BŘEZINA, Jaromír and Daniel FRANTA. Antireflexní vrstva (SiO2/Al2O3/MgF2) pro dalekou ultrafialovou (FUV, VUV) oblast spektra na vlnové délce 193nm (Antireflection coating (SiO2/Al2O3/MgF2) for the far ultraviolet (FUV, VUV) region of the spectrum at the wavelength of 193nm). 2014.
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Basic information
Original name Antireflexní vrstva (SiO2/Al2O3/MgF2) pro dalekou ultrafialovou (FUV, VUV) oblast spektra na vlnové délce 193nm
Name (in English) Antireflection coating (SiO2/Al2O3/MgF2) for the far ultraviolet (FUV, VUV) region of the spectrum at the wavelength of 193nm
Authors BŘEZINA, Jaromír (203 Czech Republic) and Daniel FRANTA (203 Czech Republic, guarantor, belonging to the institution).
Edition 2014.
Other information
Original language Czech
Type of outcome Outcomes put into operation (prototype, working sample)
Field of Study 10306 Optics
Country of publisher Czech Republic
Confidentiality degree contents are subject to a state secret
RIV identification code RIV/00216224:14310/14:00073340
Organization unit Faculty of Science
Keywords in English triple-layer antireflection coating; SiO2/Al2O3/MgF2; far ultraviolet (FUV/VUV) region; wavelength of 193nm
Technical parameters R < 0.25% pro 193nm
Changed by Changed by: Mgr. David Nečas, Ph.D., učo 19972. Changed: 8/4/2015 17:25.
Abstract
*Trojnásobná antireflexní vrstva (SiO2/Al2O3/MgF2) pro dalekou ultrafialovou (FUV, VUV) oblast spektra na vlnové délce 193nm
Abstract (in English)
*Triple-layer antireflection coating (SiO2/Al2O3/MgF2) for the far ultraviolet (FUV, VUV) region of the spectrum at the wavelength of 193nm
Links
TA02010784, research and development projectName: Optimalizace vrstevnatých systémů používaných v optickém průmyslu
Investor: Technology Agency of the Czech Republic
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