Atomic layer deposition on plasma pre-treated flexible polymer surfaces
Authors
KRUMPOLEC, Richard (703 Slovakia, guarantor, belonging to the institution), Tomáš HOMOLA (703 Slovakia, belonging to the institution), David Campbell CAMERON (826 United Kingdom of Great Britain and Northern Ireland) and Mirko ČERNÁK (703 Slovakia)
Edition
Spain, Polymer science: research advances, practical applications and educational aspects, p. 71-76, 6 pp. Polymer Science Book Serie Nº 1, 2016
In this work, we deposited an ultra-thin layer of TiO2 by atomic layer deposition (ALD) with a low number of cycles, up to 100. This led to non-uniform film with thickness less than several nm.
Links
ED2.1.00/03.0086, research and development project
Name: Regionální VaV centrum pro nízkonákladové plazmové a nanotechnologické povrchové úpravy
LO1411, research and development project
Name: Rozvoj centra pro nízkonákladové plazmové a nanotechnologické povrchové úpravy (Acronym: CEPLANT plus)
Investor: Ministry of Education, Youth and Sports of the CR