| FALUB, Claudiu Valentin, Thomas KREILIGER, Fabio ISA, Alfonso TABOADA, Mojmír MEDUŇA, Fabio PEZZOLI, Roberto BERGAMASCHINI, Anna MARZEGALLI, Elisabeth MÜLLER, Daniel CHRASTINA, Giovanni ISELLA, Antonia NEELS, Philippe NIEDERMANN, Alex DOMMANN, Leo MIGLIO and Hans VON KÄNEL. 3D Heteroepitaxy of Mismatched Semiconductors on Silicon. Thin Solid Films. Lausanne (Switzerland): Elsevier, 2014, vol. 557, 30 April 2014, p. 42-49. ISSN 0040-6090. Available from: https://dx.doi.org/10.1016/j.tsf.2013.10.094. |
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@article{1174235,
author = {Falub, Claudiu Valentin and Kreiliger, Thomas and Isa, Fabio and Taboada, Alfonso and Meduňa, Mojmír and Pezzoli, Fabio and Bergamaschini, Roberto and Marzegalli, Anna and Müller, Elisabeth and Chrastina, Daniel and Isella, Giovanni and Neels, Antonia and Niedermann, Philippe and Dommann, Alex and Miglio, Leo and von Känel, Hans},
article_location = {Lausanne (Switzerland)},
article_number = {30 April 2014},
doi = {http://dx.doi.org/10.1016/j.tsf.2013.10.094},
keywords = {Monolithic integration; Epitaxial growth; Ge; GaAs; Patterned Si substrates; Scanning X-ray nano-diffraction; Room-temperature photoluminescence; X-ray detectors},
language = {eng},
issn = {0040-6090},
journal = {Thin Solid Films},
title = {3D Heteroepitaxy of Mismatched Semiconductors on Silicon},
url = {http://www.sciencedirect.com/science/article/pii/S0040609013017057},
volume = {557},
year = {2014}
}
TY - JOUR
ID - 1174235
AU - Falub, Claudiu Valentin - Kreiliger, Thomas - Isa, Fabio - Taboada, Alfonso - Meduňa, Mojmír - Pezzoli, Fabio - Bergamaschini, Roberto - Marzegalli, Anna - Müller, Elisabeth - Chrastina, Daniel - Isella, Giovanni - Neels, Antonia - Niedermann, Philippe - Dommann, Alex - Miglio, Leo - von Känel, Hans
PY - 2014
TI - 3D Heteroepitaxy of Mismatched Semiconductors on Silicon
JF - Thin Solid Films
VL - 557
IS - 30 April 2014
SP - 42-49
EP - 42-49
PB - Elsevier
SN - 00406090
KW - Monolithic integration
KW - Epitaxial growth
KW - Ge
KW - GaAs
KW - Patterned Si substrates
KW - Scanning X-ray nano-diffraction
KW - Room-temperature photoluminescence
KW - X-ray detectors
UR - http://www.sciencedirect.com/science/article/pii/S0040609013017057
L2 - http://www.sciencedirect.com/science/article/pii/S0040609013017057
N2 - We present a method for monolithically integrating mismatched semiconductor materials with Si, coined three-dimensional (3D) heteroepitaxy. The method comprises the replacement of conventional, continuous epilayers by dense arrays of strain- and defect-free, micron-sized crystals.
ER -
FALUB, Claudiu Valentin, Thomas KREILIGER, Fabio ISA, Alfonso TABOADA, Mojmír MEDUŇA, Fabio PEZZOLI, Roberto BERGAMASCHINI, Anna MARZEGALLI, Elisabeth MÜLLER, Daniel CHRASTINA, Giovanni ISELLA, Antonia NEELS, Philippe NIEDERMANN, Alex DOMMANN, Leo MIGLIO and Hans VON KÄNEL. 3D Heteroepitaxy of Mismatched Semiconductors on Silicon. \textit{Thin Solid Films}. Lausanne (Switzerland): Elsevier, 2014, vol.~557, 30 April 2014, p.~42-49. ISSN~0040-6090. Available from: https://dx.doi.org/10.1016/j.tsf.2013.10.094.
|
