SCHÄFER, Jan, Jaroslav HNILICA, Jiří ŠPERKA, Antje QUADE, Vít KUDRLE, Rüdiger FOEST, Jiří VODÁK and Lenka ZAJÍČKOVÁ. Tetrakis(trimethylsilyloxy)silane for nanostructured SiO2-like films deposited by PECVD at atmospheric pressure. Surface and Coatings Technology. 2016, vol. 295, 15 June 2016, p. 112-118. ISSN 0257-8972. Available from: https://dx.doi.org/10.1016/j.surfcoat.2015.09.047. |
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@article{1317983, author = {Schäfer, Jan and Hnilica, Jaroslav and Šperka, Jiří and Quade, Antje and Kudrle, Vít and Foest, Rüdiger and Vodák, Jiří and Zajíčková, Lenka}, article_number = {15 June 2016}, doi = {http://dx.doi.org/10.1016/j.surfcoat.2015.09.047}, keywords = {Tetrakis(trimethylsilyloxy)silane; Tetrakis(trimethylsiloxy)silane; Plasma jet; Silicon dioxide}, language = {eng}, issn = {0257-8972}, journal = {Surface and Coatings Technology}, title = {Tetrakis(trimethylsilyloxy)silane for nanostructured SiO2-like films deposited by PECVD at atmospheric pressure}, volume = {295}, year = {2016} }
TY - JOUR ID - 1317983 AU - Schäfer, Jan - Hnilica, Jaroslav - Šperka, Jiří - Quade, Antje - Kudrle, Vít - Foest, Rüdiger - Vodák, Jiří - Zajíčková, Lenka PY - 2016 TI - Tetrakis(trimethylsilyloxy)silane for nanostructured SiO2-like films deposited by PECVD at atmospheric pressure JF - Surface and Coatings Technology VL - 295 IS - 15 June 2016 SP - 112-118 EP - 112-118 SN - 02578972 KW - Tetrakis(trimethylsilyloxy)silane KW - Tetrakis(trimethylsiloxy)silane KW - Plasma jet KW - Silicon dioxide N2 - We performed the thin films deposition using atmospheric pressure plasma enhanced chemical vapour deposition (AP-PECVD) by means of a radiofrequency and a microwave plasma jets operating with mixtures of argon and tetrakis(trimethylsilyloxy)silane (TTMS). ER -
SCHÄFER, Jan, Jaroslav HNILICA, Jiří ŠPERKA, Antje QUADE, Vít KUDRLE, Rüdiger FOEST, Jiří VODÁK and Lenka ZAJÍČKOVÁ. Tetrakis(trimethylsilyloxy)silane for nanostructured SiO2-like films deposited by PECVD at atmospheric pressure. \textit{Surface and Coatings Technology}. 2016, vol.~295, 15 June 2016, p.~112-118. ISSN~0257-8972. Available from: https://dx.doi.org/10.1016/j.surfcoat.2015.09.047.
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