FC250 Plasma and Dry Nano/Microtechnologies

Faculty of Science
Spring 2023
Extent and Intensity
2/1/0. 3 credit(s) (plus extra credits for completion). Type of Completion: k (colloquium).
doc. Mgr. Lenka Zajíčková, Ph.D. (lecturer)
Guaranteed by
prof. RNDr. Mirko Černák, CSc.
Department of Physical Electronics - Physics Section - Faculty of Science
Contact Person: doc. Mgr. Lenka Zajíčková, Ph.D.
Supplier department: Department of Physical Electronics - Physics Section - Faculty of Science
Basic knowledge of vacuum technique, gas kinetics, principles of chemical reactions, surface processes (adsorption, desorption, difussion), plasma processes and interaction of ions with materials. It is advantageous to pass the course F4280 Thin Films Deposition and Surface Modification Technologies.
Course Enrolment Limitations
The course is offered to students of any study field.
Course objectives
The goal of the course is to provide an overview of micro/nanofabrication methods based on gas phase processes, either purely physical, chemical or using combination of physical and chemical approaches.
Learning outcomes
At the end of the course students should be able to explain different approaches in nano/microtechnologies and understand their basic principles and requirements.
  • Nanotechnology - Definition and Examples
  • Repetition of Knowledge Base for Micro-/Nanotechnologies (gas kinetics, principles of chemical reactions, surface processes, plasma processes and interaction of ions with materials)
  • Basic Microfabrication Techniques (lithography, thin film deposition and doping, etching and substrate removal, substrate bonding)
  • MEMS Fabrication Techniques (bulk micromachining, surface micromachining, high-aspect-ratio micromachining)
  • Nanofabrication Techniques (e-beam nanofabrication, epitaxy and strain engineering, scanning probe techniques, self-assembly and template manufacturing)
  • Synthesis of carbon-based nanomaterials
  • Lessons from Nature - Biomimetics (multifunctional plant surfaces and smart materials, lotus effect: surfaces with roughness-induced superhydrophobicity, self-cleaning and low adhesion, biologically inspired attachment systems, gecko feet)
  • Springer handbook of nanotechnology. Edited by Bharat Bhushan. 3rd rev. and extended ed. New York: Springer, 2010. xlviii, 19. ISBN 9783642025242. info
  • CHEN, Francis F. and Jane P. CHANG. Lecture notes on principles of plasma processing. New York, N.Y.: Kluwer Academic/Plenum publishers, 2003. ix, 208. ISBN 0306474972. info
Teaching methods
The course major part are lectures that are supplemented by laboratory tasks in CEITEC Nano Research Infrastructure.
Assessment methods
colloquim - written test
Language of instruction
Further comments (probably available only in Czech)
The course is taught once in two years.
The course is taught: every week.
General note: S.
The course is also listed under the following terms Spring 2008 - for the purpose of the accreditation, Spring 2011 - only for the accreditation, Spring 2007, Spring 2008, Spring 2009, Spring 2010, Spring 2011, Spring 2012, spring 2012 - acreditation, Spring 2013, Spring 2015, Spring 2017, Spring 2019, Spring 2021.
  • Enrolment Statistics (Spring 2023, recent)
  • Permalink: https://is.muni.cz/course/sci/spring2023/FC250