[MAIN]
AccFrames=1
Date=2016-10-18
Description=
Device=MIRA3 GMU
FullUserName=David Pavliňák
ImageStripSize=120
Magnification=150.00
Note=TopOverlaping=192; LeftOverlaping=256
PixelSizeX=1.8021e-6
PixelSizeY=1.8021e-6
ProjectName=běžná údržba a kontrola nastavení
SerialNumber=2131280CZ
Sign=
TagRevision=2
Time=11:17:26
UserName=David
Version=4.2.17.1
ViewFieldsCountX=2
ViewFieldsCountY=1

[SEM]
3DBeamTiltX=0.0
3DBeamTiltY=0.0
BeamIntensityIndex=12.00
ChamberPressure=35.525e-3
Detector=SE, BSE
Detector0=SE
Detector1=BSE
Detector1Gain=38.477
Detector1Offset=92.422
DwellTime=10.0000e-6
EmissionCurrent=192.36e-6
Gun=Schottky
GunShiftX=0.0
GunShiftY=0.0
GunTiltX=-67.691e-3
GunTiltY=-8.4865
HV=25.000e3
IMLCenteringX=-14.430
IMLCenteringY=4.1500
ImageShiftX=0.0
ImageShiftY=0.0
InBeamExtractor=500.00
InBeamScintillator=10.0000e3
LUTGamma=814.00e-3
LUTMaximum=255
LUTMinimum=0
MixingMode=2
OBJCenteringX=-7.2021
OBJCenteringY=-48.130
OBJPreCenteringX=-530.00e-3
OBJPreCenteringY=-4.4400
PredictedBeamCurrent=542.478864959e-12
PrimaryDetectorGain=40.430
PrimaryDetectorOffset=93.750
ScanMode=DEPTH
ScanRotation=0.0
ScanSpeed=5
SpecimenCurrent=398.534798535e-12
SpotSize=5.92577931226e-9
StageRotation=60.000
StageTilt=0.0
StageX=5.2802e-3
StageY=-15.834e-3
StageZ=18.843e-3
StigmatorX=921.00e-3
StigmatorY=2.0170
SystemPressure=199.85e-6
TiltCorrection=0.0
WD=14.699e-3

