Potential use of V-channel Ge(220) monochromators in X-ray
metrology and imaging

J 2013

Potential use of V-channel Ge(220) monochromators in X-ray metrology and imaging

KORYTÁR, D., P. VAGOVIČ, K. VÉGSÖ, P. ŠIFFALOVIČ, E. DOBROČKA et. al.

Basic information

Original name

Potential use of V-channel Ge(220) monochromators in X-ray metrology and imaging

Authors

KORYTÁR, D. (703 Slovakia), P. VAGOVIČ (703 Slovakia), K. VÉGSÖ (703 Slovakia), P. ŠIFFALOVIČ (703 Slovakia), E. DOBROČKA (703 Slovakia), W. JARK (380 Italy), V. ÁČ (703 Slovakia), Z. ZÁPRAŽNÝ (703 Slovakia), C. FERRARI (380 Italy), A. CECILIA (703 Slovakia), E. HAMANN (276 Germany), Petr MIKULÍK (203 Czech Republic, guarantor, belonging to the institution), T. BAUMBACH (276 Germany), M. FIEDERLE (276 Germany) and M. JERGEL (703 Slovakia)

Edition

Journal of Applied Crystallography, Hoboken, WILEY-BLACKWELL, 2013, 0021-8898

Other information

Language

English

Type of outcome

Článek v odborném periodiku

Field of Study

10302 Condensed matter physics

Country of publisher

United States of America

Confidentiality degree

není předmětem státního či obchodního tajemství

References:

URL URL

Impact factor

Impact factor: 3.950

RIV identification code

RIV/00216224:14740/13:00069091

Organization unit

Central European Institute of Technology

DOI

http://dx.doi.org/10.1107/S0021889813006122

UT WoS

000322032300019

Keywords in English

x-ray optics; monochromators; imaging

Abstract

V originále

While channel-cut crystals, in which the diffracting surfaces in an asymmetric cut are kept parallel, can provide beam collimation and spectral beam shaping, they can in addition provide beam compression or expansion if the cut is V-shaped. The compression/expansion ratio depends in this case on the total asymmetry factor. If the Ge(220) diffraction planes and a total asymmetry factor in excess of 10 are used, the rocking curves of two diffractors will have a sufficient overlap only if the second diffractor is tuned slightly with respect to the first one. This study compares and analyses several ways of overcoming this mismatch, which is due to refraction, when the Cu K1 beam is compressed 21-fold in a V21 monochromator. A more than sixfold intensity increase was obtained if the matching was improved either by a compositional variation or by a thermal deformation. This provided an intensity gain compared with the use of a simple slit in a symmetrical channel-cut monochromator. The first attempt to overcome the mismatch by introducing different types of X-ray prisms for the required beam deflection is described as well. The performance of the V-shaped monochromators is demonstrated in two applications. A narrow collimated monochromatic beam obtained in the beam compressing mode was used for high-resolution grazing-incidence small-angle X-ray scattering measurements of a silicon sample with corrupted surface. In addition, a two-dimensional Bragg magnifier, based on two crossed V15 channel monochromators in beam expansion mode and tuned by means of unequal asymmetries, was successfully applied to high-resolution imaging of test structures in combination with a Medipix detector.

Links

ED1.1.00/02.0068, research and development project

Name: CEITEC - central european institute of technology

Citovat

KORYTÁR, D., P. VAGOVIČ, K. VÉGSÖ, P. ŠIFFALOVIČ, E. DOBROČKA, W. JARK, V. ÁČ, Z. ZÁPRAŽNÝ, C. FERRARI, A. CECILIA, E. HAMANN, Petr MIKULÍK, T. BAUMBACH, M. FIEDERLE and M. JERGEL. Potential use of V-channel Ge(220) monochromators in X-ray metrology and imaging. Journal of Applied Crystallography. Hoboken: WILEY-BLACKWELL, 2013, vol. 46, No 4, p. 945-952. ISSN 0021-8898. Available from: https://dx.doi.org/10.1107/S0021889813006122.

