FRANTA, Daniel, David NEČAS, Lenka ZAJÍČKOVÁ, Ivan OHLÍDAL and Jiří STUCHLÍK. Advanced modeling for optical characterization of amorphous hydrogenated silicon films. Thin Solid Films. Lausanne: Elsevier Science, 2013, vol. 541, Aug, p. 12-16. ISSN 0040-6090. Available from: https://dx.doi.org/10.1016/j.tsf.2013.04.129. |
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@article{1161986, author = {Franta, Daniel and Nečas, David and Zajíčková, Lenka and Ohlídal, Ivan and Stuchlík, Jiří}, article_location = {Lausanne}, article_number = {Aug}, doi = {http://dx.doi.org/10.1016/j.tsf.2013.04.129}, keywords = {Ellipsometry; Spectrophotometry; a-Si:H; Urbach tail; Localized states; Sum rule}, language = {eng}, issn = {0040-6090}, journal = {Thin Solid Films}, title = {Advanced modeling for optical characterization of amorphous hydrogenated silicon films}, url = {http://dx.doi.org/10.1016/j.tsf.2013.04.129}, volume = {541}, year = {2013} }
TY - JOUR ID - 1161986 AU - Franta, Daniel - Nečas, David - Zajíčková, Lenka - Ohlídal, Ivan - Stuchlík, Jiří PY - 2013 TI - Advanced modeling for optical characterization of amorphous hydrogenated silicon films JF - Thin Solid Films VL - 541 IS - Aug SP - 12-16 EP - 12-16 PB - Elsevier Science SN - 00406090 KW - Ellipsometry KW - Spectrophotometry KW - a-Si:H KW - Urbach tail KW - Localized states KW - Sum rule UR - http://dx.doi.org/10.1016/j.tsf.2013.04.129 L2 - http://dx.doi.org/10.1016/j.tsf.2013.04.129 N2 - Amorphous hydrogenated silicon (a-Si:H) films deposited on glass and crystalline silicon substrates are analyzed using a multi-sample method combining ellipsometry and spectrophotometry in a spectral range of 0.046–8.9 eV, utilizing an analytical dispersion model based on parametrization of joint density of states and application of sum rule. This model includes all absorption processes from phonon absorption to core electron excitations. It is shown that if films deposited on both substrates are characterized together it is possible to study both phonon absorption and weak absorption processes below the band gap, i.e. the Urbach tail and absorption on localized states. ER -
FRANTA, Daniel, David NEČAS, Lenka ZAJÍČKOVÁ, Ivan OHLÍDAL and Jiří STUCHLÍK. Advanced modeling for optical characterization of amorphous hydrogenated silicon films. \textit{Thin Solid Films}. Lausanne: Elsevier Science, 2013, vol.~541, Aug, p.~12-16. ISSN~0040-6090. Available from: https://dx.doi.org/10.1016/j.tsf.2013.04.129.
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