Další formáty:
BibTeX
LaTeX
RIS
@article{1080644,
author = {Nečas, David and Klapetek, Petr},
article_location = {Amsterdam},
article_number = {Jan},
doi = {http://dx.doi.org/10.1016/j.ultramic.2012.08.002},
keywords = {Scanning probe microscopy; Atomic force microscopy; Roughness; Frequency analysis},
language = {eng},
issn = {0304-3991},
journal = {Ultramicroscopy},
title = {One-dimensional autocorrelation and power spectrum density functions of irregular regions},
url = {http://www.sciencedirect.com/science/article/pii/S0304399112002069},
volume = {124},
year = {2013}
}
TY - JOUR
ID - 1080644
AU - Nečas, David - Klapetek, Petr
PY - 2013
TI - One-dimensional autocorrelation and power spectrum density functions of irregular regions
JF - Ultramicroscopy
VL - 124
IS - Jan
SP - 13-19
EP - 13-19
PB - Elsevier Science
SN - 03043991
KW - Scanning probe microscopy
KW - Atomic force microscopy
KW - Roughness
KW - Frequency analysis
UR - http://www.sciencedirect.com/science/article/pii/S0304399112002069
L2 - http://www.sciencedirect.com/science/article/pii/S0304399112002069
N2 - Scanning probe microscopy (SPM) can be effectively used for evaluation of nanoscale roughness of surfaces obtained by different technological processes. Spectral properties of surface roughness can be evaluated using algorithms based on Fast Fourier Transform (FFT). For data that are not rectangular, this approach, however fails. In this paper we describe a modification of SPM data evaluation algorithms enabling to use FFT based approach even for irregular and non-continuous data. This opens novel possibilities in analysis of local surface roughness in many fields, e.g. on nanoparticles, semiconductor structures or any other nanostructured samples prepared using nanotechnology methods. Together with theoretical description of proposed method we present benchmarks for its performance and typical results of its application on different samples.
ER -
NEČAS, David a Petr KLAPETEK. One-dimensional autocorrelation and power spectrum density functions of irregular regions. \textit{Ultramicroscopy}. Amsterdam: Elsevier Science, 2013, roč.~124, Jan, s.~13-19. ISSN~0304-3991. doi:10.1016/j.ultramic.2012.08.002.
|
