Diamond-Like Carbon (DLC) chemical vapor deposition technology: Characterization of DLC nano-layers and artificial neural networks for process modelling

AMATO, Filippo, Vilma BURŠÍKOVÁ, Jan JANČA, Eladia Maria PEÑA-MÉNDEZ and Josef HAVEL. Diamond-Like Carbon (DLC) chemical vapor deposition technology: Characterization of DLC nano-layers and artificial neural networks for process modelling. In TNT2011. 2011.

Basic information

• Original name: Diamond-Like Carbon (DLC) chemical vapor deposition technology: Characterization of DLC nano-layers and artificial neural networks for process modelling
• Authors: AMATO, Filippo (380 Italy, belonging to the institution), Vilma BURŠÍKOVÁ (203 Czech Republic, belonging to the institution), Jan JANČA (203 Czech Republic, belonging to the institution), Eladia Maria PEÑA-MÉNDEZ (724 Spain) and Josef HAVEL (203 Czech Republic, guarantor, belonging to the institution).
• Edition: TNT2011, 2011.

Other information

• Original language: English
• Type of outcome: Presentations at conferences
• Field of Study: 10406 Analytical chemistry
• Country of publisher: Spain
• Confidentiality degree: is not subject to a state or trade secret
• RIV identification code: RIV/00216224:14310/11:00078234
• Organization unit: Faculty of Science
• Keywords (in Czech): diamod-like carbon; nano-layers; artificial neural networks
• Keywords in English: diamod-like carbon; nano-layers; artificial neural networks
• Tags: International impact, Reviewed

Abstract

Diamond-like carbon (DLC) is obtained cooling or quenching high energy precursive carbons on relatively cold surfaces. This deposition process can be performed by several methods as, for instance, by pulsed laser ablation, cathodic arc, ion beam or plasma enhanced chemical vapour deposition (PECVD). The speed of the deposition process does not allow the material to grow in the cubic crystalline geometry form as for the synthetic diamond production process. Therefore, the resulting DLC film has no long-range crystalline order. This characteristic allows obtaining flexible coatings with mechanical properties similar to that of diamond. The DLC-coating technology is nowadays widely used in medicine (brachytherapy, coating of blood-contacting surfaces etc.) [1,2,3], informatics (as protective material for hard-drives), tribology to prevent wear, solar cells technology [4] and in industry [5]. The properties of the final coating can be modified by doping DLC with elements such as nitrogen, silicon and oxygen, fluorine or metal atoms [6, 7]. Nitrogen incorporation has been used to improve field emission properties of DLC films [8]. One particular class of modified DLC coatings is that of diamond-like nano-composite films consisting of two amorphous interpenetrating networks, a diamond-like network and a silicon-oxide like network. nano-composite DLC films with SiOx content exhibit enhanced fracture toughness, high surface hardness, low compressive stress and high thermo mechanical stability [9, 10 ].

Links

• ED2.1.00/03.0086, research and development project: Name: Regionální VaV centrum pro nízkonákladové plazmové a nanotechnologické povrchové úpravy
• MSM0021622411, plan (intention): Name: Studium a aplikace plazmochemických reakcí v neizotermickém nízkoteplotním plazmatu a jeho interakcí s povrchem pevných látek

Investor: Ministry of Education, Youth and Sports of the CR, Study and application of plasma chemical reactions in non-isothermic low temperature plasma and its interaction with solid surface