Titanium carbide/carbon nanocomposite hard coatings: A
comparative study between various chemical analysis tools

J 2014

Titanium carbide/carbon nanocomposite hard coatings: A comparative study between various chemical analysis tools

EL MEL, A.A., E. GAUTRON, F. CHRISTIEN, B. ANGLERAUD, A. GRANIER et. al.

Basic information

Original name

Titanium carbide/carbon nanocomposite hard coatings: A comparative study between various chemical analysis tools

Authors

EL MEL, A.A. (250 France), E. GAUTRON (250 France), F. CHRISTIEN (250 France), B. ANGLERAUD (250 France), A. GRANIER (250 France), Pavel SOUČEK (203 Czech Republic, belonging to the institution), Petr VAŠINA (203 Czech Republic, belonging to the institution), Vilma BURŠÍKOVÁ (203 Czech Republic, belonging to the institution), M. TAKASHIMA (392 Japan), N. OHTAKE (392 Japan), H. AKASAKA (392 Japan), T. SUZUKI (392 Japan) and P.Y. TESSIER (250 France, guarantor)

Edition

Surface & coatings technology, Elsevier, 2014, 0257-8972

Other information

Language

English

Type of outcome

Článek v odborném periodiku

Field of Study

10305 Fluids and plasma physics

Country of publisher

Switzerland

Confidentiality degree

není předmětem státního či obchodního tajemství

References:

URL

Impact factor

Impact factor: 1.998

RIV identification code

RIV/00216224:14310/14:00073845

Organization unit

Faculty of Science

DOI

http://dx.doi.org/10.1016/j.surfcoat.2013.12.068

UT WoS

000343349600008

Keywords in English

nanocomposite thin film; carbon; XPS; WDS; EDS; RBS

Abstract

V originále

Titanium carbide/carbon nanocomposite hard coatings, which consist of TiC nanoparticles buried in amorphous carbon matrix, are prepared by a hybrid plasma process combining magnetron sputtering of a titanium target and plasma enhanced chemical vapor deposition using methane as a source for the growth of amorphous carbon. A particular attention was paid to the comparison of the surface and the bulk chemical compositions of the films determined by different analysis techniques: X-ray photoelectron spectroscopy (XPS), Rutherford backscattering spectrometry (RBS), wavelength dispersive X-ray spectroscopy (WDS) and energy dispersive X-ray spectroscopy (EDS). XPS and EDS show an underestimation in carbon concentration compared to RBS and WDS which provide similar values. This underestimation is more important in case of XPS and it is mainly attributed to the presence of oxygen contamination on the surface of the films strongly bonded to titanium. In case of EDS, the underestimation is related to the poor sensitivity of the used probe in regard to light elements such as carbon. Moreover, the structure of the coatings has been extensively probed by transmission electron microscopy, which has shown that the size of the TiC nanoparticles shrinks when increasing the carbon content within the films. We further demonstrate that this structural evolution has a direct impact on the hardness of the coatings which gets reduced when the grain size decreases.

Links

ED2.1.00/03.0086, research and development project

Name: Regionální VaV centrum pro nízkonákladové plazmové a nanotechnologické povrchové úpravy

GAP205/12/0407, research and development project

Name: Porozumění hybridnímu PVD-PECVD procesu s cílem řídit růst nanostrukturovaných kompozitních vrstev

Investor: Czech Science Foundation

Citovat

EL MEL, A.A., E. GAUTRON, F. CHRISTIEN, B. ANGLERAUD, A. GRANIER, Pavel SOUČEK, Petr VAŠINA, Vilma BURŠÍKOVÁ, M. TAKASHIMA, N. OHTAKE, H. AKASAKA, T. SUZUKI and P.Y. TESSIER. Titanium carbide/carbon nanocomposite hard coatings: A comparative study between various chemical analysis tools. Surface & coatings technology. Elsevier, 2014, vol. 256, October, p. 41-46. ISSN 0257-8972. Available from: https://dx.doi.org/10.1016/j.surfcoat.2013.12.068.

@article{1197209,
   author = {El Mel, A.A. and Gautron, E. and Christien, F. and Angleraud, B. and Granier, A. and Souček, Pavel and Vašina, Petr and Buršíková, Vilma and Takashima, M. and Ohtake, N. and Akasaka, H. and Suzuki, T. and Tessier, P.Y.},
   article_number = {October},
   doi = {http://dx.doi.org/10.1016/j.surfcoat.2013.12.068},
   keywords = {nanocomposite thin film; carbon; XPS; WDS; EDS; RBS},
   language = {eng},
   issn = {0257-8972},
   journal = {Surface & coatings technology},
   title = {Titanium carbide/carbon nanocomposite hard coatings: A comparative study between various chemical analysis tools},
   url = {http://www.sciencedirect.com/science/article/pii/S0257897213012231},
   volume = {256},
   year = {2014}
}

TY  - JOUR
ID  - 1197209
AU  - El Mel, A.A. - Gautron, E. - Christien, F. - Angleraud, B. - Granier, A. - Souček, Pavel - Vašina, Petr - Buršíková, Vilma - Takashima, M. - Ohtake, N. - Akasaka, H. - Suzuki, T. - Tessier, P.Y.
PY  - 2014
TI  - Titanium carbide/carbon nanocomposite hard coatings: A comparative study between various chemical analysis tools
JF  - Surface & coatings technology
VL  - 256
IS  - October
SP  - 41-46
EP  - 41-46
PB  - Elsevier
SN  - 02578972
KW  - nanocomposite thin film
KW  - carbon
KW  - XPS
KW  - WDS
KW  - EDS
KW  - RBS
UR  - http://www.sciencedirect.com/science/article/pii/S0257897213012231
N2  - Titanium carbide/carbon nanocomposite hard coatings, which consist of TiC nanoparticles buried in amorphous carbon matrix, are prepared by a hybrid plasma process combining magnetron sputtering of a titanium target and plasma enhanced chemical vapor deposition using methane as a source for the growth of amorphous carbon. A particular attention was paid to the comparison of the surface and the bulk chemical compositions of the films determined by different analysis techniques: X-ray photoelectron spectroscopy (XPS), Rutherford backscattering spectrometry (RBS), wavelength dispersive X-ray spectroscopy (WDS) and energy dispersive X-ray spectroscopy (EDS). XPS and EDS show an underestimation in carbon concentration compared to RBS and WDS which provide similar values. This underestimation is more important in case of XPS and it is mainly attributed to the presence of oxygen contamination on the surface of the films strongly bonded to titanium. In case of EDS, the underestimation is related to the poor sensitivity of the used probe in regard to light elements such as carbon. Moreover, the structure of the coatings has been extensively probed by transmission electron microscopy, which has shown that the size of the TiC nanoparticles shrinks when increasing the carbon content within the films. We further demonstrate that this structural evolution has a direct impact on the hardness of the coatings which gets reduced when the grain size decreases.
ER  -

EL MEL, A.A., E. GAUTRON, F. CHRISTIEN, B. ANGLERAUD, A. GRANIER, Pavel SOUČEK, Petr VAŠINA, Vilma BURŠÍKOVÁ, M. TAKASHIMA, N. OHTAKE, H. AKASAKA, T. SUZUKI and P.Y. TESSIER. Titanium carbide/carbon nanocomposite hard coatings: A comparative study between various chemical analysis tools. \textit{Surface \&{} coatings technology}. Elsevier, 2014, vol.~256, October, p.~41-46. ISSN~0257-8972. Available from: https://dx.doi.org/10.1016/j.surfcoat.2013.12.068.

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