C12Cryopumps, Cryogenics
LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004
Contents
C12.02
General
Applications and Accessories
Cryopumps . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C12.03
Cold Heads . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C12.04
General
Cryopumps . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C12.05
Multiple-Operation of Refrigerator Cryopumps . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C12.06
Regenerating Cryopumps . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C12.06
Refrigerating Capacity of Cold Heads . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C12.07
Cold Heads . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C12.07
Compressor Units . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C12.09
Products
Cryopumps
Standard Cryopumps
COOLVAC 800 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C12.10
Cryopumps with Fully Automatic Control
ClassicLine
COOLVAC 1.500 CL, 2.000 CL, 3.000 CL . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C12.12
COOLVAC 5.000 CL, 10.000 CL . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C12.18
COOLVAC 18.000 CL, 30.000 CL . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C12.22
SemiLine
COOLVAC 1500 SL . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C12.24
System Controller SC / Power Supply PS. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C12.25
Cryogenics
Cold Heads
Single Stage Cold Head COOLPOWER 120 T . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C12.28
Dual Stage Cold Heads
COOLPOWER 7/25, 5/100 and 5/100 T . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C12.30
Compressor Units COOLPAK 4000/4200, COOLPAK 6000/6200. . . . . . . . . . . . . . . . . . . . . . C12.32
General Accessories for Compressor Units COOLPAK . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C12.34
Refrigerator Cryostats
Based on RDK 6-320 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C12.35
Optical, based on RDK 6-320 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C12.36
Accessories
Cryopumps / Cryogenics
Controllers and Monitoring Units for Cryopumps . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C12.38
COOLVAC ClassicLine, System Configuration
Single Operation. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C12.39
Dual Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C12.40
Dual and Mutiple Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C12.41
Modell 9700 Low Temperature Controller . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C12.42
MODEL 1901 Low Temperature Measuring Instrument . . . . . . . . . . . . . . . . . . . . . . . . . . . . C12.43
Temperature Sensors (Silicon Diode) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C12.44
Safety Valve. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C12.45
Precision Manometer . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C12.45
Cryopumps, Cryogenics
Conversion of Units
Celsius, Fahrenheit, Kelvin
Kelvin (abbreviated as K) is the unit of
temperature.
Temperatures on the Kelvin scale are converted
into temperatures on the Celsius scale as follows:
n °C ; (n + 273.15) K.
Since the following equation applies between
Celsius scale and Fahrenheit scale
n °F ; 5/9 (n – 32) °C
it follows that
n °F ; 5/9 (n + 459.67) K.
The inverse equations are as follows:
m K ; (m – 273.15) °C
m °C ; (1.8 m + 32) °F
m K ; (1.8 m – 459.67) °F.
The following applies in particular to absolute
Zero:
0 K ; -273.15 °C ; -459.67 °F.
1 bar = 14.5 psi
1 MPa = 10 bar
C12
LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004
Cryopumps, Cryogenics
C12.03
Applications and Accessories, Cryopumps and Stirling Cooler
UHV systems
Beam tubes in particle accelerators
Transfer chambers / Loadlock
General research
Evaporation coating systems
Sputtering systems
Ion implanters
Metallization systems
Space simulation chambers
Electron beam welding systems
x x x x
x
x x x ( x ) x
x x x x x x x x x
x x x x x x x x
x x x x
x x x ( x ) x
x x x x x x x
x x x x x
x x x
Accessories
Cryo
pum
ps
COOLVAC
5.000CL
COOLVAC
10.000CL
COOLVAC
18.000CL
COOLVAC
30.000CL
COOLPAK 4000/4200 compressor unit
COOLPAK 6000/6200 compressor unit
MODEL 1901 low temperature measuring instrument
Temperature sensors (silicon diode)
GD 2 gas manifold
GD 4 gas manifold
( x ) = Only conditionally suited
[ x ] = For dual operation only
x x x x x
[ x ] x x x x
x
x
x x x x x x
x x x x
Page
C12.32
C12.32
C12.43
C12.44
C12.34
C12.34
COOLVAC
3.000CL
COOLVAC
2.000CL
COOLVAC800COOLVAC
1.500CL
COOLVAC
1.500SL
Application
LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004
Cryopumps, Cryogenics
C12.04
Applications and Accessories, Cold Heads
Cooling of samples and detectors
Cooling of superconductors
Cooling of cryopanels
Cleaning of gases
Calibration of sensors
Optical spectroscopy
Infrared spectroscopy
Matrix spectroscopy
Testing of superconductors
Cooling of superconducting magnets, coils and components HTC + LTC
x x x x
x x x
x x x x
x x x x
x
x x x
x x x
x x
x
x x
Accessories
Cold
Heads
COOLPOW
ER
7/25
COOLPAK 4000/4200 compressor unit
COOLPAK 6000/6200 compressor unit
Modell 9700 low temperature controller
MODEL 1901 low temperature measuring instrument
Temperature sensors (silicon diode)
x
x x x
x x x
x x x x
x x x x
Page
C12.32
C12.32
C12.42
C12.43
C12.44
COOLPOW
ER
5/100
COOLPOW
ER
120T
COOLPOW
ER
5/100T
Application
Cryopumps, Cryogenics
C12.05
General
LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004
C12
Cryopumps
The second stage of the cold head (7) is used to
cool the cryopanels (8). Depending on the operating
conditions, operating temperatures of 10 to
20 K are attained.
Here the process of cryocondensation of N2, O2
and argon will take place.
The active pumping surfaces are made of copper
of high thermal conductivity and they are tightly
linked thermally to the second stage of the cold
head. H2, Ne and He are also adsorbed on to
these surfaces which are partly covered with
activated charcoal.
All cryopumps from the COOLVAC range are
equipped with a safety valve which is set in the
factory so that it will open at an overpressure of
150 mbar (113 Torr). In order to be able to safely
remove any gases which may present a health
hazard when the safety valve responds, the valve
is equipped with an additional DN 40 KF flange
where an exhaust line is connected.
The pump’s body, all flanges and the safety valve
are made of high-quality stainless steel.
Upon request we will be pleased to mail you
our special publication SO 182.04.02 “Benefits
of modern refrigerator cryopumps in industrial
processes and research”.
Cryopumps are gas entrapment vacuum pumps
for the pressure range from 10-3 to < 10-11 mbar
(0.75 x 10-3 to ≤ 0.75 x 10-11 Torr). The principle
of operation is that gaseous substances are
bound to the cold surfaces within the pump by
means of cryocondensation, cryosorption or
cryotrapping.
In order to be able to produce a high or ultra high
vacuum the cold surfaces (cryopanels) must be
cooled to a sufficiently low temperature. Depending
on the type of cooling system used a difference
is made between refrigerator cryopumps, bath
cryopumps and evaporator cryopumps.
LEYBOLD manufactures only cryopumps which
are cooled by means of a refrigerator.
Advantages to the User
Advantages offered by the Pumping Principle
o High effective pumping speed for all gases
o Extremely high pumping speed for water
vapor
For a given diameter of the high vacuum flange,
the cryopump offers the highest pumping speed
of all high vacuum pumps.
Advantages offered by Design
In contrast to gas transfer high vacuum pumps
(mechanically suspended turbomolecular pumps,
for example), cryopumps do not have any
mechanically moving, oil, or grease lubricated
parts on the vacuum side.
The following advantages are a direct result of
this design characteristic:
o Hydrocarbon-free vacuum in the pressure
range from 10-3 to < 10-11 mbar (0.75 x 10-3
to ≤ 0.75 x 10-11 Torr).
o Insensitivity to mechanical disturbances from
particles coming from the process or external
vibrations.
Further Advantages
o Much more compact than comparable pump
systems offering a pumping speed of over
1500 l x s-1
o Backing pump is only required during start-up
and during regeneration
o Easy process control and pump control via
computer
o Favorable price-to-performance ratio and low
running costs especially at higher pumping
speeds
The cryopumps are cooled by the well-proven
two-stage cold heads from LEYBOLD’s
COOLPOWER line (Gifford/McMahon principle).
The design of a refrigerator cryopump from the
COOLVAC range is shown schematically in the
figure below.
The first stage of the cold head (9) cools the
thermal radiation shield (5) and the baffle (6) of
the pump. Depending on the type of pump and
the operating conditions operating temperatures
of 45 to 80 K are attained.
Correspondingly water vapor condenses at this
temperature.
The thermal shield and baffle are made of copper
which conducts heat very well so as to optimally
utilize the refrigerating capacity which is availa-
ble.
Moreover, the thermal shield is metallized so that
reflective losses will be minimal.
6
7
5
4
8
9
1
2
3
10
11
COOLVAC refrigerator cryopump
1 High vacuum flange
2 Pump body
3 Foreline flange
4 Safety valve with flange connection
for connection of an exhaust line
5 Thermal radiation shield
6 Baffle
7 Second stage of the cold head
8 Cryopanels
9 First stage of the cold head
10 Helium gas connections
11 Cold head motor with housing and
electrical connections
GeneralCryopumps, Cryogenics
C12.06 LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004
Regenerating Cryopumps
An important aspect in the operation of cryopumps
is that of regeneration. Since a cryopump
is a gas entrapment pump, the gasses which
have accumulated in the pump during the
“pumping” mode must from time to time be
removed from the pump. This is done by switching
the compressor unit off and by warming up
the cryopanels to room temperature or sightly
higher so that the released substances can be
pumped out by a forevacuum pump.
Cryopumps without Electric Regeneration
System
The cryopump is warmed up to room temperature
by purging the inside of the pump with a dry,
pre-warmed inert gas (such as nitrogen). In this
case it is not possible to set up defined and controlled
temperatures within the cryopump. Thus
the simultaneous presence of gases such as
hydrogen and oxygen in the pump can not be
entirely excluded. The formation of ignitable gas
mixtures is only prevented by the diluting effect
of the dry inert gas.
Cryopumps with Fully Automatic Electric
Regeneration System from LEYBOLD
The cryopump is warmed up to room temperature
by heating the 1st and 2nd stages of the cold
head with electric heaters. In this case, a defined
and controlled temperature distribution within the
cryopump can be set up. This controlled warming
process ensures that the pumped gases are
removed sequentially, i.e. the pumped gases are
released one after the other in the following
sequence:
o Gases adsorbed at the cryopanels
(e.g. hydrogen, helium, neon),
o Gases condensed at the cryopanels
(e.g. nitrogen, oxygen, argon),
o Gases and vapors which have condensed on
to the baffle and thermal radiation shield (e.g.
water vapor).
