| KLEIN, Peter, Jaroslav HNILICA, Zdeněk HUBIČKA, Martin ČADA and Petr VAŠINA. Observation of cathode voltage and discharge current oscillations and spoke behaviour in HiPIMS. Online. In Jan Čech, Pavel Souček, Dana Skácelová, Jaroslav Hnilica. Book of Contributed Papers. 1st ed. Brno: Masaryk University Brno 2015, 2015, p. 37-42. ISBN 978-80-210-8053-9. |
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@inproceedings{1320676,
author = {Klein, Peter and Hnilica, Jaroslav and Hubička, Zdeněk and Čada, Martin and Vašina, Petr},
address = {Brno},
booktitle = {Book of Contributed Papers},
edition = {1},
editor = {Jan Čech, Pavel Souček, Dana Skácelová, Jaroslav Hnilica},
keywords = {HiPIMS; spokes; magnetron sputtering; plasma instabilities},
howpublished = {elektronická verze "online"},
language = {eng},
location = {Brno},
isbn = {978-80-210-8053-9},
pages = {37-42},
publisher = {Masaryk University Brno 2015},
title = {Observation of cathode voltage and discharge current oscillations and spoke behaviour in HiPIMS},
url = {https://munispace.muni.cz/index.php/munispace/catalog/book/792},
year = {2015}
}
TY - JOUR
ID - 1320676
AU - Klein, Peter - Hnilica, Jaroslav - Hubička, Zdeněk - Čada, Martin - Vašina, Petr
PY - 2015
TI - Observation of cathode voltage and discharge current oscillations and spoke behaviour in HiPIMS
PB - Masaryk University Brno 2015
CY - Brno
SN - 9788021080539
KW - HiPIMS
KW - spokes
KW - magnetron sputtering
KW - plasma instabilities
UR - https://munispace.muni.cz/index.php/munispace/catalog/book/792
L2 - https://munispace.muni.cz/index.php/munispace/catalog/book/792
N2 - The oscillations were observed on cathode voltage and discharge current temporal evolution in HiPIMS pulse. The frequency of the oscillations depends at given pressure only on actual value of the discharge current. Rotation of the spokes over the cathode and the frequency of the oscillations shows different trends. The oscillations are observed at conditions where at least certain critical amount of spokes emerges.
ER -
KLEIN, Peter, Jaroslav HNILICA, Zdeněk HUBIČKA, Martin ČADA and Petr VAŠINA. Observation of cathode voltage and discharge current oscillations and spoke behaviour in HiPIMS. Online. In Jan Čech, Pavel Souček, Dana Skácelová, Jaroslav Hnilica. \textit{Book of Contributed Papers}. 1st ed. Brno: Masaryk University Brno 2015, 2015, p.~37-42. ISBN~978-80-210-8053-9.
|
