CHEN, Francis F. and Jane P. CHANG. Lecture notes on principles of plasma processing. New York, N.Y.: Kluwer Academic/Plenum publishers, 2003, ix, 208. ISBN 0306474972. |
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Basic information | |
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Original name | Lecture notes on principles of plasma processing |
Authors | CHEN, Francis F. and Jane P. CHANG. |
Edition | New York, N.Y. ix, 208, 2003. |
Publisher | Kluwer Academic/Plenum publishers |
Other information | |
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ISBN | 0306474972 |
Changed by | The record has been imported from the library system. Changed: 8/8/2022 13:08. |