[MAIN]
AccFrames=1
Date=2016-10-18
Description=
Device=MIRA3 GMU
FullUserName=David Pavliňák
ImageStripSize=120
Magnification=1.0000e3
Note=TopOverlaping=192; LeftOverlaping=256
PixelSizeX=270.31e-9
PixelSizeY=270.31e-9
ProjectName=běžná údržba a kontrola nastavení
SerialNumber=2131280CZ
Sign=
TagRevision=2
Time=10:08:24
UserName=David
Version=4.2.17.1
ViewFieldsCountX=2
ViewFieldsCountY=1

[SEM]
3DBeamTiltX=0.0
3DBeamTiltY=0.0
BeamIntensityIndex=12.00
ChamberPressure=39.391e-3
Detector=SE, BSE
Detector0=SE
Detector1=BSE
Detector1Gain=43.555
Detector1Offset=90.313
DwellTime=10.0000e-6
EmissionCurrent=195.25e-6
Gun=Schottky
GunShiftX=0.0
GunShiftY=0.0
GunTiltX=-167.55e-3
GunTiltY=-5.8495
HV=10.0000e3
IMLCenteringX=-7.1300
IMLCenteringY=3.2100
ImageShiftX=0.0
ImageShiftY=0.0
InBeamExtractor=2.0000e3
InBeamScintillator=10.0000e3
LUTGamma=814.00e-3
LUTMaximum=255
LUTMinimum=0
MixingMode=2
OBJCenteringX=-13.080
OBJCenteringY=-50.566
OBJPreCenteringX=-4.1300
OBJPreCenteringY=-3.4100
PredictedBeamCurrent=546.328796416e-12
PrimaryDetectorGain=48.993
PrimaryDetectorOffset=89.375
ScanMode=DEPTH
ScanRotation=0.0
ScanSpeed=5
SpecimenCurrent=395.604395604e-12
SpotSize=6.58214119372e-9
StageRotation=55.000
StageTilt=0.0
StageX=102.81e-6
StageY=-12.806e-3
StageZ=19.226e-3
StigmatorX=806.00e-3
StigmatorY=1.5680
SystemPressure=518.26e-6
TiltCorrection=0.0
WD=15.020e-3