The electric method of regeneration from
LEYBOLD prevents gases such as hydrogen and
oxygen from being present in the pump at the
same time. This excludes the formation of ignitable
gas mixtures right from the start.
Multiple Operation of
Refrigerator Cryopumps
The powerful LEYBOLD compressor units
COOLPAK 4000 D and 6000 D open up the possibility
of operating two cold heads or refrigerator
cryopumps simultaneously.
Multiple operation means operation of several
cryopumps with one compressor unit.
Advantages to the User
o Significantly reduced investment and operating
costs
o Small footprint
The warming up process is fully automatic.
Pressure and temperature distribution within the
pump are set up and controlled by the control
system at all times. The sequential regeneration of
pumped gases prevents the formation of ignitable
gases right from the start. This ensures the
utmost safety during the regeneration of cryopumps
from LEYBOLD.
In the case of cryogenic pumps with fully automatic
control there exist two cryo pump lines.
1. The COOLVAC ClassicLine (COOLVAC CL)
offering the following pumping speed
classes for nitrogen in l/s: 1500, 2000, 3000,
5000, 10.000, 18.0000 and 30.000;
COOLVAC 1500 CL, for example.
2. The COOLVAC SemiLine (COOLVAC SL)
offering a pumping speed for nitrogen of
1500 l/s: COOLVAC 1500 SL.
The pumps of the ClassicLine offer total regeneration
as standard and the COOLVAC 1500 SL
offers in addition the possibility of fast regenera-
tion.
In the price list the designators “V” and “H” appear
in connection with the pump designations.
“H”:
The high-vacuum flange is located at the side
and the cold head below, as is the case for the
COOLVAC 1500 SL-H, DN 200 CF.
“V”:
The high-vacuum flange is located at the top
and the cold head below, as is the case for the
COOLVAC 1500 CL-V, DN 200 CF.
Installation orientations for the COOLVAC
COOLVAC V
High-vacuum flange at the top,
cold head at the bottom
COOLVAC H
High-vacuum flange at the side,
cold head at the bottom
Cryopumps, Cryogenics
C12.07
General
LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004
C12
Refrigerating Capacity of Cryogenic Cold Heads
2ndStageTemperature
0
5
10
15
20
25
30
35
0 20 40 60 80 100 120 140
K
K
1st Stage Temperature
0W
1W
2W
3W
4W
8W
9W
10W
25W
35W
5W
6W
7W
10W
1st Stage
Refrigeration Capacity
2nd Stage
Refrigeration
Capacity
0 10020 40 60 80
0
5
10
15
20
25
30
K
K
120 140
0W 20W 40W 80W
120W
140W2W
4W
6W
8W
0W
2nd
Stage
Refrige-
ration
Capacity
1st Stage Refrigeration Capacity
60W 100W
10W
1st Stage Temperature
2ndStageTemperature
0 10020 40 60 80
0
5
10
15
20
35
40
K
K
120 140
25
30
40W0W
2W
4W
6W
8W
10W
12W
80W 100W 120W 140W
2nd
Stage
Refriga-
ration
Capacity
1st Stage Refrigaration Capacity
1st Stage Temperature
2ndStageTemperature
0 10010 20 30 40 50 60 70 80 90
0
25
50
75
100
125
150
110
Temperature
K
W
CoolingCapacity
Typical refrigerating capacity of the cold head COOLPOWER 120 T Typical refrigerating capacity of the cold head COOLPOWER 7/25
Typical refrigerating capacity of the cold head COOLPOWER 5/100 Typical refrigerating capacity of the cold head COOLPOWER 5/100 T
The refrigerating capacities stated apply to vertical operation with the cold end at the bottom.
Cold Heads
A refrigerator (cold head) is a gas cooling
machine which operates on the basis of a
thermodynamic cycle to produce cryogenic
temperatures (T < 120 K).
Refrigerators operating according to the Gifford/
McMahon principle have succeeded over other
methods of cooling cryopumps and cryostats.
It is thus employed exclusively by LEYBOLD.
In order to account for individual requirements
from customers, LEYBOLD offers customized
cryostats as well.
Gifford/McMahon-
Refrigerators
Advantages to the User
o Low temperatures on a single key press
o No liquid helium and no liquid nitrogen are
required
o Very simple to operate
o High refrigerating capacity from a small
volume
o Easy process control and temperature control
via a computer
Advantages by Design
o No space problems since cold head and compressor
unit can be installed and operated
apart
o Installation of the cold head basically in any
orientation
o High reliability
o Long periods of operation without
maintenance
GeneralCryopumps, Cryogenics
C12.08 LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004
Typical Applications
o Cooling of cryopanels in cryopumps thereby
producing high or ultra high vacuum
o Cooling of superconducting magnets; in
magnetic resonance tomographs, for example
o Cooling of samples and detectors; especially
for cooling of
– samples for spectroscopic analysis in the
areas of solid state and surface physics
– high temperature superconductors
– superconductors and semiconductors
– infrared and gamma detectors
o Calibration of sensors
Cold Heads from the
COOLPOWER Range
The standard range of single-stage and two-stage
cold heads matches a wide range of applications.
LEYBOLD is offering refrigerators with usable
refrigerating powers of 120 W at 80 K
(COOLPOWER 120, single-stage) and down to
3.5 W at 10 K (COOLPOWER 5/100 T; dual-
stage).
The cold heads basically consist of three subas-
semblies:
o Drive and control unit for the displacer
o Displacer
o First stage of the cold head (and second stage
in the case of two-stage cold heads).
Pneumatically driven
Cold Heads
Advantages
o Simple Design
The pneumatic drive system for the displacer
of these cold heads from LEYBOLD consists
of only two mechanically moving components:
the rotating control valve and the
synchronous motor driving the control valve.
o Easy and quick maintenance
All LEYBOLD cryopumps from the COOLVAC
range are equipped with pneumatically driven
LEYBOLD cold heads. Owing to the simple
design of the built-in cold heads, maintenance
is easy. Maintenance can be performed in
place without detaching the cryopump from
the vacuum chamber.
Advantages Through High
Reliability
As to reliability, LEYBOLD cold heads are top per-
formers.
Especially high reliability is required for medical
instrumentation, specifically in connection with
nuclear spin tomographs. In this application cold
heads are used to cool superconducting magnets
and they are thus exposed to strong magnetic
fields.
The leading manufacturers of nuclear spin tomographs
have therefore decided to use LEYBOLD
cold heads to cool the superconducting magnets.
200
150
100
50
0
Q1
W
T1
0 50 100 150 200 250 300 K
7/25
5/100
Refrigerating capacity as a function of temperature; operation in connection
with the recommended compressor unit at 50 Hz; measured under standard
acceptance conditions:
Refrigerating capacity Q
.
1 of the first stage as a function of temperature T1
of the first stage (2nd stage: Q
.
2 = 0)
5/100
0
Q2
T2
0 50 100 150 200 250 300 K
W
5
10
15
20
25
30
7/25
Refrigerating capacity Q
.
2 of the second stage as a function of temperature T2,
of the second stage (1st stage: T1 = 80 K = constant)
Standard acceptance conditions:
Cold head in a vacuum, 2nd cold stage thermally shielded by a radiation
shield (high-gloss nickel-plated) attached to the 1st stage,
thermal loading Q
.
simulated by electrical heating.
.
.
13
12
11
10
9
8
7
6
5
4
3
2
1
14
15
16
17
18
19
Dual-stage Gifford/McMahon cold head (schematic diagram)
1 Electrical connection and current lead-through for
cold head motor
2 Helium high pressure connection
3 Helium low pressure connection
4 Cylinder, 1st stage
5 Displacement piston, 1st stage
6 Regenerator, 1st stage
7 Expansion volume, 1st stage
8 1st (refrigerator) stage (copper flange)
9 Cylinder, 2nd stage
10 Displacement piston, 2nd stage
11 Refrigerator, 2nd stage
12 Expansion volume, 2nd stage
13 2nd (refrigerator) stage (copper flange)
14 Vapor pressure measurement chamber
15 Control piston
16 Control volume
17 Control disc
18 Control valve
19 Cold head motor
Cryopumps, Cryogenics
C12.09
General
LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004
C12
COOLPAK 4000 to 6000 compressors are available
for single operation of the remaining cold
heads from the COOLPOWER line as well as for
multiple operation of cryopumps and cryostats.
The period during which no maintenance will be
required on the LEYBOLD compressor units
depends on the service life of the adsorber. If the
For the operation of
Compressor unit Cold heads Cryopumps
COOLPAK 4000 D 2 x COOLPOWER 7/25 2 x COOLVAC 800/1500/2000
COOLPAK 4000/4200 – 2 x COOLVAC 1500/2000
COOLPAK 6000 D 2 x COOLPOWER 7/25 2 x COOLVAC 1500/2000
up to 2 x COOLPOWER 5/100 1) 2 x COOLVAC 3000
COOLPAK 6000/6200 – up to 3 x COOLVAC 1500/2000
– 2 x COOLVAC 3000
1) at reduced power
The possibilities for multiple operation of refrigerator cryo pumps are given in the following table:
values for the ambient temperature and the cooling
water entry temperature remain within the
specified range, LEYBOLD guarantees a service
life for the adsorber – and thus a period during
which no maintenance will be required – of
18000 operating hours.
o Measurement of electric and thermal transport
quantities, as a function of the temperature,
such as
– electric and thermal conductance
– electromotive force
Especially in connection with:
o Spectroscopic investigations in the infrared,
visible and ultraviolet spectral ranges
o Matrix spectroscopy
o Moessbauer spectroscopy
o Magneto-optic experiments
Refrigerator Cryostats
(Basic Units)
Advantages to the User
o Can be installed basically in any orientation
thereby offering a high degree of flexibility in
experimental arrangements
o Can be set to any temperature within 10 and
320 K
o High refrigerating capacity, constant tempera-
tures
o No liquid refrigerants are required
o Very simple to operate
o Temperature control without problems
through standardized control- and connecting
components
o Possible high throughput of samples due to
short cooldown and warming-up periods
Typical Applications
o Cooling of
– high temperature superconductors
– superconductors and semiconductors
– infrared and gamma detectors
UL Approval
The LEYBOLD refrigerators in this catalog (consisting
of compressor unit COOLPAK (4000/4200,
6000/6200, flex lines FL and the cold head
COOLPOWER 2) meet – as complete systems –
the requirements of the Underwriter Laboratories
(UL) as Recognised Components (Urus) as well
as the approval cUR performed through the
Underwriter Laboratories for the Canadian Standards
Association.
