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@proceedings{1122762,
author = {Klein, Peter and Vašina, Petr and Schmidtová, Tereza},
booktitle = {Final scientific programme & Book of abstracts},
keywords = {Sputtering; Magnetron; Monte Carlo simulation; Compound material},
language = {eng},
isbn = {978-615-5270-04-8},
title = {ON SPUTTERED PARTICLE DISTRIBUTION TOWARDS SUBSTRATE DURING TARGET EROSION - SIMULATION AND EXPERIMENT},
year = {2013}
}
TY - CONF
ID - 1122762
AU - Klein, Peter - Vašina, Petr - Schmidtová, Tereza
PY - 2013
TI - ON SPUTTERED PARTICLE DISTRIBUTION TOWARDS SUBSTRATE DURING TARGET EROSION - SIMULATION AND EXPERIMENT
SN - 9786155270048
KW - Sputtering
KW - Magnetron
KW - Monte Carlo simulation
KW - Compound material
N2 - It is commonly observed that thin layers, especially formed by compound material deposited in planar magnetron using the same deposition manners, can have slightly different properties and composition depending on the substrate position. This research shows that one of the important factors to be considered thinking about fluxes of different species on the substrate is the target erosion state.
ER -
KLEIN, Peter, Petr VAŠINA and Tereza SCHMIDTOVÁ. ON SPUTTERED PARTICLE DISTRIBUTION TOWARDS SUBSTRATE DURING TARGET EROSION - SIMULATION AND EXPERIMENT. In \textit{Final scientific programme \&{} Book of abstracts}. 2013. ISBN~978-615-5270-04-8.
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