BURŠÍKOVÁ, Vilma, Marie HARTMANOVÁ, Vladislav NAVRÁTIL and C. MANSILLA. Influence of deposition conditions on electrical and mechanical properties of Sm2O3 doped CeO2 thin films prepared by EB-PVD (+IBAD) methods part 2. Indentation hardness and effective elastic modulus. Russian Journal of Electrochemistry. Pleiades Publishing, Ltd., 2013, vol. 49, No 7, p. 619-627. ISSN 1023-1935. Available from: https://dx.doi.org/10.1134/S1023193513070033. |
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@article{1139210, author = {Buršíková, Vilma and Hartmanová, Marie and Navrátil, Vladislav and Mansilla, C.}, article_number = {7}, doi = {http://dx.doi.org/10.1134/S1023193513070033}, keywords = {mechanical properties; hardness; elastic modulus; nanoindentation; thin films; CeO2; Sm2O3; doping}, language = {eng}, issn = {1023-1935}, journal = {Russian Journal of Electrochemistry}, title = {Influence of deposition conditions on electrical and mechanical properties of Sm2O3 doped CeO2 thin films prepared by EB-PVD (+IBAD) methods part 2. Indentation hardness and effective elastic modulus}, volume = {49}, year = {2013} }
TY - JOUR ID - 1139210 AU - Buršíková, Vilma - Hartmanová, Marie - Navrátil, Vladislav - Mansilla, C. PY - 2013 TI - Influence of deposition conditions on electrical and mechanical properties of Sm2O3 doped CeO2 thin films prepared by EB-PVD (+IBAD) methods part 2. Indentation hardness and effective elastic modulus JF - Russian Journal of Electrochemistry VL - 49 IS - 7 SP - 619-627 EP - 619-627 PB - Pleiades Publishing, Ltd. SN - 10231935 KW - mechanical properties KW - hardness KW - elastic modulus KW - nanoindentation KW - thin films KW - CeO2 KW - Sm2O3 KW - doping N2 - The study of polycrystalline CeO2 + xSm2O3 (x = 0, 10.9–15.9 mol %) thin films deposited by Electron Beam Physical Vapour Deposition (EBPVD) and Ionic Beam Assisted Deposition (IBAD) techniques on the Si substrate was devoted to the influence of deposition conditions used, namely composition x, deposition temperature Tdep and Ar+ ion bombardment, on the (micro)hardness, Hpl and elastic modulus,Y with respect to the film structure and microstructure. These mechanical characteristics were investigated by the instrumented indentation technique as the functions of relative indentation depth hrel = hmax/t and the values obtained were compared with those obtained by the classical Vickers technique. Results of this study are described and discussed. ER -
BURŠÍKOVÁ, Vilma, Marie HARTMANOVÁ, Vladislav NAVRÁTIL and C. MANSILLA. Influence of deposition conditions on electrical and mechanical properties of Sm2O3 doped CeO2 thin films prepared by EB-PVD (+IBAD) methods part 2. Indentation hardness and effective elastic modulus. \textit{Russian Journal of Electrochemistry}. Pleiades Publishing, Ltd., 2013, vol.~49, No~7, p.~619-627. ISSN~1023-1935. Available from: https://dx.doi.org/10.1134/S1023193513070033.
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