCADE STRUCTURES. In \textit{XTOP 2006 - 8th Biennial Conference on High Resolution X-Ray Diffraction and Imaging}. Karlsruhe: Forchungszentrum Karlsruhe, 2006, s.~124.