Ultrasmooth metallic foils for growth of high quality graphene
by chemical vapor deposition

J 2014

Ultrasmooth metallic foils for growth of high quality graphene by chemical vapor deposition

PROCHÁZKA, Pavel, Jindřich MACH, Dominik BISCHOFF, Zuzana LIŠKOVÁ, Petr DVOŘÁK et. al.

Basic information

Original name

Ultrasmooth metallic foils for growth of high quality graphene by chemical vapor deposition

Authors

PROCHÁZKA, Pavel (203 Czech Republic), Jindřich MACH (203 Czech Republic), Dominik BISCHOFF (203 Czech Republic), Zuzana LIŠKOVÁ (203 Czech Republic), Petr DVOŘÁK (203 Czech Republic), Marek VAŇATKA (203 Czech Republic), Pauline SIMONET (203 Czech Republic), Anastasia VARLET (203 Czech Republic), Dušan HEMZAL (203 Czech Republic, guarantor, belonging to the institution), Martin PETRENEC (203 Czech Republic), Lukáš KALINA (203 Czech Republic), Miroslav BARTOŠÍK (203 Czech Republic), Klaus ENSSLIN (203 Czech Republic), Peter VARGA (203 Czech Republic), Jan ČECHAL (203 Czech Republic) and Tomáš ŠIKOLA (203 Czech Republic)

Edition

NANOTECHNOLOGY, BRISTOL, IOP PUBLISHING LTD, 2014, 0957-4484

Other information

Language

English

Type of outcome

Článek v odborném periodiku

Field of Study

10302 Condensed matter physics

Country of publisher

United Kingdom of Great Britain and Northern Ireland

Confidentiality degree

není předmětem státního či obchodního tajemství

References:

URL

Impact factor

Impact factor: 3.821

RIV identification code

RIV/00216224:14740/14:00076532

Organization unit

Central European Institute of Technology

DOI

http://dx.doi.org/10.1088/0957-4484/25/18/185601

UT WoS

000334363600005

Keywords in English

graphene; CVD growth; metallic foils

Abstract

V originále

Synthesis of graphene by chemical vapor deposition is a promising route for manufacturing large-scale high-quality graphene for electronic applications. The quality of the employed substrates plays a crucial role, since the surface roughness and defects alter the graphene growth and cause dif fi culties in the subsequent graphene transfer. Here, we report on ultrasmooth high- purity copper foils prepared by sputter deposition of Cu thin fi lm on a SiO 2 /Si template, and the subsequent peeling off of the metallic layer from the template. The surface displays a low level of oxidation and contamination, and the roughness of the foil surface is generally de fi ned by the template, and was below 0.6 nm even on a large scale. The roughness and grain size increase occurred during both the annealing of the foils, and catalytic growth of graphene from methane ( +- 1000 °C), but on the large scale still remained far below the roughness typical for commercial foils. The micro-Raman spectroscopy and transport measurements proved the high quality of graphene grown on such foils, and the room temperature mobility of the graphene grown on the template stripped foil was three times higher compared to that of one grown on the commercial copper foil. The presented high-quality copper foils are expected to provide large-area substrates suitable for electronic applications.

Links

ED1.1.00/02.0068, research and development project

Name: CEITEC - central european institute of technology

Citovat

PROCHÁZKA, Pavel, Jindřich MACH, Dominik BISCHOFF, Zuzana LIŠKOVÁ, Petr DVOŘÁK, Marek VAŇATKA, Pauline SIMONET, Anastasia VARLET, Dušan HEMZAL, Martin PETRENEC, Lukáš KALINA, Miroslav BARTOŠÍK, Klaus ENSSLIN, Peter VARGA, Jan ČECHAL and Tomáš ŠIKOLA. Ultrasmooth metallic foils for growth of high quality graphene by chemical vapor deposition. NANOTECHNOLOGY. BRISTOL: IOP PUBLISHING LTD, 2014, vol. 25, No 18, p. 1-8. ISSN 0957-4484. Available from: https://dx.doi.org/10.1088/0957-4484/25/18/185601.

