PřF:F5150 Physics of thin films - Course Information
F5150 Physics of thin films
Faculty of ScienceAutumn 2006
- Extent and Intensity
- 2/1/0. 4 credit(s). Type of Completion: z (credit).
- Teacher(s)
- doc. RNDr. Karel Navrátil, CSc. (lecturer)
doc. RNDr. Karel Navrátil, CSc. (seminar tutor) - Guaranteed by
- prof. RNDr. Josef Humlíček, CSc.
Department of Condensed Matter Physics – Physics Section – Faculty of Science
Contact Person: doc. RNDr. Karel Navrátil, CSc. - Timetable
- Tue 13:00–14:50 F3,03015, Tue 15:00–15:50 F3,03015
- Course Enrolment Limitations
- The course is also offered to the students of the fields other than those the course is directly associated with.
- fields of study / plans the course is directly associated with
- Syllabus
- Thin film deposition technology:thermal evaporation, cathodic sputtering, physical methods for preparation of epitaxial films,chemical methods used for deposition of thin films,anodic and thermal oxidation.Thiskness measurement and analytical techniques:electrical methods, gravimetric measurements,quartz crystal monitor,stylus,emissive-absorption methods,chemical analysis,structural analysis.Nucleation and growth of thin films:growth process,coalescence,influence of deposition parameters,epitaxial-growth phenomena,theory of epitaxy. Mechanical properties:internal stress,origin of intrinsic stress,mechanical properties,adhesion of films.Electron transport in films:conduction in continuous and discontinuous metal films,electrical conduction of semiconducting and insulator films.Optical properties of layers:optical synthesis and analysis of stratified media,optical properties of films. Applications of thin films.
- Language of instruction
- Czech
- Further comments (probably available only in Czech)
- The course can also be completed outside the examination period.
The course is taught once in two years.
General note: S.
- Enrolment Statistics (Autumn 2006, recent)
- Permalink: https://is.muni.cz/course/sci/autumn2006/F5150