SCHMIDTOVÁ, Tereza, Pavel SOUČEK, Vít KUDRLE and Petr VAŠINA. Non-monotonous evolution of hybrid PVD – PECVD process characteristics on hydrocarbon supply. Surface & coatings technology. Elsevier, 2013, vol. 2013, No 232, p. 283-289. ISSN 0257-8972. doi:10.1016/j.surfcoat.2013.05.014.
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Basic information
Original name Non-monotonous evolution of hybrid PVD – PECVD process characteristics on hydrocarbon supply
Authors SCHMIDTOVÁ, Tereza (203 Czech Republic, belonging to the institution), Pavel SOUČEK (203 Czech Republic, belonging to the institution), Vít KUDRLE (203 Czech Republic, belonging to the institution) and Petr VAŠINA (203 Czech Republic, guarantor, belonging to the institution).
Edition Surface & coatings technology, Elsevier, 2013, 0257-8972.
Other information
Original language English
Type of outcome Article in a journal
Field of Study 10305 Fluids and plasma physics
Country of publisher Switzerland
Confidentiality degree is not subject to a state or trade secret
Impact factor Impact factor: 2.199
RIV identification code RIV/00216224:14310/13:00066489
Organization unit Faculty of Science
Doi http://dx.doi.org/10.1016/j.surfcoat.2013.05.014
UT WoS 000327691300037
Keywords in English Magnetron sputtering; Diagnostics of deposition process; Nanocomposites; Metal – carbon coatings
Tags AKR, rivok
Tags International impact, Reviewed
Changed by Changed by: doc. Mgr. Pavel Souček, Ph.D., učo 175085. Changed: 8/4/2014 13:53.
Abstract
Hybrid PVD – PECVD process of titanium sputtering in argon and acetylene atmosphere combines aspects of both conventional techniques: sputtering of titanium target (PVD) and acetylene as a source of carbon (PECVD). This process can be used for preparation of metal carbon nanocomposites (MeC/C(:H)) or DLC layers doped with metal (DLC:Me). The aim of this paper is to describe and understand elementary processes in fl uencing the hybrid PVD – PECVD process. A non-monotonous dependence of cathode voltage and current, total pressure and spectral line intensities on acetylene supply fl ow is reported. Explanation of non- monotonous evolutions through the analysis of the target state correlating the process characteristics with properties of coatings prepared by this process is proposed.
Links
ED2.1.00/03.0086, research and development projectName: Regionální VaV centrum pro nízkonákladové plazmové a nanotechnologické povrchové úpravy
GAP205/12/0407, research and development projectName: Porozumění hybridnímu PVD-PECVD procesu s cílem řídit růst nanostrukturovaných kompozitních vrstev
Investor: Czech Science Foundation
GD104/09/H080, research and development projectName: Plazmochemické procesy a jejich technologické aplikace
Investor: Czech Science Foundation
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