Surface Nanotreatment of Silicon and Polyamide by Means of Atmospheric Microwave Plasma Jet
J. Hnilica, L. Potočňáková, V. Kudrle, D. Skácelová
Department of Physical Electronics, Masaryk University Kotlářská 2, CZ-61137 Brno, Czech Republic emai1:   yaryk@mai1.muni.cz
eg
Motivation
Surface activation =^> increase of surface free energy
Positive effects:
• wettability
• adhesion =>* dyeing, gluing, film depositon ...
• printability
Special plasma device: surfatron
• atmospheric pressure
• localized plasma treatment
• treatment of rough or structured surfaces
• short treatment times
• treatment of low dielectric strength materials
Experimental setup
Fixed parameters
• Microwave (2.45 GHz) excitation
• P = 250 W (in both CW or AM modes)
• Working gas: argon (1.45 slm)
• Tube inner diameter = 1.5 mm
oscilloscope
0
flow controller
function generator
water cooling
microwave generator 2,45 GHz
L|_i^y_(^
ferrite circulator
plasma
Of
surfatron
sample
screw drive
Silicon treatment
							
Profile			Si wafer surface treatment			Ageing	
^ 80 ü
8 40
o ü
cd
-t—'
Co
20 H
1     1 1 -15 -10	■       1       i       1       i       1       i       1       i 1 -5             0             5             10 15
	
t-Afterglow	\ /
—0~ Middle of the flame	\ /
M  End of the flame	k=Ä=_■_-_J
	
-15
-10
-5 0 5
Lateral distance (mm)
10
15
_CD
DD C CO
o
c o O
—i—1—i—1—i—1—r
20      40      60 80
1—i—1—r
100    120
1—1—i—r
140     160 180
Ageing (hours)
Polyamide treatment
Profile
Short exposition time
Agein
90
°^ 80 4 _cd
co 6°H o
c 40H
o o
Ž 20 -|
co
-10
0
rv
-0
1—0,25 s, AM
>-0,05s, AM
-0,25 s, CW
5
10
0,0
0,1
water
surface free energy
0,2
i
0,3
i
0,4
-tVAt-
0,5 1,0
80
\-70
\-60
50 © CD
CD CD
Mo
\-30
CD
o CZ)
20
Treatment time (s)
Lateral distance (mm)
240 360 480
Ageing (hours)
Conclusion - silicon
Conclusion - polyamide
Outlook
• water contact angle: 86° —>■ 3°
• necessary time: < 0.019 s
• treatment width: < 1 cm (for amplitude modulated mode)
• ageing: 3° ->> 30° in 10 days
• water contact angle: 79° —>■ 19°
• necessary time: > 0.05 s
• treatment width: < 1 cm (for amplitude modulated mode)
• ageing: 19° —>■ 35° in 30 days (for 2% nitrogen admixture)
High-speed treatment
This research was supported by the project CZ.1.05/2.1.00/03.0086 funded by European Regional Development Fund.