@article{1198412,
   author = {Procházka, Pavel and Mach, Jindřich and Bischoff, Dominik and Lišková, Zuzana and Dvořák, Petr and Vaňatka, Marek and Simonet, Pauline and Varlet, Anastasia and Hemzal, Dušan and Petrenec, Martin and Kalina, Lukáš and Bartošík, Miroslav and Ensslin, Klaus and Varga, Peter and Čechal, Jan and Šikola, Tomáš},
   article_location = {BRISTOL},
   article_number = {18},
   doi = {http://dx.doi.org/10.1088/0957-4484/25/18/185601},
   keywords = {graphene; CVD growth; metallic foils},
   language = {eng},
   issn = {0957-4484},
   journal = {NANOTECHNOLOGY},
   title = {Ultrasmooth metallic foils for growth of high quality graphene by chemical vapor deposition},
   url = {http://iopscience.iop.org/0957-4484/25/18/185601/article},
   volume = {25},
   year = {2014}
}

TY  - JOUR
ID  - 1198412
AU  - Procházka, Pavel - Mach, Jindřich - Bischoff, Dominik - Lišková, Zuzana - Dvořák, Petr - Vaňatka, Marek - Simonet, Pauline - Varlet, Anastasia - Hemzal, Dušan - Petrenec, Martin - Kalina, Lukáš - Bartošík, Miroslav - Ensslin, Klaus - Varga, Peter - Čechal, Jan - Šikola, Tomáš
PY  - 2014
TI  - Ultrasmooth metallic foils for growth of high quality graphene by chemical vapor deposition
JF  - NANOTECHNOLOGY
VL  - 25
IS  - 18
SP  - 1-8
EP  - 1-8
PB  - IOP PUBLISHING LTD
SN  - 09574484
KW  - graphene
KW  - CVD growth
KW  - metallic foils
UR  - http://iopscience.iop.org/0957-4484/25/18/185601/article
L2  - http://iopscience.iop.org/0957-4484/25/18/185601/article
N2  - Synthesis of graphene by chemical vapor deposition is a promising route for manufacturing large-scale high-quality graphene for electronic applications. The quality of the employed substrates plays a crucial role, since the surface roughness and defects alter the graphene growth and cause dif fi culties in the subsequent graphene transfer. Here, we report on ultrasmooth high- purity copper foils prepared by sputter deposition of Cu thin fi lm on a SiO 2 /Si template, and the subsequent peeling off of the metallic layer from the template. The surface displays a low level of oxidation and contamination, and the roughness of the foil surface is generally de fi ned by the template, and was below 0.6 nm even on a large scale. The roughness and grain size increase occurred during both the annealing of the foils, and catalytic growth of graphene from methane ( +- 1000 °C), but on the large scale still remained far below the roughness typical for commercial foils. The micro-Raman spectroscopy and transport measurements proved the high quality of graphene grown on such foils, and the room temperature mobility of the graphene grown on the template stripped foil was three times higher compared to that of one grown on the commercial copper foil. The presented high-quality copper foils are expected to provide large-area substrates suitable for electronic applications.
ER  -

PROCHÁZKA, Pavel, Jindřich MACH, Dominik BISCHOFF, Zuzana LIŠKOVÁ, Petr DVOŘÁK, Marek VAŇATKA, Pauline SIMONET, Anastasia VARLET, Dušan HEMZAL, Martin PETRENEC, Lukáš KALINA, Miroslav BARTOŠÍK, Klaus ENSSLIN, Peter VARGA, Jan ČECHAL and Tomáš ŠIKOLA. Ultrasmooth metallic foils for growth of high quality graphene by chemical vapor deposition. \textit{NANOTECHNOLOGY}. BRISTOL: IOP PUBLISHING LTD, 2014, vol.~25, No~18, p.~1-8. ISSN~0957-4484. Available from: https://dx.doi.org/10.1088/0957-4484/25/18/185601.

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