D 2016

Deposition of thin zinc films by atmospheric pressure plasma jet in aqueous media

GALMIZ, Oleksandr, Antonín BRABLEC and Vít KUDRLE

Basic information

Original name

Deposition of thin zinc films by atmospheric pressure plasma jet in aqueous media

Authors

GALMIZ, Oleksandr (804 Ukraine, belonging to the institution), Antonín BRABLEC (203 Czech Republic, guarantor, belonging to the institution) and Vít KUDRLE (203 Czech Republic, belonging to the institution)

Edition

Brno, Hakone XV: International Symposium of High Pressure low Temperature Plasma Chemistry, p. 279-282, 4 pp. 2016

Publisher

Masaryk University

Other information

Language

English

Type of outcome

Stať ve sborníku

Field of Study

10305 Fluids and plasma physics

Country of publisher

Czech Republic

Confidentiality degree

není předmětem státního či obchodního tajemství

Publication form

printed version "print"

RIV identification code

RIV/00216224:14310/16:00091359

Organization unit

Faculty of Science

ISBN

978-80-210-8318-9

UT WoS

000393033200065

Keywords in English

atmospheric plasma jet; thin film deposition; zinc

Tags

Tags

International impact, Reviewed
Změněno: 26/4/2017 22:37, Ing. Andrea Mikešková

Abstract

V originále

Argon plasma jet was operated at atmospheric pressure in contact with aqueous solution of a zinc salt in order to deposit thin films on silicon substrates immersed in the liquid. The thickness of the films was determined by a profilometer while the chemical composition was analysed by XPS technique. The experiments revealed the importance of the submersion depth of the substrate which strongly affects the energy and particle influx.

Links

ED2.1.00/03.0086, research and development project
Name: Regionální VaV centrum pro nízkonákladové plazmové a nanotechnologické povrchové úpravy
LO1411, research and development project
Name: Rozvoj centra pro nízkonákladové plazmové a nanotechnologické povrchové úpravy (Acronym: CEPLANT plus)
Investor: Ministry of Education, Youth and Sports of the CR