LEYBOLD refrigerators are listed under the UL/cUL
reference number SA 8676. The marks as shown
on the right for the entire system can only be
found on the name plate of the compressor unit.
C
®
US
2) resp. formerly RGD
Compressor Units
CE Approval
The LEYBOLD compressor units RW and
COOLPAK meet the basic requirements regarding
safety and health of the relevant EC directives.
They carry on the name plates of the
compressor units the following mark.
Standard CryopumpsCryopumps
C12.10 LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004
COOLVAC 800
COOLVAC 800 (160 ISO-K) COOLVAC 800 (160 CF)
Advantages to the User
o Hydrocarbon-free high vacuum
o High capacity for argon and hydrogen
o High pumping speed for water vapor, argon
and hydrogen
o Fast, safe and efficient regeneration with an
electric regeneration system
Typical Applications
o Lamps and tubes manufacture
o Transfer chambers / Loadlock
o General research
Advantages to the User
o Hydrocarbon-free ultrahigh vacuum
o High pumping speed for water vapor,
nitrogen and hydrogen
Typical Applications
o Beam tubes in particle accelerators
o UHV systems
130
59
DN
152
533
211
78
540
ø130
DN
158
222
Dimensional drawing for the COOLVAC 800 (160 ISO-K) Dimensional for the COOLVAC 800 (160 CF)
Cryopumps
C12.11
Standard Cryopumps
LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004
C12
Ordering Information COOLVAC 800 (ISO-K) COOLVAC 800 (CF)
COOLVAC 800
Accessories
compressor unit
COOLPAK 4000
COOLPAK 4200
Power supply cable
Connecting cable
Compressor – cold head, 4,5 m
Flexlines
FL 4.5 (1/2", 1/2")
or FL 9.0 (1/2", 1/2")
and EL 4.5 (electric extension cable)
MODEL 1901 low temperature measuring instrument
Cable for the silicon diode, 10 m long
Part No. 844160V1006 Part No. 844160V1002
Part No. 892 31 Part No. 892 31
Part No. 892 33 Part No. 892 33
see Ordering Information for the Compressor Units COOLPAK
Part No. 400 000 323 Part No. 400 000 323
Part No. 892 87 Part No. 892 87
Part No. 892 88 Part No. 892 88
Part No. 893 74 Part No. 893 74
Part No. 136 45 Part No. 136 45
Part No. 500 085 Part No. 500 201
Technical Data COOLVAC 800 (ISO-K) COOLVAC 800 (CF)
High vacuum flange DN
Fore vacuum flange DN
Flange for other purposes DN
Safety valve with DN 40 FK flange connection
for gas exhaust line
Pumping speed
H2O l x s-1
Ar/N2 l x s-1
H2/He l x s-1
Capacity
Ar/N2 bar x l (Torr x l)
H2 at 10-6 mbar bar x l (Torr x l)
He bar x l (Torr x l)
Built-in cold head COOLPOWER
Max. throughput
Ar/N2 mbar x l x s-1 (Torr x l x s-1)
H2 mbar x l x s-1 (Torr x l x s-1)
Crossover value mbar x l (Torr x l)
Cool down time to 20 K min
Overall height mm
Weight kg (lbs)
Silicon diode for temperature measurements
at second stage of the cold head
160 ISO-K 160 CF
40 KF 40 CF
16 KF (1x), 25 KF (1x), 40 KF (1x) 40 CF (2x)
burst disk
welded-in mounted on DN 16 CF
2600
640/800
1000/300
270 (270 000)
4.3 (3225)
0.5 (375)
7/25
4 (3)
2 (1.5)
60 (45)
70
503 508
12 (26.5) 14 (30.9)
built-in to a DN 25 KF with two-way built-in to a DN 16 CF with
HV current feedthrough UHV feedthrough
Cryopumps with Fully Automatic Control ClassicLineCryopumps
C12.12 LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004
COOLVAC 1.500 CL COOLVAC 2.000 CL COOLVAC 3.000 CL
COOLVAC 1.500 CL
Advantages to the User
o Hydrocarbon-free high vacuum
o High capacity for argon and hydrogen
o High crossover value
o Simple operation
o Trouble-free integration into complex systems
o Fully automatic regeneration through Cryo
Compact Control
o Easy servicing
Typical Applications
o Evaporators
o Sputtering systems
o Ion implanters
o Optical coating systems
o Metallization systems
549
143
Ø 240
320
Ø 304
300
559
Dimensional drawing for the COOLVAC 1.500 CL (DN 200 ISO-K) Dimensional drawing for the COOLVAC 2.000 CL (DN 250 CF)
Advantages to the User
o Hydrocarbon-free high vacuum
o High capacity for argon and hydrogen
o High crossover value
o Simple operation
o Trouble-free integration into complex systems
o Fully automatic regeneration through Cryo
Compact Control
o Easy servicing
Typical Applications
o Evaporators
o Sputtering systems
o Ion implanters
o Optical coating systems
o Metallization systems
345
Ø 370
604
Dimensional drawing for the COOLVAC 3.000 CL (DN 320 ISO-K)
Advantages to the User
o Hydrocarbon-free high vacuum
o High capacity for argon and hydrogen
o High crossover value
o Simple operation
o Trouble-free integration into complex systems
o Fully automatic regeneration through Cryo
Compact Control
o Easy servicing
Typical Applications
o Evaporators
o Sputtering systems
o Ion implanters
o Optical coating systems
o Metallization systems
COOLVAC 2.000 CL similar COOLVAC 3.000 CL similar
Cryopumps
C12.13
Cryopumps with Fully Automatic Control ClassicLine
LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004
C12
Technical Data COOLVAC 1.500 CL COOLVAC 2.000 CL COOLVAC 3.000 CL
High vacuum (HV) flange DN
Fore vacuum flange DN
Flange for connection a gauge head DN
Flange for the electrical connection DN
Safety valve with flange connection
for gas exhaust line DN
4-way current feedthrough for
Si diode on a flange DN
Heaters
1st stage W
V AC
2nd stage W
V AC
Temperature sensor
1st stage
2nd stage
Built-in cold head COOLPOWER
Weight kg (lbs)
Cooldown time to T2 = 20 K min
Crossover value mbar x l (Torr x l)
Pumping speed
H2O l x s-1
Ar / N2 l x s-1
H2 l x s-1
Capacity
Ar/N2 bar x l
H2 at 10-6 mbar bar x l
H2O bar x l
Max. throughput
Ar/N2 mbar x l x s-1 (Torr x l x s-1)
H2O mbar x l x s-1 (Torr x l x s-1)
Helium connections DN
(Self-sealing couplings: outside thread, type 5400-S2-8)
200 ISO-K / 200 CF / 6" ANSI 250 ISO-K / 250 CF / 8" ANSI 320 ISO-K / 10" ANSI
25 KF
16 KF
40 KF
40 KF
16 KF
160 160 160
35 35 35
90 90 90
35 35 35
Pt 100
Si diode
7/25
25 (55.2) 25 (55.2) 35 (77.3)
90 60 80
180 (135) 250 (187) 250 (187)
4600 7000 10500
1000 / 1300 1600 / 2100 2400 / 2800
2300 3200 4500
1600 1400 2500
12 12 12
not applicable 190 460
14 (10.5) 12 (9) 15 (11.2)
8 (6) 6.5 (4.8) 10 (7.5)
1/2" 1/2" 1/2"
Cryopumps with Fully Automatic Control ClassicLineCryopumps
C12.14 LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004
Ordering Information
COOLVAC 1.500 CL
Single Operation Dual Operation Multiple Operation
Europe USA/Japan Europe Europe USA/Japan Europe USA/Japan
COOLVAC 1.500 CL
DN 200 CF
DN 6" ANSI
DN 200 ISO-K
Electronics and cables
System Controller SC
Power Supply PS
230 V, 1 ph.
200 V, 3 ph.
Network communication cable – System Controller
to the pump(s)
10 m
20 m
Network PM cable for the link between
the pumps
03 m
10 m
Power supply cable from power supply to pump
10 m
20 m
Remote control cable CP, 1 m
Cable compressor – Power Supply
10 m
20 m
Cable System Controller – Power Supply, 1 m
Cable pump module PM – Power Supply
10 m
20 m
Connecting cable compressor – pump, 4.5 m
Compressors and flexlines
Compressor
CP 4000 D
CP 4000
CP 4200
CP 6000
CP 6200
Accessories
Water cooling discharge throttle
Power supply cable for compressor
Set of flexlines
FL 4.5 (1/2", 1/2")
or FL 9.0 (1/2", 1/2")
and EL 4.5 (electric extension cable)
Gas manifold
GD 2
GD 4
The arrangement of the components is shown in the section “Accessories” under the heading “COOLVAC ClassicLine, System Components”
Part No. Part No. Part No.
844200V0002 844200V0002 (2x) 844200V0002 (3x)
844200V0004 844200V0004 (2x) 844200V0004 (3x)
844200V0006 844200V0006 (2x) 844200V0006 (3x)
844 230 844 230 844 230
844 135 844 135 – – –
– – 844 235 844 235 844 235
844 261 844 261 844 261
844 262 844 262 844 262
– 844 256 844 256 (2x)
– 844 258 844 258 (2x)
– – 844 251 (2x) 844 251 (2x) 844 251 (3x)
– – 844 252 (2x) 844 252 (2x) 844 252 (3x)
– – 844 265 844 265 844 265
844 129 844 129 – – –
844 139 844 139 – – –
844 141 844 141 – – –
844 128 844 128 (2x) – – –
844 138 844 138 (2x) – – –
400 000 323 400 000 323 (2x) – – –
– 892 3000 – – –
892 31 – – 892 31 – –
– 892 33 – – 892 33 –
– – 892 36
– – – 892 37
840 000 133 840 000 133 840 000 133
see Ordering Information for the Compressor Units COOLPAK
892 87 892 87 (2x) 892 87 (2x) 892 87 (2x) 892 87 (3x)
892 88 892 88 (2x) 892 88 (2x) 892 88 (2x) 892 88 (3x)
893 74 893 74 (2x) – – –
– 891 02 891 02 891 02 –
– – – – 891 03
Cryopumps
C12.15
Cryopumps with Fully Automatic Control ClassicLine
LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004
C12
Ordering Information
COOLVAC 2000 CL
Single Operation Dual Operation Multiple Operation
Europe USA/Japan Europe Europe USA/Japan Europe USA/Japan
COOLVAC 2000 CL
DN 250 CF
DN 8" ANSI
DN 250 ISO-K
Electronics and cables
System Controller SC
Power Supply PS
230 V, 1 ph.
200 V, 3 ph.
Network communication cable – System Controller
to the pump(s)
10 m
20 m
Network PM cable for the link between
the pumps
03 m
10 m
Power supply cable from power supply to pump
10 m
20 m
Remote control cable CP, 1 m
Cable compressor – Power Supply
10 m
20 m
Cable System Controller – Power Supply, 1 m
Cable pump module PM – Power Supply
10 m
20 m
Connecting cable compressor – pump, 4.5 m
Compressors and flexlines
Compressor
CP 4000 D
CP 4000
CP 4200
CP 6000
CP 6200
Accessories
Water cooling discharge throttle
Power supply cable for compressor
Set of flexlines
FL 4.5 (1/2", 1/2")
or FL 9.0 (1/2", 1/2")
and EL 4.5 (electric extension cable)
Gas manifold
GD 2
GD 4
The arrangement of the components is shown in the section “Accessories” under the heading “COOLVAC ClassicLine, System Components”
Part No. Part No. Part No.