@article{1120392,
   author = {Korytár, D. and Vagovič, P. and Végsö, K. and Šiffalovič, P. and Dobročka, E. and Jark, W. and Áč, V. and Zápražný, Z. and Ferrari, C. and Cecilia, A. and Hamann, E. and Mikulík, Petr and Baumbach, T. and Fiederle, M. and Jergel, M.},
   article_location = {Hoboken},
   article_number = {4},
   doi = {http://dx.doi.org/10.1107/S0021889813006122},
   keywords = {x-ray optics; monochromators; imaging},
   language = {eng},
   issn = {0021-8898},
   journal = {Journal of Applied Crystallography},
   title = {Potential use of V-channel Ge(220) monochromators in X-ray metrology and imaging},
   url = {http://scripts.iucr.org/cgi-bin/paper?xk5006},
   volume = {46},
   year = {2013}
}

TY  - JOUR
ID  - 1120392
AU  - Korytár, D. - Vagovič, P. - Végsö, K. - Šiffalovič, P. - Dobročka, E. - Jark, W. - Áč, V. - Zápražný, Z. - Ferrari, C. - Cecilia, A. - Hamann, E. - Mikulík, Petr - Baumbach, T. - Fiederle, M. - Jergel, M.
PY  - 2013
TI  - Potential use of V-channel Ge(220) monochromators in X-ray metrology and imaging
JF  - Journal of Applied Crystallography
VL  - 46
IS  - 4
SP  - 945-952
EP  - 945-952
PB  - WILEY-BLACKWELL
SN  - 00218898
KW  - x-ray optics
KW  - monochromators
KW  - imaging
UR  - http://scripts.iucr.org/cgi-bin/paper?xk5006
N2  - While channel-cut crystals, in which the diffracting surfaces in an asymmetric cut are kept parallel, can provide beam collimation and spectral beam shaping, they can in addition provide beam compression or expansion if the cut is V-shaped. The compression/expansion ratio depends in this case on the total asymmetry factor. If the Ge(220) diffraction planes and a total asymmetry factor in excess of 10 are used, the rocking curves of two diffractors will have a sufficient overlap only if the second diffractor is tuned slightly with respect to the first one. This study compares and analyses several ways of overcoming this mismatch, which is due to refraction, when the Cu K1 beam is compressed 21-fold in a V21 monochromator. A more than sixfold intensity increase was obtained if the matching was improved either by a compositional variation or by a thermal deformation. This provided an intensity gain compared with the use of a simple slit in a symmetrical channel-cut monochromator. The first attempt to overcome the mismatch by introducing different types of X-ray prisms for the required beam deflection is described as well. The performance of the V-shaped monochromators is demonstrated in two applications. A narrow collimated monochromatic beam obtained in the beam compressing mode was used for high-resolution grazing-incidence small-angle X-ray scattering measurements of a silicon sample with corrupted surface. In addition, a two-dimensional Bragg magnifier, based on two crossed V15 channel monochromators in beam expansion mode and tuned by means of unequal asymmetries, was successfully applied to high-resolution imaging of test structures in combination with a Medipix detector.
ER  -

KORYTÁR, D., P. VAGOVIČ, K. VÉGSÖ, P. ŠIFFALOVIČ, E. DOBROČKA, W. JARK, V. ÁČ, Z. ZÁPRAŽNÝ, C. FERRARI, A. CECILIA, E. HAMANN, Petr MIKULÍK, T. BAUMBACH, M. FIEDERLE and M. JERGEL. Potential use of V-channel Ge(220) monochromators in X-ray metrology and imaging. \textit{Journal of Applied Crystallography}. Hoboken: WILEY-BLACKWELL, 2013, vol.~46, No~4, p.~945-952. ISSN~0021-8898. Available from: https://dx.doi.org/10.1107/S0021889813006122.

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