BŘEZINA, Jaromír and Daniel FRANTA. Antireflexní vrstva z materiálů HfO2/SiO2 pro hlubokou ultrafialovou (DUV) oblast spektra na vlnové délce 266nm (Antireflection coating consisting of HfO2/SiO2 materials for the deep ultraviolet (DUV) region of the spectrum at the wavelength of 266nm). 2014.
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Basic information
Original name Antireflexní vrstva z materiálů HfO2/SiO2 pro hlubokou ultrafialovou (DUV) oblast spektra na vlnové délce 266nm
Name (in English) Antireflection coating consisting of HfO2/SiO2 materials for the deep ultraviolet (DUV) region of the spectrum at the wavelength of 266nm
Authors BŘEZINA, Jaromír (203 Czech Republic) and Daniel FRANTA (203 Czech Republic, guarantor, belonging to the institution).
Edition 2014.
Other information
Original language Czech
Type of outcome Outcomes put into operation (prototype, working sample)
Field of Study 10306 Optics
Country of publisher Czech Republic
Confidentiality degree contents are subject to a state secret
RIV identification code RIV/00216224:14310/14:00073343
Organization unit Faculty of Science
Keywords in English multi-layer antireflection coating; HfO2/SiO2 materials; deep ultraviolet (DUV) region; wavelength of 266nm
Technical parameters Rs,Rp <0.25% pro 265-267nm deg 0-10
Changed by Changed by: Mgr. David Nečas, Ph.D., učo 19972. Changed: 9/4/2015 10:20.
Abstract
*Vícenásobná antireflexní vrstva z materiálů HfO2/SiO2 pro hlubokou ultrafialovou (DUV) oblast spektra na vlnové délce 266nm
Abstract (in English)
*Multi-layer antireflection coating consisting of HfO2/SiO2 materials for the deep ultraviolet (DUV) region of the spectrum at the wavelength of 266nm
Links
TA02010784, research and development projectName: Optimalizace vrstevnatých systémů používaných v optickém průmyslu
Investor: Technology Agency of the Czech Republic
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