Ellipsometry and transport studies of thin-film metal nitrides

@article{200254,
   author = {Humlíček, Josef and Nebojsa, Alois and Hora, J. and Stráský, M. and Spousta, J. and Šikola, T.},
   article_location = {UK Oxford},
   article_number = {332},
   keywords = {ellipsometry},
   language = {eng},
   issn = {0040-6090},
   journal = {Thin Solid Films},
   title = {Ellipsometry and transport studies of thin-film metal nitrides},
   volume = {1998},
   year = {1998}
}

TY  - JOUR
ID  - 200254
AU  - Humlíček, Josef - Nebojsa, Alois - Hora, J. - Stráský, M. - Spousta, J. - Šikola, T.
PY  - 1998
TI  - Ellipsometry and transport studies of thin-film metal nitrides
JF  - Thin Solid Films
VL  - 1998
IS  - 332
SP  - 25
EP  - 25
PB  - Elsevier science
SN  - 00406090
KW  - ellipsometry
ER  - 

HUMLÍČEK, Josef, Alois NEBOJSA, J. HORA, M. STRÁSKÝ, J. SPOUSTA and T. ŠIKOLA. Ellipsometry and transport studies of thin-film metal nitrides. \textit{Thin Solid Films}. UK Oxford: Elsevier science, 1998, vol.~1998, No~332, p.~25-29. ISSN~0040-6090.