844250V0002 844250V0002 (2x) 844250V0002 (3x)
844250V0004 844250V0004 (2x) 844250V0004 (3x)
844250V0006 844250V0006 (2x) 844250V0006 (3x)
844 230 844 230 844 230
844 135 844 135 – – –
– – 844 235 844 235 844 235
844 261 844 261 844 261
844 262 844 262 844 262
– 844 256 844 256 (2x)
– 844 258 844 258 (2x)
– – 844 251 (2x) 844 251 (2x) 844 251 (3x)
– – 844 252 (2x) 844 252 (2x) 844 252 (3x)
– – 844 265 844 265 844 265
844 129 844 129 – – –
844 139 844 139 – – –
844 141 844 141 – – –
844 128 844 128 (2x) – – –
844 138 844 138 (2x) – – –
400 000 323 400 000 323 (2x) – – –
– 892 3000 – – –
892 31 – – 892 31 – –
– 892 33 – – 892 33 –
– – 892 36
– – – 892 37
840 000 133 840 000 133 840 000 133
see Ordering Information for the Compressor Units COOLPAK
892 87 892 87 (2x) 892 87 (2x) 892 87 (2x) 892 87 (3x)
892 88 892 88 (2x) 892 88 (2x) 892 88 (2x) 892 88 (3x)
893 74 893 74 (2x) – – –
– 891 02 891 02 891 02 –
– – – – 891 03
Cryopumps with Fully Automatic Control ClassicLineCryopumps
C12.16 LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004
Ordering Information
COOLVAC 3000 CL
Single Operation Dual Operation
Europe USA/Japan Europe Europe USA/Japan
COOLVAC 3000 CL
DN 10" ANSI
DN 320 ISO-K
Electronics and cables
System Controller SC
Power Supply PS
230 V, 1 ph.
200 V, 3 ph.
Network communication cable – System Controller
to the pump(s)
10 m
20 m
Network PM cable for the link between
the pumps
03 m
10 m
Power supply cable from power supply to pump
10 m
20 m
Remote control cable CP, 1 m
Cable compressor – Power Supply
10 m
20 m
Cable System Controller – Power Supply, 1 m
Cable pump module PM – Power Supply
10 m
20 m
Connecting cable compressor – pump, 4.5 m
Compressors and flexlines
Compressor
CP 4000
CP 4200
CP 6000 D
CP 6000
CP 6200
Accessories
Water cooling discharge throttle
Power supply cable for compressor
Set of flexlines
FL 4.5 (1/2", 1/2")
or FL 9.0 (1/2", 1/2")
and EL 4.5 (electric extension cable)
Gas manifold
GD 2
The arrangement of the components is shown in the section “Accessories” under the heading “COOLVAC ClassicLine, System Components”
Part No. Part No.
844320V0004 844320V0004 (2x)
844320V0006 844320V0006 (2x)
844 230 844 230
844 135 844 135 – –
– – 844 235 844 235
844 261 844 261
844 262 844 262
– 844 256
– 844 258
– – 844 251 (2x) 844 251 (2x)
– – 844 252 (2x) 844 252 (2x)
– – 844 265 844 265
844 129 844 129 – –
844 139 844 139 – –
844 141 844 141 – –
844 128 844 128 (2x) – –
844 138 844 138 (2x) – –
400 000 323 400 000 323 (2x) – –
892 31 – – – –
– 892 33 – – –
– 892 46 – –
– – 892 36 –
– – – 892 37
840 000 133 840 000 133
see Ordering Information for the Compressor Units COOLPAK
892 87 892 87 (2x) 892 87 (2x) 892 87 (2x)
892 88 892 88 (2x) 892 88 (2x) 892 88 (2x)
893 74 893 74 (2x) – –
– 891 02 891 02 891 02
Cryopumps
C12.17
Cryopumps with Fully Automatic Control ClassicLine
LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004
C12
Notes
Cryopumps with Fully Automatic Control ClassicLineCryopumps
C12.18 LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004
COOLVAC 5.000 CL COOLVAC 10.000 CL
Advantages to the User
o Hydrocarbon-free high vacuum
o High capacity for argon and hydrogen
o High crossover value
o Simple operation
o Trouble-free integration into complex systems
o Fully automatic regeneration through Cryo
Compact Control
o Easy servicing
Typical Applications
o Evaporators
o Ion implanters
o Electron beam welding systems
o Optical coating systems
o Metallization systems
COOLVAC
5.000
Ø 105
DN 400 ISO-K
Ø 450
640 COOLVAC
10.000
DN 500 ISO-K
Ø 550
Ø 105
704
Dimensional drawing for the COOLVAC 5.000 CL Dimensional drawing for the COOLVAC 10.000 CL
Advantages to the User
o Hydrocarbon-free high vacuum
o High capacity for argon and hydrogen
o High crossover value
o Simple operation
o Trouble-free integration into complex systems
o Fully automatic regeneration through Cryo
Compact Control
o Easy servicing
Typical Applications
o Evaporators
o Space simulation chambers
o Electron beam welding systems
o Optical coating systems
o Metallization systems
COOLVAC 5.000 CL COOLVAC 10.000 CL
Cryopumps
C12.19
Cryopumps with Fully Automatic Control ClassicLine
LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004
C12
Technical Data COOLVAC 5.000 CL COOLVAC 10.000 CL
High vacuum (HV) flange DN
Fore vacuum flange DN
Flange for connection of a gauge head DN
Flange for the electrical connection DN
Safety valve with flange connection
for gas exhaust line DN
4-way current feedthrough for
Si diode on a flange DN
Heaters
1st stage W
V AC
2nd stage W
V AC
Temperature sensor
1st stage
2nd stage
Built-in cold head COOLPOWER
Weight kg (lbs)
Cooldown time to T2 = 20 K min
Crossover value mbar x l (Torr x l)
Pumping speed
H2O l x s-1
Ar / N2 l x s-1
H2 l x s-1
Capacity
Ar/N2 bar x l
H2 at 10-6 mbar bar x l
H2O bar x l
Max. throughput
Ar/N2 mbar x l x s-1 (Torr x l x s-1)
H2 mbar x l x s-1 (Torr x l x s-1)
400 ISO-K 500 ISO-K
40 KF
16 KF
40 KF
40 KF
16 KF
160
35
90
35
Pt 100
Si diode
5/100
42 (92.7) 50 (110.4)
120 160
700 (525) 800 (600)
18 000 30 000
3 700 / 5 000 8 400 / 10 000
5 200 12 000
3 000 5 000
32 40
790 not applicable
10 (7.5)
7 (5.3)
