MUNI Thermo Fisher SCIENTIFIC Vybrané kapitoly z elektronové mikroskopie Sample manipulation František Vaske Vybrané kapitoly z elektronové mikroskopie General requirements for sample manipulator Stands still - no vibrations • High stifness, low mass • Stands still - no drift • Temperature stability Vybrané kapitoly z elektronové mikroskopie Thermo Fisher SCIENTIFIC General requirements for sample manipulator No vibrations Sources of vibrations • Floor vibrations • Accoustics Loss of resolution Image flags - SEM specific (resolution, dwell) \7 100 15C 200 ISC 300 MUNI Vybrané kapitoly z elektronové mikroskopie Thermo Fisher SCIENTIFIC General requirements for sample manipulator No vibrations Vybrané kapitoly z elektronové mikroskopie Thermo Fisher SCIENTIFIC General requirements for sample manipulator No vibrations Increase stiffness • Lightweigth stage • Friction brakes • Herthzian contact in bearings Increase damping • Tuned mass damper M m, W Strive for: HighM high oo< LowQ MUNI Vybrané kapitoly z elektronové mikroskopie Thermo Fisher SCIENTIFIC General requirements for sample manipulator No vibrations Increase stiffness • Lightweigth stage • Friction brakes • Herthzian contact in bearings Increase damping • Tuned mass damper MUNI Vybrané kapitoly z elektronové mikroskopie Thermo Fisher SCIENTIFIC General requirements for sample manipulator No vibrations Increase stiffness • Lightweigth stage • Friction brakes • Herthzian contact in bearings Increase damping • Tuned mass damper MUNI Vybrané kapitoly z elektronové mikroskopie Thermo Fisher SCIENTIFIC General requirements for sample manipulator No vibrations Increase damping • Tuned mass damper 3i iTE Solution Ml U l\l I Vybrané kapitoly z elektronové mikroskopie Thermo Fisher SCIENTIFIC General requirements for sample manipulator Thermal drift • Thermal drift • Caused by thermal expansion • Temperature stability • Smart design drift = L0a(T1-T0)/t Vybrané kapitoly z elektronové mikroskopie Thermo Fisher SCIENTIFIC General requirements for sample manipulator Motion • Accuracy • Repeatability - more important, can be calibrated • Feedback control, mapping Vybrané kapitoly z elektronové mikroskopie Thermo Fisher SCIENTIFIC General requirements for sample manipulator Eucentricity Non Eucetric stage • Z stacked before T M u III Vybrané kapitoly z elektronové mikroskopie Thermo Fisher SCIENTIFIC General requirements for sample manipulator Eucentricity MUNI Vybrané kapitoly z elektronové mikroskopie Thermo Fisher SCIENTIFIC General requirements for sample manipulator Eucentricity Eucetric stage • T stacked before Z Vybrané kapitoly z elektronové mikroskopie Thermo Fisher SCIENTIFIC General requirements for sample manipulator Eucentricity Vybrané kapitoly z elektronové mikroskopie Thermo Fisher SCIENTIFIC General requirements for sample manipulator Eucentricity Vybrané kapitoly z elektronové mikroskopie Thermo Fisher SCIENTIFIC General requirements for sample manipulator System compliance Vacuum compatibility to reduce contamination • Avoid soft plastics, Zinc (brass), magnesium, cadmium, anodizing, paints... • Use PEEK, steel, aluminium alloys, bronze, chemical nickel plating Magnetic compatibility to not to distort beams • Avoid magnetic materials - steel, iron, electrolytic nickel plating • Use Aluminium alloys, stainless steel • AC fields are problematic (motors) • DC shifts beams predictably Chemical resistance to gas chemistry • Non reactive surfaces - gold plating if needed Vacuum tightness • Consider electrical feedthrough, dynamic seals • 1e-8 mbar*l/s Vybrané kapitoly z elektronové mikroskopie Thermo Fisher SCIENTIFIC TEM stages • Mounted on the column • At atmosphere • Inserts sample on a holder into objective lens • Additional functionality achieved by sample holders M U l\l I Vybrané kapitoly z elektronové mikroskopie Thermo Fisher SCIENTIFIC TEM stages Movement ranges to accomodate standard 0 3 mm sample (TEM grid) and use case Sample size is a compromise between magnification needed and practicality Tilt axis for 3D reconstruction O.IU KutKTHOWOVA IQMfHiKAKIK A 31) MHWÉMBI JOT l$]KSi$I Ohe 9.41 Vbrm» Hrktnmin* u«iH«I*ltr a JO rrkuoBtrakrr (•) Ibgialnrr Mra mint* ft pt\ i«*iu|k»ui n.»k;»|» m wi.ik.i v nmumi -ililn lTIT. (b| ľmniíty nbjcfcta a* Jfdautlivých mimrir». (c) Zprtná puälaŕnva rrkiwMrukii |>Avi«liilli -100°C Vybrané kapitoly z elektronové mikroskopie Thermo Fisher SCIENTIFIC Additional equipment - hot stage • Low temperature < 400°C • Mid temperature <1000°C - shielding needed from thermal electrons • High temperature <1400°C - special material requirements, lifetime in hours Vybrané kapitoly z elektronové mikroskopie Thermo Fisher SCIENTIFIC Additional equipment - hot stage Melting and recrystallization of AgCu solder Vybrané kapitoly z elektronové mikroskopie Thermo Fisher SCIENTIFIC