Interdiffusion in SiGe alloys studied by x-rays

@article{720786,
   author = {Meduňa, Mojmír and Novák, Jiří and Bauer, Günther and Holý, Václav and Falub, Claudiu and Tsujino, Soichiro and Grützmacher, Detlev},
   article_location = {Praha},
   article_number = {2},
   keywords = {x-ray reflectivity; interdiffusion; SiGe},
   language = {eng},
   issn = {1211-5894},
   journal = {Materials Structure in Chemistry, Biology, Physics and Technology},
   title = {Interdiffusion in SiGe alloys studied by x-rays},
   volume = {14},
   year = {2007}
}

TY  - JOUR
ID  - 720786
AU  - Meduňa, Mojmír - Novák, Jiří - Bauer, Günther - Holý, Václav - Falub, Claudiu - Tsujino, Soichiro - Grützmacher, Detlev
PY  - 2007
TI  - Interdiffusion in SiGe alloys studied by x-rays
JF  - Materials Structure in Chemistry, Biology, Physics and Technology
VL  - 14
IS  - 2
SP  - 122-123
EP  - 122-123
SN  - 12115894
KW  - x-ray reflectivity
KW  - interdiffusion
KW  - SiGe
N2  - We have investigated SiGe/Si multilayers annealed in-situ at temperatures in the range 780-830 C by x-ray diffraction. From the fits of reflectivity and diffraction we have obtained diffusion coeficients and activation energy for Ge content 50%.
ER  - 

MEDUŇA, Mojmír, Jiří NOVÁK, Günther BAUER, Václav HOLÝ, Claudiu FALUB, Soichiro TSUJINO and Detlev GRÜTZMACHER. Interdiffusion in SiGe alloys studied by x-rays. \textit{Materials Structure in Chemistry, Biology, Physics and Technology}. Praha, 2007, vol.~14, No~2, p.~122-123. ISSN~1211-5894.