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@article{1092437,
author = {Stoica, Adrian and Mocanu, Valentin and Čupera, Jan and Kelar, Lukáš and Buršíková, Vilma},
article_location = {Praha},
article_number = {106},
keywords = {RF-PECVD; amorphous carbon; protective coatings; DLC;},
language = {eng},
issn = {0009-2770},
journal = {Chem. listy},
title = {PROPERTIES OF MODIFIED AMORPHOUS CARBON THIN FILMS DEPOSITED BY PECVD},
url = {http://www.chemicke-listy.cz/common/content-issue_s5-volume_106-year_2012.html},
volume = {106/2012},
year = {2012}
}
TY - JOUR
ID - 1092437
AU - Stoica, Adrian - Mocanu, Valentin - Čupera, Jan - Kelar, Lukáš - Buršíková, Vilma
PY - 2012
TI - PROPERTIES OF MODIFIED AMORPHOUS CARBON THIN FILMS DEPOSITED BY PECVD
JF - Chem. listy
VL - 106/2012
IS - 106
SP - S1499-S1503
EP - S1499-S1503
SN - 00092770
KW - RF-PECVD
KW - amorphous carbon
KW - protective coatings
KW - DLC;
UR - http://www.chemicke-listy.cz/common/content-issue_s5-volume_106-year_2012.html
L2 - http://www.chemicke-listy.cz/common/content-issue_s5-volume_106-year_2012.html
N2 - The aim of this work was to prepare a set of DLC films from different mixtures of precursor gases (methane, hydrogen, deuterium, nitrogen and/or HMDSO) using RFPECVD on substrates such as crystalline silicon, glass, and steel. The prepared films were characterized by several diagnostic tools and the properties of hydrogenated amorphous carbon films and the modified diamond-like carbon thin films with different admixtures (N, Si, O, D) were compared. Mechanical tests were performed on the obtained films mainly using depth sensing indentation method. We focused our attention on the following coating properties: hardness, elastic modulus, fracture toughness, film-substrate adhesion. Additionally, the effect of the internal stress on the indentation response of the filmsubstrate systems was studied. The tribological properties of the films were also investigated. The surface free energy of the films was performed by contact angle measuring technique.
ER -
STOICA, Adrian, Valentin MOCANU, Jan ČUPERA, Lukáš KELAR and Vilma BURŠÍKOVÁ. PROPERTIES OF MODIFIED AMORPHOUS CARBON THIN FILMS DEPOSITED BY PECVD. \textit{Chem. listy}. Praha, 2012, 106/2012, No~106, p.~S1499-S1503, 5 pp. ISSN~0009-2770.
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