JERGEL, M., Petr MIKULÍK, E. MAJKOVÁ, Š. LUBY, R. SENDERÁK, E. PINČÍK, M. BRUNEL, P. HUDEK, I. KOSTIČ and A. KONEČNÍKOVÁ. Structural characterization of a lamellar W/Si multilayer grating. J. Appl. Phys. USA: American Institute of Physics, 1999, vol. 85, No 2, p. 1225-1227. ISSN 0021-8979.
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Basic information
Original name Structural characterization of a lamellar W/Si multilayer grating
Name in Czech Strukturní charakterizace planárních W/Si vrstevnatých mřížek
Authors JERGEL, M., Petr MIKULÍK (203 Czech Republic, guarantor), E. MAJKOVÁ, Š. LUBY, R. SENDERÁK, E. PINČÍK, M. BRUNEL, P. HUDEK, I. KOSTIČ and A. KONEČNÍKOVÁ.
Edition J. Appl. Phys. USA, American Institute of Physics, 1999, 0021-8979.
Other information
Original language English
Type of outcome Article in a journal
Field of Study 10302 Condensed matter physics
Country of publisher United States of America
Confidentiality degree is not subject to a state or trade secret
WWW URL
Impact factor Impact factor: 2.275
RIV identification code RIV/00216224:14310/99:00000992
Organization unit Faculty of Science
UT WoS 000077792600086
Keywords in English x-ray reflectivity; gratings; multilayers
Tags gratings, multilayers, x-ray reflectivity
Tags International impact, Reviewed
Changed by Changed by: doc. RNDr. Petr Mikulík, Ph.D., učo 855. Changed: 10/7/2009 15:28.
Abstract
A lamellar multilayer grating of the nominal normal and lateral periods 8 nm and 800 nm, respectively, was obtained by etching a planar amorphous W/Si multilayer up to the substrate. The specular reflectivity, grating truncation rods of non-zero orders, and a reciprocal space map of the scattered intensity close to the total external reflection were measured using the CuKa radiation. For the first time, we demonstrate an extraction of real structural parameters of a fully etched periodic multilayer grating from fitting the measured truncation rods based on the matrix modal eigenvalue approach to the dynamical theory of reflectivity by gratings.
Abstract (in Czech)
A lamellar multilayer grating of the nominal normal and lateral periods 8 nm and 800 nm, respectively, was obtained by etching a planar amorphous W/Si multilayer up to the substrate. The specular reflectivity, grating truncation rods of non-zero orders, and a reciprocal space map of the scattered intensity close to the total external reflection were measured using the CuKa radiation. For the first time, we demonstrate an extraction of real structural parameters of a fully etched periodic multilayer grating from fitting the measured truncation rods based on the matrix modal eigenvalue approach to the dynamical theory of reflectivity by gratings.
Links
MSM 143100002, plan (intention)Name: Fyzikální vlastnosti nových materiálů a vrstevnatých struktur
Investor: Ministry of Education, Youth and Sports of the CR, Physical properties of new materials and layered structures
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