Cryopumps with Fully Automatic Control ClassicLineCryopumps
C12.20 LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004
Ordering Information
COOLVAC 5.000 CL COOLVAC 10.000 CL
Europe USA/Japan Europe USA/Japan
COOLVAC
05.000 CL, DN 400 ISO-K
10.000 CL, DN 500 ISO-K
Electronics and cables
System Controller SC
Power Supply PS
230 V, 1 ph.
Network communication cable – System Controller
to the pump(s)
10 m
20 m
Cable compressor – Power Supply PS
10 m
20 m
Cable System Controller – Power Supply, 1 m
Cable pump module PM – Power Supply
10 m
20 m
Compressors and flexlines
Compressor
CP 6000
CP 6200
Accessories
Water cooling discharge throttle
Power supply cable for compressor
Set of flexlines
FL 4.5 (1/2", 1/2")
or FL 9.0 (1/2", 1/2")
and EL 4.5 (electric extension cable)
The arrangement of the components is shown in the section “Accessories” under the heading “COOLVAC ClassicLine, System Components”
Part No. 844 410 –
– Part No. 844 610
Part No. 844 230 Part No. 844 230
Part No. 844 135 Part No. 844 135
Part No. 844 261 Part No. 844 261
Part No. 844 262 Part No. 844 262
Part No. 844 129 Part No. 844 129
Part No. 844 139 Part No. 844 139
Part No. 844 141 Part No. 844 141
Part No. 844 128 Part No. 844 128
Part No. 844 138 Part No. 844 138
Part No. 892 36 – Part No. 892 36 –
– Part No. 892 37 – Part No. 892 37
Part No. 840 000 133 Part No. 840 000 133
see Ordering Information for the Compressor Units COOLPAK
Part No. 892 87 Part No. 892 87
Part No. 892 88 Part No. 892 88
Part No. 893 74 Part No. 893 74
Cryopumps
C12.21
Cryopumps with Fully Automatic Control ClassicLine
LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004
C12
Notes
Cryopumps with Fully Automatic Control ClassicLineCryopumps
C12.22 LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004
COOLVAC 30.000 CL
COOLVAC 30.000 CL
Advantages to the User
o Hydrocarbon-free high vacuum
o High pumping speed for water vapor and
nitrogen
o Fast, safe and efficient regeneration with the
electric regeneration system
o Simple operation
Typical Applications
o Space simulation chambers
o Evaporators
o General research
o Optical coating systems
DN
ø658
608
30°
ø130
Dimensional drawing for the COOLVAC 30.000 CL
COOLVAC 18.000 CL
COOLVAC 18.000 CL with special flanges
Advantages to the User
o Hydrocarbon-free high vacuum
o High pumping speed for water vapor and
nitrogen
o Fast, safe and efficient regeneration with the
electric regeneration system
o Simple operation
Typical Applications
o Space simulation chambers
o Evaporators
o Electron beam welding systems
o Optical coating systems
o Metallization systems
DN
658
608
30°
130
Dimensional drawing for the COOLVAC 18.000 CL
Cryopumps
C12.23
Cryopumps with Fully Automatic Control ClassicLine
LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004
C12
Technical Data COOLVAC 18.000 CL COOLVAC 30.000 CL
High vacuum flange DN
Fore vacuum flange DN
Flange with current feedthrough *) for silicon diode DN
Flange for other purposes DN
Safety valve with DN 40 KF flange connection
for gas exhaust line
Pumping speed
H2O l x s-1
Ar/N2 l x s-1
H2/He l x s-1
Capacity
Ar/N2 bar x l
H2 at 10-6 mbar bar x l
H2O bar x l
Built-in cold head COOLPOWER
Max. throughput
Ar/N2 mbar x l x s-1 (Torr x l x s-1)
H2 mbar x l x s-1 (Torr x l x s-1)
Crossover value mbar x l (Torr x l)
Cool down time to 20 K min
Overall height min
Weight kg (lbs)
Silicon diode for temperature measurements
at the second stage of the cold head
Regeneration heaters at the first
and second stage of the cold head
630 ISO-F 35“ ANSI (892 mm)
63 ISO-K 63 ISO-K
25 KF (2x) 25 KF (2x), *) 2 way
40 KF 40 KF
welded-in welded-in (2x)
46 000 93 000
13 500/18 000 25 000/30 000
14 000/4 000 30 000/7 000
5 000 6 500
65 120
945 –
5/100 (2x) 5/100 (2x) + 120
14 (10.5) 14 (10.5)
7 (5.25) 7 (5.25)
850 (638) 1200 (900)
180 260
606 711
65 (143) 245 (540)
built-in (2x) built-in (2x)
built-in (2x) built-in (2x)
Ordering Information COOLVAC 18.000 CL COOLVAC 30.000 CL
Cryopump
COOLVAC 18.000 CL, 630 ISO-F
COOLVAC 30.000 CL, 35" ANSI
Accessories
Compressor unit
COOLPAK 6000
COOLPAK 6200
Power supply cable
Set of flexlines
FL 4.5 (1/2", 1/2")
or FL 9.0 (1/2", 1/2")
and EL 4.5 (electric extension cable)
Compact Controller and cable kit
upon request –
– upon request
upon request (2x) upon request (3x)
upon request (2x) upon request (3x)
see Ordering Information for the Compressor Units COOLPAK
Part No. 892 87 (2x) Part No. 892 87 (3x)
Part No. 892 88 (2x) Part No. 893 74 (3x)
Part No. 893 74 (2x) Part No. 893 74 (3x)
upon request
Cryopumps with Fully Automatic Control SemiLineCryopumps
C12.24 LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004
COOLVAC 1500 SemiLine
COOLVAC 1500 SL
LEYBOLD, world-wide leader in vacuum and
cryo technology has added a new cryopump
system to meet the needs for current and
future demands in state-of-the-art cryopump
applications: COOLVAC 1500 SemiLine.
This system is the unique cryopump technology
that cuts “cold to cold” regeneration from
several hours to 45 minutes or less.
This significant reduction of regeneration
time has been achieved by combining the
COOLVAC 1500 SL cryopumps with a
compact and intelligent control system that
allows control and monitoring of up to
30 cryopumps by only a single control unit.
COOLVAC 1500 SemiLine system is designed
for a high level of tool integration. The cryopumps
can easily be adapted to the process
chambers because of their proven drop-in
compatibility.
For remote control the cryopump system can
be fully integrated to the equipment’s host
computer via the standard RS 232 C interface
of the System Controller SC.
Existing tools can be upgraded fast and without
any modifications because the system has
proven their “plug and play” compatibility to
other cryopump systems.
COOLVAC 1500 SemiLine system is uniquely
designed for a simple and fast entire service
and maintenance procedure direct on the
process chamber.
A complete displacer change is done within
20 minutes without breaking the vacuum
connection. After cryopump maintenance no
leak check and no vacuum or process requalification
is required.
Advantages to the User
o Qualified at all major OEM’s
o Drop-in compatible to all major
equipments
o Higher flexibility and availability of the
process system
o Increased productivity and improved yield
o No extra tool downtime caused by
regeneration
o Lowest Cost of Ownership
Typical Applications
COOLVAC 1500 SemiLine system should be
used wherever production time, optimized
quality, higher tool availability and improved
CoO are important issues.
In particular, the overall equipment performances
of
o Sputtering (PVD) Systems
o Ion Implanters
o Vacuum Coating Systems
o Transfer Chambers
o Load Lock Chambers
can be increased significantly.
Design Features
o “Fast Regeneration” capability from
“cold to cold” in 45 minutes or less.
During the fast regeneration of the
COOLVAC 1500 SL only the second stage
of the pump is regenerated.
Consequently, “Fast Regeneration” is
synonymous with the regeneration of all
gases pumped by the cryo’s second stage,
e.g. H2, Ar, N2, O2.
o “Total Regeneration” capability from
“cold to cold” in about 2.5 hours.
During the total regeneration of the
COOLVAC 1500 SL the second stage as
well as the first stage of the pump are
regenerated and all gases are released,
e.g. H2, Ar, N2, O2 as well as H2O and
other easily condensable gases.
o The fast as well as the total regeneration
cycle is optimized with respect to
- time
- safety
- cleanness of the pump.
Only with clean pumping surfaces can a
low base pressure, maximum pumping
speeds and capacities be attained.
o Easy to operate
- only one compact control unit for up to
30 pumps
- simple push button operation
- fully automatic regeneration
- complete monitoring of pump operation
470
597
220
149
294
Dimensional drawing for the COOLVAC 1500 SL
149
294
470
597
220
Cryopumps
C12.25
Cryopumps with Fully Automatic Control SemiLine
LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004
C12
o Easy to integrate
- compatible pump sizes and connectors to
replace other cryopumps
- drop-in tool compatibility at all major
equipments
- designed to be fully integrated to the
equipment’s host computer via the
standard RS 232 C interface
- optional network and 24 V DC interface
capabilities
o Electrical heaters for regeneration only
- no expensive and complex purge gas
system
- sequential regeneration of all pumped
gases
- better control of the regeneration cycles
- highest safety standards during
regeneration
o Suitable for multiple operation
- up to 30 COOLVAC 1500 SL cryopumps
can be operated by one compact
System Controller SC.
- up to 3 COOLVAC 1500 SL cryopumps
can be supported by one multiple
Power Supply PS.
- up to 3 COOLVAC 1500 SL cryopumps
can be supported by one Compressor
Unit CP.
o Easy to service
- displacer exchange is possible without
removing the COOLVAC from the
production system.
- back-up pool needs just displacer rather
than expensive pumps
- Extended service and maintenance
intervals
- data collection for service and trend
analysis
o All known features of cryopumps are
maintained:
- high pumping speeds and capacity for
H2O, H2, Ar, N2
- high crossover values
- hydrocarbon-free vacuum
System Controller SC
Power Supply PS
System Controller SC for COOLVAC 1500 SL
Power Supply PS for COOLVAC 1500 SL
Design Features
o 1/4 19" rack module
o 3 height units
o Dimensions (W x H x W)
106 x 129 x 178 mm
Design Features
o 19" rack module
o 4 height units
o Dimensions (W x H x W)
435 x 190 x 440 mm
The intelligent COOLVAC System Controller SC
automatically controls and monitors up to
30 COOLVAC pumps.
Online monitoring, help functions and a
service interface for easy diagnostic are just a
few user friendly features.
It can be installed as a “stand alone system”
or remote controlled via an interface.
The COOLVAC Power Supply PS provides the
power for the cold head motor, the electrical
heaters and the supplies voltage to the electronics
for up to 3 COOLVAC pumps.
Controlled via the System Controller SC the
PS turns the compressor unit on and off if
required by the connected pumps.
Cryopumps with Fully Automatic Control SemiLineCryopumps
C12.26 LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004
Technical Data COOLVAC 1500 SL
High vacuum (HV) flange DN
Fore vacuum flange
Regeneration valve
Pumping speed
H2O / Ar / H2 l x s-1
O2 l x s-1
Ultimate pressure mbar
Capacity for
Ar bar x l
H2 at 10-6 mbar bar x l
H2O bar x l
Max. pumping speed for
Ar / N2 mbar x l x s-1 (sccm)
H2 mbar x l x s-1 (sccm)
Crossover value mbar x l (Torr x )
Recovery time from 10 mTorr to ≤ 5 x 10-7 Torr s
Regeneration times
Fast regeneration (cold to cold, 2nd stage at 20 K) min
Total regeneration (cold to cold, 2nd stage at 20 K) min
Warm-up from operating temperature to 300 K min
Cool-down from 300 K up to operating temperature min
Fast regeneration cycles between total regeneration
Noise, measured at 1 m (3 ft.) radius from the pump dB(A)
Heaters
1. stage W
V AC
2. stage W
V AC
Temperature measurement
1. stage
2. stage
Built-in coldhead COOLPOWER
Weight kg (lbs)
DN 200 CF
DN 25 KF
DN 40 KF
4600 / 1300 / 2500
1600
≤ 5 x 10-10
1800
16
190
14 (840)
6 (360)
210 (160)
< 4
< 50
< 170
< 30
< 80
> 50
< 70
160
35
90
35
Pt 100
Si diode
7/25
25 (55.2)
Cryopumps
C12.27
Cryopumps with Fully Automatic Control SemiLine
LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004
C12
Ordering Information
COOLVAC 1.500 SL
Single Operation Dual Operation Multiple Operation
Europe USA/Japan Europe Europe USA/Japan Europe USA/Japan
COOLVAC 1.500 SL
DN 200 CF
other flanges
Solenoid fore-vacuum valve, DN 25 KF
with electric valve position indicator and
for 24 V DC supplies
Electronics and cables
System Controller SC
Power Supply PS
230 V, 1 ph.
200 V, 3 ph.
Network communication cable – System Controller
to the pump(s)
10 m
20 m
Network-PM cable between the pumps
03 m
10 m
Power supply cable for the pump
10 m
20 m
Remote control cable CP, 1 m
Cable compressor – Power Supply
10 m
20 m
Cable System Controller – Power Supply, 1 m
Cable pump module PM – Power Supply
10 m
20 m
Connecting cable compressor – pump, 4.5 m
Compressors and flexlines
Compressor
CP 4000 D
CP 4000
CP 4200
CP 6000
CP 6200
Accessories
Water cooling discharge throttle
Power supply cable for compressor
Set of flexlines
FL 4.5 (1/2", 1/2")
or FL 9.0 (1/2", 1/2")
and EL 4.5 (electric extension cable)
Gas manifold
GD 2
GD 4
The arrangement of the components is shown in the section “Accessories” under the heading “COOLVAC ClassicLine, System Components”
Part No. Part No. Part No.
