DUGÁČEK, Ján, Pavel SŤAHEL, Jan ČECH and Jana JURMANOVÁ. WIDE-PRESSURE-RANGE COPLANAR DIELECTRIC BARRIER DISCHARGE FOR HYDROCARBON CONTAMINATION REMOVAL IN SCANNING ELECTRON MICROSCOPY. In Mirko Černák, Tomáš Hoder. Hakone XV: International Symposium on High Pressure Low Temperature Plasma Chemistrywith joint COST TD1208 workshop Non-Equilibrium Plasmas with Liquids for Water and Surface Treatment. Book of Contributed Papers. Brno: Masarykova univerzita; Jednota českých matematiků a fyziků. p. 287-290. ISBN 978-80-210-8318-9. 2016.
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Basic information
Original name WIDE-PRESSURE-RANGE COPLANAR DIELECTRIC BARRIER DISCHARGE FOR HYDROCARBON CONTAMINATION REMOVAL IN SCANNING ELECTRON MICROSCOPY
Authors DUGÁČEK, Ján (203 Czech Republic, guarantor, belonging to the institution), Pavel SŤAHEL (203 Czech Republic, belonging to the institution), Jan ČECH (203 Czech Republic, belonging to the institution) and Jana JURMANOVÁ (203 Czech Republic, belonging to the institution).
Edition Brno, Hakone XV: International Symposium on High Pressure Low Temperature Plasma Chemistrywith joint COST TD1208 workshop Non-Equilibrium Plasmas with Liquids for Water and Surface Treatment. Book of Contributed Papers, p. 287-290, 4 pp. 2016.
Publisher Masarykova univerzita; Jednota českých matematiků a fyziků
Other information
Original language English
Type of outcome Proceedings paper
Field of Study 10305 Fluids and plasma physics
Country of publisher Czech Republic
Confidentiality degree is not subject to a state or trade secret
Publication form printed version "print"
WWW URL
RIV identification code RIV/00216224:14310/16:00091427
Organization unit Faculty of Science
ISBN 978-80-210-8318-9
UT WoS 000393033200067
Keywords in English plasma; discharge; WPR-CDBD; decontamination
Tags AKR, rivok
Tags International impact, Reviewed
Changed by Changed by: Ing. Andrea Mikešková, učo 137293. Changed: 26/4/2017 22:41.
Abstract
Unwanted organic contamination of the surface of SEM samples or vacuum chambers often causes reductions of the SEM image quality, e. g. brightness or contrast of image, which worsen over time. This is the reason why the regular cleaning of the surface of the sample or vacuum chamber is necessary. In the presented paper, a novel method for SEM samples organic decontamination based on wide-pressure-range coplanar dielectric barrier discharge was investigated. WPR-CDBD efficiency for various organic compounds’ removal, including heavy hydrocarbons, was proved. Comparison with standard commercial plasma decontaminator XEI working with remote plasma was made.
Abstract (in Czech)
Čištění vakuových komor pomocí nízkoteplotního plazmatu-WPR-CDBD
Links
ED2.1.00/03.0086, research and development projectName: Regionální VaV centrum pro nízkonákladové plazmové a nanotechnologické povrchové úpravy
LO1411, research and development projectName: Rozvoj centra pro nízkonákladové plazmové a nanotechnologické povrchové úpravy (Acronym: CEPLANT plus)
Investor: Ministry of Education, Youth and Sports of the CR
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