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@article{1113198,
author = {Nečas, David and Franta, Daniel and Ohlídal, Ivan and Poruba, Aleš and Wostrý, Petr},
article_location = {Hoboken},
article_number = {7},
doi = {http://dx.doi.org/10.1002/sia.5250},
keywords = {optical characterization; variable-angle spectroscopic ellipsometry; phase-modulated ellipsometry; inhomogeneous films; silicon nitride films},
language = {eng},
issn = {0142-2421},
journal = {Surface and Interface Analysis},
title = {Ellipsometric characterization of inhomogeneous non-stoichiometric silicon nitride films},
url = {http://onlinelibrary.wiley.com/doi/10.1002/sia.5250/abstract},
volume = {45},
year = {2013}
}
TY - JOUR
ID - 1113198
AU - Nečas, David - Franta, Daniel - Ohlídal, Ivan - Poruba, Aleš - Wostrý, Petr
PY - 2013
TI - Ellipsometric characterization of inhomogeneous non-stoichiometric silicon nitride films
JF - Surface and Interface Analysis
VL - 45
IS - 7
SP - 1188-1192
EP - 1188-1192
PB - WILEY-BLACKWELL
SN - 01422421
KW - optical characterization
KW - variable-angle spectroscopic ellipsometry
KW - phase-modulated ellipsometry
KW - inhomogeneous films
KW - silicon nitride films
UR - http://onlinelibrary.wiley.com/doi/10.1002/sia.5250/abstract
L2 - http://onlinelibrary.wiley.com/doi/10.1002/sia.5250/abstract
N2 - Variable-angle spectroscopic ellipsometry is employed for the optical characterization of non-stoichiometric silicon nitride thin films exhibiting inhomogeneity formed by refractive index and extinction index changes through the film thickness. For all the film samples, the best fit of the experimental data is achieved if, in addition to the inhomogeneity, an overlayer or roughness of the upper boundary is included. However, distinguishing of these two defects is found not to be possible. The influence of working gas ratio, deposition temperature and on/off time on the film properties is studied. The refractive index and extinction coefficient is found to increase with increasing working gas ratio and less significantly with decreasing deposition temperature. It is also found that the inhomogeneity increases with decreasing deposition temperature, and the deposition rate of the films decreases with increasing working gas ratio. The influence of the on/off time on the film properties is practically unimportant.
ER -
NEČAS, David, Daniel FRANTA, Ivan OHLÍDAL, Aleš PORUBA and Petr WOSTRÝ. Ellipsometric characterization of inhomogeneous non-stoichiometric silicon nitride films. \textit{Surface and Interface Analysis}. Hoboken: WILEY-BLACKWELL, 2013, vol.~45, No~7, p.~1188-1192. ISSN~0142-2421. doi:10.1002/sia.5250.
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