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@article{1092092, author = {Schmidtová, Tereza and Vašina, Petr}, article_number = {S}, keywords = {reactive magnetron sputtering; modelling; target utilization}, language = {eng}, issn = {0009-2770}, journal = {Chemické listy}, title = {Modelling of Reactive Magnetron Sputtering with Focus on Changes in Target Utilization}, volume = {106}, year = {2012} }
TY - JOUR ID - 1092092 AU - Schmidtová, Tereza - Vašina, Petr PY - 2012 TI - Modelling of Reactive Magnetron Sputtering with Focus on Changes in Target Utilization JF - Chemické listy VL - 106 IS - S SP - s1482-s1487 EP - s1482-s1487 SN - 00092770 KW - reactive magnetron sputtering KW - modelling KW - target utilization N2 - The paper deals with modelling of reactive magnetron sputtering of titanium with focus on changes in target utilization. ER -
SCHMIDTOVÁ, Tereza a Petr VAŠINA. Modelling of Reactive Magnetron Sputtering with Focus on Changes in Target Utilization. \textit{Chemické listy}. roč.~106, S, s.~s1482-s1487, 6 s. ISSN~0009-2770. 2012.
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