WIDE-PRESSURE-RANGE COPLANAR DIELECTRIC BARRIER DISCHARGE FOR
HYDROCARBON CONTAMINATION REMOVAL IN SCANNING ELECTRON
MICROSCOPY

D 2016

WIDE-PRESSURE-RANGE COPLANAR DIELECTRIC BARRIER DISCHARGE FOR HYDROCARBON CONTAMINATION REMOVAL IN SCANNING ELECTRON MICROSCOPY

DUGÁČEK, Ján, Pavel SŤAHEL, Jan ČECH and Jana JURMANOVÁ

Basic information

Original name

WIDE-PRESSURE-RANGE COPLANAR DIELECTRIC BARRIER DISCHARGE FOR HYDROCARBON CONTAMINATION REMOVAL IN SCANNING ELECTRON MICROSCOPY

Authors

DUGÁČEK, Ján (203 Czech Republic, guarantor, belonging to the institution), Pavel SŤAHEL (203 Czech Republic, belonging to the institution), Jan ČECH (203 Czech Republic, belonging to the institution) and Jana JURMANOVÁ (203 Czech Republic, belonging to the institution)

Edition

Brno, Hakone XV: International Symposium on High Pressure Low Temperature Plasma Chemistrywith joint COST TD1208 workshop Non-Equilibrium Plasmas with Liquids for Water and Surface Treatment. Book of Contributed Papers, p. 287-290, 4 pp. 2016

Publisher

Masarykova univerzita; Jednota českých matematiků a fyziků

Other information

Language

English

Type of outcome

Stať ve sborníku

Field of Study

10305 Fluids and plasma physics

Country of publisher

Czech Republic

Confidentiality degree

není předmětem státního či obchodního tajemství

Publication form

printed version "print"

References:

URL

RIV identification code

RIV/00216224:14310/16:00091427

Organization unit

Faculty of Science

ISBN

978-80-210-8318-9

UT WoS

000393033200067

Keywords in English

plasma; discharge; WPR-CDBD; decontamination

Abstract

ORIG CZ

V originále

Unwanted organic contamination of the surface of SEM samples or vacuum chambers often causes reductions of the SEM image quality, e. g. brightness or contrast of image, which worsen over time. This is the reason why the regular cleaning of the surface of the sample or vacuum chamber is necessary. In the presented paper, a novel method for SEM samples organic decontamination based on wide-pressure-range coplanar dielectric barrier discharge was investigated. WPR-CDBD efficiency for various organic compounds’ removal, including heavy hydrocarbons, was proved. Comparison with standard commercial plasma decontaminator XEI working with remote plasma was made.

In Czech

Čištění vakuových komor pomocí nízkoteplotního plazmatu-WPR-CDBD

Links

ED2.1.00/03.0086, research and development project

Name: Regionální VaV centrum pro nízkonákladové plazmové a nanotechnologické povrchové úpravy

LO1411, research and development project

Name: Rozvoj centra pro nízkonákladové plazmové a nanotechnologické povrchové úpravy (Acronym: CEPLANT plus)

Investor: Ministry of Education, Youth and Sports of the CR

Citovat

DUGÁČEK, Ján, Pavel SŤAHEL, Jan ČECH and Jana JURMANOVÁ. WIDE-PRESSURE-RANGE COPLANAR DIELECTRIC BARRIER DISCHARGE FOR HYDROCARBON CONTAMINATION REMOVAL IN SCANNING ELECTRON MICROSCOPY. In Mirko Černák, Tomáš Hoder. Hakone XV: International Symposium on High Pressure Low Temperature Plasma Chemistrywith joint COST TD1208 workshop Non-Equilibrium Plasmas with Liquids for Water and Surface Treatment. Book of Contributed Papers. Brno: Masarykova univerzita; Jednota českých matematiků a fyziků, 2016, p. 287-290. ISBN 978-80-210-8318-9.

@inproceedings{1358784,
   author = {Dugáček, Ján and Sťahel, Pavel and Čech, Jan and Jurmanová, Jana},
   address = {Brno},
   booktitle = {Hakone XV: International Symposium on High Pressure Low Temperature Plasma Chemistrywith joint COST TD1208 workshop Non-Equilibrium Plasmas with Liquids for Water and Surface Treatment. Book of Contributed Papers},
   editor = {Mirko Černák, Tomáš Hoder},
   keywords = {plasma; discharge; WPR-CDBD; decontamination},
   howpublished = {tištěná verze "print"},
   language = {eng},
   location = {Brno},
   isbn = {978-80-210-8318-9},
   pages = {287-290},
   publisher = {Masarykova univerzita; Jednota českých matematiků a fyziků},
   title = {WIDE-PRESSURE-RANGE COPLANAR DIELECTRIC BARRIER DISCHARGE FOR HYDROCARBON CONTAMINATION REMOVAL IN SCANNING ELECTRON MICROSCOPY},
   url = {https://munispace.muni.cz/index.php/munispace/catalog/book/836},
   year = {2016}
}

TY  - JOUR
ID  - 1358784
AU  - Dugáček, Ján - Sťahel, Pavel - Čech, Jan - Jurmanová, Jana
PY  - 2016
TI  - WIDE-PRESSURE-RANGE COPLANAR DIELECTRIC BARRIER DISCHARGE FOR HYDROCARBON CONTAMINATION REMOVAL IN SCANNING ELECTRON MICROSCOPY
PB  - Masarykova univerzita; Jednota českých matematiků a fyziků
CY  - Brno
SN  - 9788021083189
KW  - plasma
KW  - discharge
KW  - WPR-CDBD
KW  - decontamination
UR  - https://munispace.muni.cz/index.php/munispace/catalog/book/836
N2  - Unwanted organic contamination of the surface of SEM samples or vacuum chambers often causes reductions of the SEM image quality, e. g. brightness or contrast of image, which worsen over time. This is the reason why the regular cleaning of the surface of the sample or vacuum chamber is necessary. In the presented paper, a novel method for SEM samples organic decontamination based on wide-pressure-range coplanar dielectric barrier discharge was investigated. WPR-CDBD efficiency for various organic compounds’ removal, including heavy hydrocarbons, was proved. Comparison with standard commercial plasma decontaminator XEI working with remote plasma was made.
ER  -

DUGÁČEK, Ján, Pavel SŤAHEL, Jan ČECH and Jana JURMANOVÁ. WIDE-PRESSURE-RANGE COPLANAR DIELECTRIC BARRIER DISCHARGE FOR HYDROCARBON CONTAMINATION REMOVAL IN SCANNING ELECTRON MICROSCOPY. In Mirko Černák, Tomáš Hoder. \textit{Hakone XV: International Symposium on High Pressure Low Temperature Plasma Chemistrywith joint COST TD1208 workshop Non-Equilibrium Plasmas with Liquids for Water and Surface Treatment. Book of Contributed Papers}. Brno: Masarykova univerzita; Jednota českých matematiků a fyziků, 2016, p.~287-290. ISBN~978-80-210-8318-9.

Detailed Information on Publication Record