CHEN, Francis F. and Jane P. CHANG. Lecture notes on principles of plasma processing. New York, N.Y.: Kluwer Academic/Plenum publishers, 2003. ix, 208. ISBN 0306474972.
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Basic information
Original name Lecture notes on principles of plasma processing
Authors CHEN, Francis F. and Jane P. CHANG.
Edition New York, N.Y. ix, 208, 2003.
Publisher Kluwer Academic/Plenum publishers
Other information
ISBN 0306474972
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