Lecture notes on principles of plasma processing
| CHEN, Francis F. and Jane P. CHANG. Lecture notes on principles of plasma processing. New York, N.Y.: Kluwer Academic/Plenum publishers, 2003, ix, 208. ISBN 0306474972. |
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| Basic information | |
|---|---|
| Original name | Lecture notes on principles of plasma processing |
| Authors | CHEN, Francis F. and Jane P. CHANG. |
| Edition | New York, N.Y. ix, 208, 2003. |
| Publisher | Kluwer Academic/Plenum publishers |
| Other information | |
|---|---|
| ISBN | 0306474972 |
| Changed by | The record has been imported from the library system. Changed: 8/8/2022 13:08. |
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