MEDUŇA, Mojmír, Jiří NOVÁK, Günther BAUER, Václav HOLÝ, Claudiu FALUB, Soichiro TSUJINO a Detlev GRÜTZMACHER. Interdiffusion in SiGe alloys studied by x-rays. Materials Structure in Chemistry, Biology, Physics and Technology. Praha, roč. 14, č. 2, s. 122-123. ISSN 1211-5894. 2007. |
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@article{720786, author = {Meduňa, Mojmír and Novák, Jiří and Bauer, Günther and Holý, Václav and Falub, Claudiu and Tsujino, Soichiro and Grützmacher, Detlev}, article_location = {Praha}, article_number = {2}, keywords = {x-ray reflectivity; interdiffusion; SiGe}, language = {eng}, issn = {1211-5894}, journal = {Materials Structure in Chemistry, Biology, Physics and Technology}, title = {Interdiffusion in SiGe alloys studied by x-rays}, volume = {14}, year = {2007} }
TY - JOUR ID - 720786 AU - Meduňa, Mojmír - Novák, Jiří - Bauer, Günther - Holý, Václav - Falub, Claudiu - Tsujino, Soichiro - Grützmacher, Detlev PY - 2007 TI - Interdiffusion in SiGe alloys studied by x-rays JF - Materials Structure in Chemistry, Biology, Physics and Technology VL - 14 IS - 2 SP - 122-123 EP - 122-123 SN - 12115894 KW - x-ray reflectivity KW - interdiffusion KW - SiGe N2 - We have investigated SiGe/Si multilayers annealed in-situ at temperatures in the range 780-830 C by x-ray diffraction. From the fits of reflectivity and diffraction we have obtained diffusion coeficients and activation energy for Ge content 50%. ER -
MEDUŇA, Mojmír, Jiří NOVÁK, Günther BAUER, Václav HOLÝ, Claudiu FALUB, Soichiro TSUJINO a Detlev GRÜTZMACHER. Interdiffusion in SiGe alloys studied by x-rays. \textit{Materials Structure in Chemistry, Biology, Physics and Technology}. Praha, roč.~14, č.~2, s.~122-123. ISSN~1211-5894. 2007.
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