[MAIN]
AccFrames=1
Date=2016-10-18
Description=
Device=MIRA3 GMU
FullUserName=David Pavliňák
ImageStripSize=120
Magnification=9.1731
Note=TopOverlaping=192; LeftOverlaping=256
PixelSizeX=29.468e-6
PixelSizeY=29.468e-6
ProjectName=běžná údržba a kontrola nastavení
SerialNumber=2131280CZ
Sign=
TagRevision=2
Time=09:37:37
UserName=David
Version=4.2.17.1
ViewFieldsCountX=2
ViewFieldsCountY=1

[SEM]
3DBeamTiltX=0.0
3DBeamTiltY=0.0
BeamIntensityIndex=20.00
ChamberPressure=44.359e-3
Detector=SE, BSE
Detector0=SE
Detector1=BSE
Detector1Gain=43.164
Detector1Offset=93.438
DwellTime=10.0000e-6
EmissionCurrent=195.29e-6
Gun=Schottky
GunShiftX=0.0
GunShiftY=0.0
GunTiltX=-167.55e-3
GunTiltY=-5.8495
HV=10.0000e3
IMLCenteringX=-7.1300
IMLCenteringY=3.2100
ImageShiftX=0.0
ImageShiftY=0.0
InBeamExtractor=300.00
InBeamScintillator=10.0000e3
LUTGamma=814.00e-3
LUTMaximum=255
LUTMinimum=0
MixingMode=2
OBJCenteringX=-600.00e-3
OBJCenteringY=11.740
OBJPreCenteringX=-4.1300
OBJPreCenteringY=-3.4100
PredictedBeamCurrent=10.1359597412e-9
PrimaryDetectorGain=27.408
PrimaryDetectorOffset=93.047
ScanMode=WIDE FIELD
ScanRotation=0.0
ScanSpeed=5
SpecimenCurrent=4.13553113553e-9
SpotSize=210.222932471e-9
StageRotation=55.000
StageTilt=0.0
StageX=3.4603e-3
StageY=-11.851e-3
StageZ=47.648e-3
StigmatorX=-5.3000
StigmatorY=410.00e-3
SystemPressure=2.1160e-3
TiltCorrection=0.0
WD=43.422e-3

