| SCHMIDTOVÁ, Tereza, Pavel SOUČEK, Vít KUDRLE a Petr VAŠINA. Non-monotonous evolution of hybrid PVD – PECVD process characteristics on hydrocarbon supply. Surface & coatings technology. Elsevier, roč. 2013, č. 232, s. 283-289. ISSN 0257-8972. doi:10.1016/j.surfcoat.2013.05.014. 2013. |
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@article{1129169,
author = {Schmidtová, Tereza and Souček, Pavel and Kudrle, Vít and Vašina, Petr},
article_number = {232},
doi = {http://dx.doi.org/10.1016/j.surfcoat.2013.05.014},
keywords = {Magnetron sputtering; Diagnostics of deposition process; Nanocomposites; Metal – carbon coatings},
language = {eng},
issn = {0257-8972},
journal = {Surface & coatings technology},
title = {Non-monotonous evolution of hybrid PVD – PECVD process characteristics on hydrocarbon supply},
volume = {2013},
year = {2013}
}
TY - JOUR
ID - 1129169
AU - Schmidtová, Tereza - Souček, Pavel - Kudrle, Vít - Vašina, Petr
PY - 2013
TI - Non-monotonous evolution of hybrid PVD – PECVD process characteristics on hydrocarbon supply
JF - Surface & coatings technology
VL - 2013
IS - 232
SP - 283-289
EP - 283-289
PB - Elsevier
SN - 02578972
KW - Magnetron sputtering
KW - Diagnostics of deposition process
KW - Nanocomposites
KW - Metal – carbon coatings
N2 - Hybrid PVD – PECVD process of titanium sputtering in argon and acetylene atmosphere combines aspects of both conventional techniques: sputtering of titanium target (PVD) and acetylene as a source of carbon (PECVD). This process can be used for preparation of metal carbon nanocomposites (MeC/C(:H)) or DLC layers doped with metal (DLC:Me). The aim of this paper is to describe and understand elementary processes in fl uencing the hybrid PVD – PECVD process. A non-monotonous dependence of cathode voltage and current, total pressure and spectral line intensities on acetylene supply fl ow is reported. Explanation of non- monotonous evolutions through the analysis of the target state correlating the process characteristics with properties of coatings prepared by this process is proposed.
ER -
SCHMIDTOVÁ, Tereza, Pavel SOUČEK, Vít KUDRLE a Petr VAŠINA. Non-monotonous evolution of hybrid PVD – PECVD process characteristics on hydrocarbon supply. \textit{Surface \&{} coatings technology}. Elsevier, roč.~2013, č.~232, s.~283-289. ISSN~0257-8972. doi:10.1016/j.surfcoat.2013.05.014. 2013.
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