844 212 844 212 (2x) 844 212 (3x)
upon request upon request (2x) upon request (3x)
287 46 287 46 (2x) 287 46 (3x)
844 230 844 230 844 230
844 135 844 135 – – –
– – 844 235 844 235 844 235
844 261 844 261 844 261
844 262 844 262 844 262
– 844 256 844 256 (2x)
– 844 258 844 258 (2x)
– – 844 251 (2x) 844 251 (2x) 844 251 (3x)
– – 844 252 (2x) 844 252 (2x) 844 252 (3x)
– – 844 265 844 265 844 265
844 129 844 129 – – –
844 139 844 139 – – –
844 141 844 141 – – –
844 128 844 128 (2x) – – –
844 138 844 138 (2x) – – –
400 000 323 400 000 323 (2x) – – –
– 892 3000 – – –
892 31 – – 892 31 – –
– 892 33 – – 892 33 –
– – 892 36
– – – 892 37
840 000 133 840 000 133 840 000 133
see Ordering Information for the Compressor Units COOLPAK
892 87 892 87 (2x) 892 87 (2x) 892 87 (2x) 892 87 (3x)
892 88 892 88 (2x) 892 88 (2x) 892 88 (2x) 892 88 (3x)
893 74 893 74 (2x) – – –
– 891 02 891 02 891 02 –
– – – – 891 03
Cold HeadsCryogenics
C12.28 LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004
COOLPOWER 120 T Single Stage Cold Heads
COOLPOWER 120 T single stage cold head
ø105
ø105
M4
ø165
ø178
12 01 M 071 CP120T
250
12,7
129
ø6,2
ø115
Advantages to the User
o For installation mostly in any orientation
o High refrigerating capacity
o No liquid refrigerants are required
o Very simple to operate
o Short cooldown time
Typical Applications
o Cooling of cryopanels in cryopumps and thus
generation of high vacuum and ultra high
vacuum pressures
o Cooling of samples and detectors;
especially for cooling of
- samples for spectroscopic investigations
in solid state and surface physics
- high temperature superconductor and
semiconductor conditions
- infrared and gamma detectors
o Calibration of sensors
Dimensional drawing for the COOLPOWER 120 T
Cryogenics
C12.29
Cold Heads
LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004
C12
Technical Data COOLPOWER 120 T
Refrigeration capacity at 50/60 Hz 1)
1st stage at 80 K, approx. W
2st stage at 20 K, approx. W
Lowest attainable temperature 1) K
Cooldown time down to 20 K min
Permissible ambient temperature °C
He filling pressure at room temperature bar
He connections
Self-sealing screwed connections
High pressure connection
Low pressure connection
Weight kg (lbs)
Length of the electrical connection line
to the compressor unit m
120
25
≤ 15
≤ 55
10 to 40
16
1/2" (#8 2))
1/2" (#8)
13 (29)
15
Ordering Information COOLPOWER 120 T
Cold head COOLPOWER 120 T
Accessories
Compressor unit (for operation of one cold head)
COOLPAK 6000, 400 V/50 Hz; 470 V/60 Hz
COOLPAK 6200, 200 V/50 Hz; 200 V, 230 V/60 Hz
Power supply cable
Set of flexlines
FL 4.5 (1/2", 1/2")
or FL 9.0 (1/2", 1/2")
Options
Temperature measurement
Silicon diode
MODEL 1901 low temperature measuring instrument
Measuring cable
1) The refrigerating capacities and temperatures stated apply to vertical operation with the cold end at the bottom
2) Series 8 from Aeroquip
Part No. 103 59
Part No. 892 36
Part No. 892 37
see Ordering Information for the Compressor Units COOLPAK
Part No. 892 87
Part No. 892 88
Part No. 890 89
Part No. 136 45
see Ordering Information for the MODEL 1901 low temperature measuring instrument
Cold HeadsCryogenics
C12.30 LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004
COOLPOWER 7/25, 5/100 and 5/100 T Dual Stage Cold Heads
COOLPOWER 7/25 dual stage cold head
A
B
Ansicht A
Ansicht B
30°
6x60°
45°
8
x
45°
ø 47,5
125,5
ø 69
ø 87
innen ø 75,5
490
M4
40
60
M4 x 7
82,1
3
ca. 120
ca. 120
6
135
18
Dimensional drawing for the COOLPOWER 7/24
Advantages to the User
o For installation in any orientation
o High refrigerating capacity
o No liquid refrigerants are required
o Very simple to operate
o Short cooldown time
Typical Applications
o Cooling of cryopanels in cryopumps and thus
generation of high vacuum and ultra high
vacuum pressures
o Cooling of samples and detectors;
especially for cooling of
- samples for spectroscopic investigations
in solid state and surface physics
- high temperature superconductors
- superconductors and semiconductors
- infrared and gamma detectors
135
108,5
80
110
19
47,5
6
27
92,2
115
6
32,2
129
474,5
149
117,5
105
40 60 105
M4
13,5°
13,5°
128,7
127
47,5
130
129
Dimensional drawing for the COOLPOWER 5/100 and COOLPOWER 5/100 T
o Calibration of sensors
o Cooling of accelerator components in the area
of high energy physics
o Cooling of superconducting magnets; in
nuclear magnetic resonance tomographs,
for example (only COOLPOWER 5/100 and
5/100 T)
COOLPOWER 5/100 dual stage cold head, COOLPOWER 5/100 T similar
View A
View B
ID 75.5
ca. = approx.
Cryogenics
C12.31
Cold Heads
LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004
C12
Technical Data
COOLPOWER
7/25 5/100 5/100 T
Refrigeration capacity at 50/60 Hz 1)
1st stage at 80 K, approx. W
2st stage at 20 K, approx. W
1st stage at 10 K, approx. W
2st stage at 40 K, approx. W
Lowest attainable temperature 1)
1st stage, approx. K
2nd stage, approx. K
Cooldown time of the
2nd stage to 20 K, approx. min
1st stage to 80 K, approx. min
2nd stage to 10 K,, approx. min
1st stage to 40 K, approx. min
2nd stage to 6 K,, approx. min
1st stage to 30 K,, approx. min
Permissible ambient temperature °C
He filling pressure at room temperature bar
He connections
Self-sealing screwed connections
High pressure connection
Low pressure connection
Weight kg (lbs)
Length of the electrical connection line
to the compressor unit (included with cold head) m
25 100 100
7 5 7.5
– – 3.5
– – 35
≤ 35 ≤ 35 28
≤ 10 ≤ 10 6
20 20 20
20 20 20
– – 35
– – 30
– – 45
– – 40
5 to 40
16
1/2" (#8 2))
1/2" (#8)
11 (24.3)
4.5
Ordering Information
COOLPOWER
7/25 5/100 5/100 T
Cold head
COOLPOWER 7/25
COOLPOWER 5/100
COOLPOWER 5/100 T
Accessories
Connecting cable
Compressor – cold head, 4.5 m
Compressor unit (for operation of one cold head)
COOLPAK 4000
COOLPAK 4200
COOLPAK 6000
COOLPAK 6200
Power supply cable
Set of flexlines
FL 4.5 (1/2", 1/2")
or FL 9.0 (1/2", 1/2")
and EL 4.5 (electric extension cable)
Options
Temperature measurement / control
Silicon diode
MODEL 1901 low temperature measuring instrument
Measuring cable
Electrical heaters
Modell 9700 low temperature controller
Measuring cable, 3 m long
1) The refrigerating capacities and temperatures stated apply to vertical operation with the cold end at the bottom
2) Series 8 from Aeroquip
Part No. 842 040 – –
– Part No. 893 05 –
– – Part No. 129 78
Part No. 400 000 323 included with the cold head included with the cold head
Part No. 892 31 – –
Part No. 892 33 – –
– Part No. 892 36 Part No. 892 36
– Part No. 892 37 Part No. 892 37
see Ordering Information for the Compressor Units COOLPAK
Part No. 892 87
Part No. 892 88
Part No. 893 74
Part No. 890 89
Part No. 136 45
see Ordering Information for the MODEL 1901 low temperature measuring instrument
upon request
Part No. 842 400
Part No. 842 401
Compressor UnitsCryogenics
C12.32 LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004
COOLPAK 4000/4200, COOLPAK 6000/6200
61
36
448
511
70
146
199
407
440
152
51
230
528
Dimensional drawing for the COOLPAK 4000/4200 and COOLPAK 6000/6200
Advantages to the User
o Highly effective and even more powerful when
connected with LEYBOLD cryopumps and
refrigerators
o Excellent long-term reliability owing to the
modular design and the longlife components
o Silent and low vibration operation through
scroll compressors
o Easy to install and operate
o Global power supply compatibility
o Easy integration in complex systems due to
24 V DC or RS 232 C interfaces
o Almost maintenance-free
o Small footprint
o Low cost of ownership
Compressor units COOLPAK 4000/4200/(COOLPAK 6000/6200, COOLPAK 6000 MD/6200 MD similar)
Cryogenics
C12.33
Compressor Units
LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004
C12
Technical Data COOLPAK 4000 COOLPAK 4200 COOLPAK 6000 COOLPAK 6200
50 Hz 60 Hz 50 Hz 60 Hz 50 Hz 60 Hz 50 Hz 60 Hz
Number of electrical connections for cold heads
Helium system filling pressure at room temperature bar
Ambient temperature °C
Cooling-water consumption 1) l/min
Cooling-water entry temperature °C
Main voltage (3 phase)
upon delivery V
alternative setting V
Operating currents
with the cold head cool A
with the cold head warm A
Electrical power consumption
with the cold head cool kW
with the cold head warm kW
Remote control via interface
Helium connections
Self-sealing couplings
High pressure side
Low pressure side
Water connections
Sound level (at 1 m distance) dB(A)
Dimensions (W x H x D) mm
Weight kg (lbs)
1 1 1 1
14 13 14 13 15 14 14 13
5 to 40 5 to 40 5 to 40 5 to 40
3.5 3.5 5.0 5.0
5 to 25 5 to 25 5 to 25 5 to 25
400 – 200 200 2) 400 – 230 3) 230
± 10% ± 10% + 10% - 5% ± 10% - 10% ± 10 %
– 470 230 3) 230 – 470 200 200
± 10% - 10% ± 10% ± 10% ± 10% ± 10%
6.4 to 7.4 6,2 to 7,3 14.6 to 16.5 13.8 to 17.0 9.5 to 10.5 9.0 to 10.0 15.5 to 22.0 16.0 to 23.0
8.5 8.1 18.3 19.5 13.7 12.0 25.0 25.0
