Lecture notes on principles of plasma processing

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Detailed Information on Publication Record

2003

Lecture notes on principles of plasma processing

CHEN, Francis F. and Jane P. CHANG

Basic information

Original name

Lecture notes on principles of plasma processing

Authors

CHEN, Francis F. and Jane P. CHANG

Edition

New York, N.Y. ix, 208, 2003

Publisher

Kluwer Academic/Plenum publishers

Other information

ISBN

0306474972

Změněno: 8/8/2022 13:08, The record has been imported from the library system.

CHEN, Francis F. and Jane P. CHANG. Lecture notes on principles of plasma processing. New York, N.Y.: Kluwer Academic/Plenum publishers, 2003, ix, 208. ISBN 0306474972.

CHEN, Francis F. and Jane P. CHANG. \textit{Lecture notes on principles of plasma processing}. New York, N.Y.: Kluwer Academic/Plenum publishers, 2003, ix, 208. ISBN~0306474972.