| HOMOLA, Tomáš, Vilma BURŠÍKOVÁ, Tatiana IVANOVA, Pavel SOUČEK, Philipp MAYDANNIK, David Campbell CAMERON and Jürgen LACKNER. Mechanical properties of atomic layer deposited Al2O3/ZnO nanolaminates. Surface & Coatings Technology. 2015, vol. 284, December, p. 198-205. ISSN 0257-8972. Available from: https://dx.doi.org/10.1016/j.surfcoat.2015.07.078. |
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@article{1321632,
author = {Homola, Tomáš and Buršíková, Vilma and Ivanova, Tatiana and Souček, Pavel and Maydannik, Philipp and Cameron, David Campbell and Lackner, Jürgen},
article_number = {December},
doi = {http://dx.doi.org/10.1016/j.surfcoat.2015.07.078},
keywords = {Nanolaminates;Multilayer;ALD;Hardness;Mechanical Properties;Zinc Oxide; Aluminium Oxide},
language = {eng},
issn = {0257-8972},
journal = {Surface & Coatings Technology},
title = {Mechanical properties of atomic layer deposited Al2O3/ZnO nanolaminates},
url = {http://www.sciencedirect.com/science/article/pii/S0257897215004922},
volume = {284},
year = {2015}
}
TY - JOUR
ID - 1321632
AU - Homola, Tomáš - Buršíková, Vilma - Ivanova, Tatiana - Souček, Pavel - Maydannik, Philipp - Cameron, David Campbell - Lackner, Jürgen
PY - 2015
TI - Mechanical properties of atomic layer deposited Al2O3/ZnO nanolaminates
JF - Surface & Coatings Technology
VL - 284
IS - December
SP - 198-205
EP - 198-205
SN - 02578972
KW - Nanolaminates;Multilayer;ALD;Hardness;Mechanical Properties;Zinc Oxide
KW - Aluminium Oxide
UR - http://www.sciencedirect.com/science/article/pii/S0257897215004922
N2 - Nanoscale structures of aluminium oxide (Al2O3) and zinc oxide (ZnO) multilayers (nanolaminates) were prepared by atomic layer deposition (ALD) on silicon substrates at 120 °C. The focus of this work was to study the effects of bilayer period on mechanical properties and the effect of the ratio between the thicknesses of each material with bilayer period kept constant. We found that reduction of bilayer period led to an increase in hardness of the nanolaminates, which was explained by the Hall–Petch effect. The influence on hardness of the thickness ratio between Al2O3 and ZnO, where it increased by 50% for Al2O3/ZnO = 1:24 with bilayer period = 25 nm was observed. Progressive scratch tests revealed that the highest critical load for delamination and the highest toughness was observed for samples with Al2O3/ZnO = 24:1 with bilayer period = 25 nm.
ER -
HOMOLA, Tomáš, Vilma BURŠÍKOVÁ, Tatiana IVANOVA, Pavel SOUČEK, Philipp MAYDANNIK, David Campbell CAMERON and Jürgen LACKNER. Mechanical properties of atomic layer deposited Al2O3/ZnO nanolaminates. \textit{Surface \&{} Coatings Technology}. 2015, vol.~284, December, p.~198-205. ISSN~0257-8972. Available from: https://dx.doi.org/10.1016/j.surfcoat.2015.07.078.
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