ŽEMLIČKA, Radek, Mojmír JÍLEK, Petr VOGL, Pavel SOUČEK, Vilma BURŠÍKOVÁ and Petr VAŠINA. Preparation of hard TiC/a-C:H coatings using hybrid PVD-PECVD process with rotating cylindrical magnetron. In 5th CESPC. 2013. ISBN 978-615-5270-04-8.
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Basic information
Original name Preparation of hard TiC/a-C:H coatings using hybrid PVD-PECVD process with rotating cylindrical magnetron
Authors ŽEMLIČKA, Radek (203 Czech Republic, belonging to the institution), Mojmír JÍLEK (203 Czech Republic), Petr VOGL (203 Czech Republic), Pavel SOUČEK (203 Czech Republic, belonging to the institution), Vilma BURŠÍKOVÁ (203 Czech Republic, belonging to the institution) and Petr VAŠINA (203 Czech Republic, guarantor, belonging to the institution).
Edition 5th CESPC, 2013.
Other information
Original language English
Type of outcome Conference abstract
Field of Study 10305 Fluids and plasma physics
Country of publisher Hungary
Confidentiality degree is not subject to a state or trade secret
RIV identification code RIV/00216224:14310/13:00066354
Organization unit Faculty of Science
ISBN 978-615-5270-04-8
Keywords in English hybrid PVD-PECVD process; rotating cylindrical magnetron; TiC
Tags International impact, Reviewed
Changed by Changed by: Mgr. Radek Žemlička, Ph.D., učo 270180. Changed: 20/9/2013 11:40.
Abstract
This work deal with preparation of hard nc-TiC/a-C:H coatings using hybrid PVD-PECVD process with rotating cylindrical magnetron.
Links
CZ.1.05/2.1.00/03.0086, interní kód MUName: CEPLANT - Regionální VaV centrum pro nízkonákladové plazmové a nanotechnologické povrchové úpravy
Investor: Ministry of Education, Youth and Sports of the CR, 2.1 Regional R&D Centres
GAP205/12/0407, research and development projectName: Porozumění hybridnímu PVD-PECVD procesu s cílem řídit růst nanostrukturovaných kompozitních vrstev
Investor: Czech Science Foundation
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