3.8 to 4.5 4.2 to 5.3 4.0 to 4.6 4.4 to 5.3 6.0 to 6.5 6.5 to 6.9 5.5 to 6.2 5.9 to 6.7
5.3 5.8 5.3 5.9 8.2 8.7 7.6 7.8
24 V DC or RS 232 C 24 V DC or RS 232 C 24 V DC or RS 232 C 24 V DC or RS 232 C
1/2" 1/2" 1/2" 1/2"
1/2" 1/2" 1/2" 1/2"
Hose nozzle DN 12 / G 1/2" outside thread Hose nozzle DN 12 / G 1/2" outside thread
53 53 53 53
440 x 589 x 511 440 x 589 x 511 440 x 589 x 511 440 x 589 x 511
93 (205) 93 (205) 94 (207) 94 (207)
Ordering Information
Compressor unit without power supply cable
Single cold head operation
Dual cold head operation
Power supply cable
3.5 m, CEE plug, 32 A/6h, 3 pole + N + PE
3.5 m, NEMA plug, L 16-20 P,
20 A/480 V, 3 pole + PE (AWG 12)
3.5 m, NEMA plug, L 15-20 P,
20 A/250 V, 4 pole - PE (AWG 12)
10 m, with end splice (AWG 10)
Spare part
Adsorber CACP 4000/6000
1) At a cooling water entry temperature of 25 °C
2) ± 10% at 12 bar filling pressure
3) At 13 bar filling pressure
4) COOLPAK 4000 D
5) COOLPAK 6000 D
Part No. 892 31 Part No. 892 33 Part No. 892 36 Part No. 892 37
Part No. 892 3000 4) – Part No. 892 46 5) –
Part No. 893 95 – – Part No. 893 95 – –
– Part No. 893 96 – – Part No. 893 96 –
– Part No. 840 110 – –
– Part No. 840 111 – Part No. 840 111
Part No. 893 52 Part No. 893 52 Part No. 893 52 Part No. 893 52
COOLPAK 4000 COOLPAK 4200 COOLPAK 6000 COOLPAK 6200
Europe USA/Japan USA/Japan Europe USA/Japan USA/Japan
Compressor UnitsCryogenics
C12.34 LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004
General Accessories for Compressor Units COOLPAK
Technical Data
Length Connections on both sides (inside thread)
High pressure line Low pressure line
Ordering Information
Flexlines 1), 2)
FL 4.5 (1/2", 1/2")
FL 9.0 (1/2", 1/2")
Adaptor
AD (1/2" m, 3/4" f)
AD (1/2" f, 3/4" m)
Elbow 1/2"
Coupling 1/2"
Gas manifold
GD 2 (for dual operation) 2)
GD 4 (for dual operation) 2)
EL 4.5 extension cable for linking cold head
and compressor unit 2)
All flexible pressure lines, adaptor pieces, bends, isolating pieces, line couplings and gas manifolds are equipped with self-sealing Aeroquip fittings and filled in the factory with high-purity helium gas (purity: 99.999 %).
The filling pressure is 16 bar
1) Minimum bending radius: 30 cm
2) Only suited for pneumatically driven cold heads and cryopumps
Part No. 892 87
Part No. 892 88
Part No. 892 89
Part No. 892 90
Part No. 891 73
Part No. 891 71
Part No. 891 02
Part No. 891 03
Part No. 893 74
Adaptor
Outside thread (m) Inside thread (f)
Connections
Outside thread (m) Inside thread (f)
Connections on both sides
Outside thread (m)
Number of Gas manifold - Connections
gas distributors At the compressor (inside thread) At the cold head (outside thread)
Length
4.5 m 1/2" 1/2"
9.0 m 1/2" 1/2"
1/2" 3/4"
3/4" 1/2"
1/2" 1/2"
1/2" 1/2"
1/2"
2 1/2" 2 x 1/2"
4 1/2" 4 x 1/2"
4.5 m
Flexlines 1), 2)
FL 4.5 (1/2", 1/2")
FL 9.0 (1/2", 1/2")
Accessories for Flexlines
Adapter for flexlines
AD (1/2" m, 3/4" f)
AD (1/2" f, 3/4" m)
Elbow 1/2" for flexlines
Isolating piece 1/2" for flexlines
Coupling 1/2" for interconnecting two 1/2" flexlines
Gas manifold for dual operation 2)
(consisting of two Tees)
GD 2 (for dual operation)
GD 4 (for up to quad operation)
EL 4.5 extension cable for linking cold head
and compressor unit
Cryogenics
C12.35
Refrigerator Cryostats
LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004
C12
Refrigerator Cryostats based on the RDK 6-320
The RDK 6-320 basic unit includes the
COOLPOWER 5/100 T two-stage cold head. Its
high refrigerating capacity at low temperatures
permits experiments which previously could not
be performed by relying on refrigerators and
which required the use of liquid helium.
The RDK 6-320 basic unit is a complete system
for measurements in the temperature range
between 6 and 320 K.
The COOLPOWER 5/100 cold head is augmented
by:
o Silicon diode for measuring the temperatures
at the second stage of the cold head
o Heater at the second stage of the cold head
provided with overheating protection
o 11-way current feedthrough with matching
external connector
o DN 25 KF pumpdown port
o DN 160 ISO-K vacuum flange
274,5
232
1
42,5
124
ø130
ø30,2
233
30°
RDK 6-320 basic unit
Isolating Vacuum
A two-stage rotary vacuum pump will normally
be adequate to produce an isolating vacuum.
However, this pump should be equipped on the
suction side with an adsorption trap and a isolation
valve.
If the application requires that the cold surfaces
remain free of hydrocarbons, we recommend the
use of our small turbomolecular pump system
PT 50 (see Product Section C10).
Advantages to the User
o Compact
o Very reliable
o Comprehensive range of accessories from one
source
o For installation in any orientation
o Simple to operate
o Short cooldown time
o Cost-effective in long-term experiments since
no liquid helium is required
o Simple and rapid servicing through the use of
the standard COOLPOWER 5/100 cold head
with pneumatic drive system for the displacer
Typical Applications
o Cooling of samples and detectors
o Material research and testing
o Spectroscopic applications
o Matrix isolation spectroscopy with neon and
argon
General Remarks on Refrigerator Cryostats
Temperature Measurement
In order to avoid measurement errors due to
thermal resistances, the temperature at the sample
should preferably be measured by a second
optional silicon diode which is installed as close
to the sample as possible. If possible it should be
maintained at the same temperature level as that
of the probe.
Temperature Control
The temperature at the second stage of the cold
head (or that of the probe) is controlled by heating
against the cooling effect produced by the
refrigerator (while the cold head is running).
Refrigerator CryostatsCryogenics
C12.36 LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004
Optical Refrigerator Cryostat based on the RDK 6-320
ø130
317
145
269
4
ø26
ø80
ø60
Dimensional drawing for the optical refrigeration cryostat
Upgraded as an optical cryostat (option) the
RDK 6-320 is tailor-made for experiments
involving temperatures down to about 7 K.
Supplied Equipment
o Basic unit RDK 6-320
o Temperature attenuation disk out of Pb Sn
o Sample holder out of Al 99.5
o Thermal radiation shield out of E-Cu
o Vacuum jacket out of aluminum / stainless
steel
o Five exchangeable windows (four windows on
the sides, one window in the longitudinal axis
of the cryostat);
two windows on the sides and the window in
the longitudinal axis are made of SUPRASIL I,
the two other windows are blanked off and
are made of brass
ø15
ø26
Suprasil I Scheibe
Blind-
platte
86
86
37,8°
Section through the window area
Suprasil I window
Blank
panel
Cryogenics
C12.37
Refrigerator Cryostats
LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004
C12
Technical Data RDK 6-320
Temperature range
2nd stage of the cold head K
1st stage of the cold head K
Silicon diode for temperature measurements
at the 2nd stage of the cold head
Heater
at the 2nd stage of the cold head
Heating power W
Heating current A
Heating voltage V DC
Permissible ambient temperature °C
He filling pressure at room temperature bar
He connections
Self-sealing screwed connections
High pressure connection (outside thread)
Low pressure connection (outside thread)
Length of the connection cable
to the compressor unit m
Weight kg (lbs)
6 to 320
28 to 320
built-in
built-in
50
1
50
5 to 40
16
1/2"
1/2"
4.5 (included)
13 (28.7)
Ordering Information RDK 6-320
Basic unit RDK 6-320
Optical cryostat consisting of
RDK 6-320 and Expansion Kit ROK
Accessories
Compressor unit
COOLPAK 6000, 400 V/50 Hz; 470 V/60 Hz
COOLPAK 6200, 200 V/50 Hz; 200 V, 230 V/60 Hz
Power supply cable
Flexlines
FL 4.5 (1/2", 1/2")
Temperature measurement at 2nd stage with
Modell 9700 low temperature controller
Measuring cable, 3 m long
Part No. 842 403
Part No. 842 404
Part No. 892 36
Part No. 892 37
see Ordering Information for the Compressor Units COOLPAK
Part No. 892 87
Part No. 842 400
Part No. 842 401
Accessories for CryopumpsCryopumps, Cryogenics
C12.38 LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004
System Controller COOLVAC SC
Advantages to the User
o Interface to external system controller
o For easy integration with external system
controllers
o For safe pumping of hydrogen
Typical Applications
o For automated operation of the COOLVAC
cryopums of the ClassicLine and the SemiLine
Ordering Information
System Controller
Power Supply PS
for up to 2 Cryo pumps
for up to 3 Cryo pumps
Part No. 844 230
Part No. 844 135
Part No. 844 235
Controllers and Monitoring Units for Cryopumps
Design Features
o 1/4 19" rack module
o 3 height units
o Dimensions (W x H x D)
106 x 129 x 178 mm
o Operation through pushbuttons
The intelligent COOLVAC System Controller SC
automatically controls and monitors up to
30 COOLVAC pumps.
Online monitoring, help functions and a
service interface for easy diagnostic are just a
few user friendly features.
