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@proceedings{1323299,
author = {Buršíková, Vilma and Souček, Pavel and Vašina, Petr and Zábranský, Lukáš and Buršík, Jiří},
booktitle = {68th Gaseous Electronics Conference (GEC) and 9th International Conference on Reactive Plasmas (ICRP)},
keywords = {magnetron sputtering; hardness; MoBC; elastic modulus},
language = {eng},
isbn = {978-4-86348-529-7},
title = {Study of the mechanical properties and the microstructure of magnetron sputtered MoBC coatings},
year = {2015}
}
TY - CONF
ID - 1323299
AU - Buršíková, Vilma - Souček, Pavel - Vašina, Petr - Zábranský, Lukáš - Buršík, Jiří
PY - 2015
TI - Study of the mechanical properties and the microstructure of magnetron sputtered MoBC coatings
SN - 9784863485297
KW - magnetron sputtering
KW - hardness
KW - MoBC
KW - elastic modulus
N2 - The aim of the present work was to prepare Mo2BC coatings using magnetron sputtering technique. Several deposition methods were tested including the high energy bombardment using mid-frequency pulsed DC sputtering and DC sputtering without pulsing at temperatures suitable for deposition on industrial type substrates like high speed steel. The film composition, microstructure and mechanical properties were analyzed in detail as a function of the deposition conditions.
ER -
BURŠÍKOVÁ, Vilma, Pavel SOUČEK, Petr VAŠINA, Lukáš ZÁBRANSKÝ a Jiří BURŠÍK. Study of the mechanical properties and the microstructure of magnetron sputtered MoBC coatings. In \textit{68th Gaseous Electronics Conference (GEC) and 9th International Conference on Reactive Plasmas (ICRP)}. ISBN~978-4-86348-529-7. 2015.
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