It can be installed as a “stand alone system”
or remote controlled via an interface.
System Controller COOLVAC SC
Power Supply PS for up to Two Cryopumps
Design Features
o 19" rack module
o 3 height units
o Dimensions (W x H x D)
485 x 135 x 320 mm
The System Controller COOLVAC SC (not
included) will fit into the empty space.
The COOLVAC Power Supply PS provides the
power for the cold head motor, the electrical
heaters and the supplies voltage to the electronics
for up to 2 COOLVAC pumps.
Controlled via the System Controller SC the
PS turns the compressor unit on and off if
required by the connected pumps.
Power Supply PS for up to Three Cryopumps
Design Features
o 19" rack module
o 4 height units
o Dimensions (W x H x D)
435 x 190 x 440 mm
o Single LED indicates correct direction of
rotation for the rotating field
Power supply PS
Power supply PS
The COOLVAC Power Supply PS provides the
power for the cold head motor, the electrical
heaters and the supplies voltage to the electronics
for up to 3 COOLVAC pumps.
Controlled via the System Controller SC the
PS turns the compressor unit on and off if
required by the connected pumps.
Cryopumps, Cryogenics
C12.39
Accessories for Cryopumps
LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004
C12
COOLVAC ClassicLine, Single System Configuration
SC
COOLVAC
# 1
PM
RS 232 C
PS COMPRESSOR
External PC
1
4
2
35
6
Key to the diagram “Single System Configuration”
PM = Pump Module (included with the pump)
SC = System Controller
PS = Power Supply
1 = e. g. Part No. 844 262
2 = e. g. Part No. 844 139
3 = e. g. Part No. 844 138
4 = Part No. 400 000 323
5 = Part No. 844 141
6 = to be provided by the customer
Accessories for CryopumpsCryopumps, Cryogenics
C12.40 LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004
COOLVAC ClassicLine, Dual System Configuration
COOLVAC
# 2
PM
SC
COOLVAC
# 1
PM
RS 232 C
PS
COMPRESSOR
for dual operation
External PC
1
4
2
3
5
6
3
4
7
Only for European mains voltages and for compressors suited for dual operation
Key to the diagram “Dual System Configuration”
PM = Pump Module (included with the pump)
SC = System Controller
PS = Power Supply
1 = e. g. Part No. 844 262
2 = e. g. Part No. 844 139
3 = e. g. Part No. 844 138
4 = Part No. 400 000 323
5 = Part No. 844 141
6 = to be provided by the customer
7 = e. g. Part No. 844 256
Cryopumps, Cryogenics
C12.41
Accessories for Cryopumps
LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004
C12
COOLVAC ClassicLine, Dual and Mutiple System Configuration
COOLVAC
# 3
PM
COOLVAC
# 2
PM
SC
COOLVAC
# 1
PM
RS 232 C
PS
External PC
1
7
8
8
9
6
8
77
COMPRESSOR
Key to the diagram “Dual and Mutiple System Configuration”
PM = Pump Module (included with the pump)
SC = System Controller
PS = Power Supply
1 = e. g. Part No. 844 262
6 = to be provided by the customer
7 = e. g. Part No. 844 256
8 = e. g. Part No. 844 252
9 = Part No. 844 265
AccessoriesCryopumps, Cryogenics
C12.42 LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004
Modell 9700 Low Temperature Controller
Modell 9700 low temperature controller
Advantages to the User
o Microprocessor controlled PID controller
o Digital temperature readout in Kelvin
o Control by means of counter heating
o High control accuracy over the entire temperatur
range (1.5 to 450 K)
o Electric heating power up to 50 W
o Programmable heater power limit
o Generation of linear temperature ramps
o Up to 50 program steps are programmable
o Standard interface RS 232 C and IEEE-488
o Data from two sensors can be displayed
o Analogue temperature outputs for both
channels
o Can be used in three operating modes
– Manual
– Program
– External computer control
Typical Applications
o Temperature control at refrigerator cryostats
Technical Data Modell 9700
Mains connection, 50/60 Hz V AC
Power consumption, max. W
Entry of data
Data memory
Display
Temperature measurement
Sensors
Measurement current µA
Measurement range K
Measurement range of the silicon diode type D K
Number of channels
Resolution
A/D converter resolution bit
Switching outputs
Temperature resolution K
Temperature control
Heating power, max. W
Heating current, max. A
Heating voltage, max. V DC
Computer interface
Permissible ambient temperature °C
Mechanical design/cabinet
Dimensions (W x H x D) [high H without feet] mm
Weight kg (lbs)
Dimensions of the packaging (W x H x D) mm
Weight (including packaging, approx.) kg (lbs)
Length of mains cord m
85-240
150
3 x 4 membrane key pad
EPROM
Two line, 20 digit LED digital display
2 x silicon diodes type D or 2 x silicon diodes
with standard temperature resistance characteristics
10
1.5 to 450
1.4 to 325 K
2
Simultaneous display of both channels
24
2 relays (n.o. and n.c. contacts)
0.1
PID controller
50
1
0 to 50
RS 232 C and IEEE-488
+ 10 to + 30
Table-top unit (8.5" x 3.5" x 12")
215.9 x 88 x 304.8
2.3 (5)
360 x 230 x 450
4.2 (9.3)
2.5
Ordering Information Modell 9700
Modell 9700 low temperature controller
Sensor cable, 3 m long
Silicon diode type D
with connection cable and miniature plugs
Part No. 842 400
Part No. 842 401
Part No. 890 89
Cryopumps, Cryogenics
C12.43
Accessories
LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004
C12
MODEL 1901 Low Temperature Measuring Instrument
MODEL 1901 low temperature measuring instrument Dimensions and panel cut-out for the MODEL 1901
Advantages to the User
o Supports one silicon diode
o 3-digit LED display
o Temperature readout between 1 and
450 Kelvin
o Two trigger thresholds
o RS 232 C interface
Typical Applications
o Temperature measurements on cryostats
o Temperature measurements on cryopumps
for monitoring their operation and to control
pump systems
Technical Data MODEL 1901
Measurement current µA
Display
Temperature range K
Resolution
Accuracy
Power supply voltage
Trigger thresholds
Switched output
RS 232 C interface
Admissible ambient temperature °C
Mechanical design/housing
Dimensions (W x H x D) mm
Packaging dimensions (W x H x D) mm
Weight (including packaging) kg (lbs)
10
LED, 3-digits
1.5 to 450
0.1 K from 1.5 to 99.9 K
1.0 K from 100 to 450 K
±0.1 K from 1.5 to 99.9 K
±1.0 K from 100 to 450 K
9 V DC @ 500 mA
through the supplied 220 V AC / 9 V DC power adaptor
2
2 relays (n.c. and n.o.)
a) Temperature output
b) External adjustment of switching thresholds
+10 to +35
Benchtop unit
95.3 x 47.8 x 134.1
320 x 180 x 120
1.5 (3.3)
Ordering Information MODEL 1901
MODEL 1901 low temperature measurement instrument
HV cable with plug, 10 m long *)
UHV cable with plug, 10 m long *)
Silicon diode, type D,
with connecting cable and micro plugs
- without current feedthrough
HV current feedthrough on a flange DN 25 KF, 2 way
UHV current feedthrough on a flange DN 16 KF, 2 way
*) for COOLPOWER and COOLVAC pumps
Part No. 136 45
Part No. 500 085
Part No. 500 201
Part No. 890 89
Part No. 200 19 256
Part No. 500 217
AccessoriesCryopumps, Cryogenics
C12.44 LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004
Temperature Sensors
2,9
3,8
0,76
8
600 mm long
Dimensional drawing for the silicon diode, type D
In contrast to vapor pressure thermometers,
electric temperature sensors can be used for
continuous measurements within a wide range of
temperatures.
Silicon diodes offer a negative temperature
coefficient of resistance, i.e. their resistance
drops as the temperature increases. The slope of
the temperature/resistance characteristic and the
absolute resistance are decisive regarding the
suitability of these diodes. The slope determines
the sensitivity of the sensor and a high electrical
resistance permits accurate measurements while
keeping the thermal load small (microwatts).
In systems which are degassed at high temperatures,
silicon diodes can only be fitted after
degassing has been completed.
The type D silicon diode is compatible to the
MODEL 1901 low temperature display unit.
Technical Data Type D Silicon Diode
Temperature range K
Temperature coefficient (dR/dT)
qualitative
quantitative Ω/K
Measurement current µA
Bakeable to °C
1.4 to 325
Negative in the entire temperature range
Non-linear characteristic
10
60
Ordering Information Type D Silicon Diode
Temperature Sensors Part No. 890 89
Standard characteristic of the silicon diode
Cryopumps, Cryogenics
C12.45
Accessories
LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004
C12
Safety Valve / Precision Manometer
32
28
DN 16 KF
Typical Applications
o Protecting sealed vacuum systems like cryopumps,
cryostats, lifting devices, for example
against internal overpressures
o Mandatory for systems which are separated
when cold, as a means of protection against
overpressures
Typical Applications
o Pressure readout for vapor pressure thermo-
meters
160
2000 0
50
226
DN 10 KF
133
Technical Data Safety Valve Precision Manometer
Responding pressure mbar
Flow at 140 mbar l x h-1
Valve disk
Leak rate in the closed state
mbar x l x s-1 (Torr x l x s-1)
Connection DN
Measurement range mbar (Torr)
Accuracy
Diameter mm
Length of the dial mm
Internal volume, approx. cm3
Overall height mm
Weight kg (lbs)
120 to 160, over-pressure –
500 –
Spring loaded, with O-ring seal –
< 1 x 10-8 (< 0.75 x 10-8) –
16 KF 10 KF
– 0 to 2000 (0 to 1500)
– 1 % of full scale
32 160
– 320
– 20
28 226
0.3 (0.7) 1.4 (3.1)
Ordering Information Safety Valve Precision Manometer
Safety valve on DN 16 KF flange
Precision manometer
Part No. 890 39 –
– Part No. 890 50
Technical Information
For operation and measurements at pressures
exceeding 1013 mbar the small flange seal
must be equipped with an outer centering ring
Part No. 183 53.
Dimensional drawing for the safety valve Dimensional drawing for the precision manometer
Cryopumps, Cryogenics
C12.46 LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004