The impact of nitrogen content and vacancies on structure and
mechanical properties of Mo-N thin films

J 2016

The impact of nitrogen content and vacancies on structure and mechanical properties of Mo-N thin films

KLIMASHIN, Fedor F., Nikola KOUTNÁ, Holger EUCHNER, David HOLEC, Paul H. MAYRHOFER et. al.

Basic information

Original name

The impact of nitrogen content and vacancies on structure and mechanical properties of Mo-N thin films

Authors

KLIMASHIN, Fedor F. (643 Russian Federation), Nikola KOUTNÁ (203 Czech Republic, belonging to the institution), Holger EUCHNER (276 Germany), David HOLEC (203 Czech Republic) and Paul H. MAYRHOFER (40 Austria)

Edition

Journal of Applied Physics, Melville, AMER INST PHYSICS, 2016, 0021-8979

Other information

Language

English

Type of outcome

Článek v odborném periodiku

Field of Study

10302 Condensed matter physics

Country of publisher

United States of America

Confidentiality degree

není předmětem státního či obchodního tajemství

References:

Full Text

Impact factor

Impact factor: 2.068

RIV identification code

RIV/00216224:14310/16:00092633

Organization unit

Faculty of Science

DOI

http://dx.doi.org/10.1063/1.4966664

UT WoS

000388734700023

Keywords in English

molybdenum nitride; PVD; vacancies

Abstract

V originále

Based on a combined computational and experimental study, we show that besides the thermodynamically stable beta-MoN0.5 and delta(2)-MoN phases, also metastable gamma-MoNx and its ordered relative gamma'-MoNx can be synthesized by physical vapor deposition. The formation of the NaCl-based gamma-MoNx phase is favored for nitrogen concentrations between 23 and 34 at.% (i.e., x = 0.30-0.53). Higher nitrogen contents (close to the 3:2 stoichiometry, hence, MoN0.67) favor the ordering of the vacancies at the nitrogen sublattice (hence, gamma'-MoNx). The highest hardness of similar to 33 GPa is obtained for single-phase cubic-structured gamma-MoN0.53 coatings, whereas the ordered gamma'-MoN0.67 coatings are slightly softer with a hardness of similar to 28 GPa.

Citovat

KLIMASHIN, Fedor F., Nikola KOUTNÁ, Holger EUCHNER, David HOLEC and Paul H. MAYRHOFER. The impact of nitrogen content and vacancies on structure and mechanical properties of Mo-N thin films. Journal of Applied Physics. Melville: AMER INST PHYSICS, 2016, vol. 120, No 18, p. "nestrankovano", 10 pp. ISSN 0021-8979. Available from: https://dx.doi.org/10.1063/1.4966664.

@article{1366455,
   author = {Klimashin, Fedor F. and Koutná, Nikola and Euchner, Holger and Holec, David and Mayrhofer, Paul H.},
   article_location = {Melville},
   article_number = {18},
   doi = {http://dx.doi.org/10.1063/1.4966664},
   keywords = {molybdenum nitride; PVD; vacancies},
   language = {eng},
   issn = {0021-8979},
   journal = {Journal of Applied Physics},
   title = {The impact of nitrogen content and vacancies on structure and mechanical properties of Mo-N thin films},
   url = {https://aip.scitation.org/doi/10.1063/1.4966664},
   volume = {120},
   year = {2016}
}

TY  - JOUR
ID  - 1366455
AU  - Klimashin, Fedor F. - Koutná, Nikola - Euchner, Holger - Holec, David - Mayrhofer, Paul H.
PY  - 2016
TI  - The impact of nitrogen content and vacancies on structure and mechanical properties of Mo-N thin films
JF  - Journal of Applied Physics
VL  - 120
IS  - 18
SP  - "nestrankovano"
EP  - "nestrankovano"
PB  - AMER INST PHYSICS
SN  - 00218979
KW  - molybdenum nitride
KW  - PVD
KW  - vacancies
UR  - https://aip.scitation.org/doi/10.1063/1.4966664
L2  - https://aip.scitation.org/doi/10.1063/1.4966664
N2  - Based on a combined computational and experimental study, we show that besides the thermodynamically stable beta-MoN0.5 and delta(2)-MoN phases, also metastable gamma-MoNx and its ordered relative gamma'-MoNx can be synthesized by physical vapor deposition. The formation of the NaCl-based gamma-MoNx phase is favored for nitrogen concentrations between 23 and 34 at.% (i.e., x = 0.30-0.53). Higher nitrogen contents (close to the 3:2 stoichiometry, hence, MoN0.67) favor the ordering of the vacancies at the nitrogen sublattice (hence, gamma'-MoNx). The highest hardness of similar to 33 GPa is obtained for single-phase cubic-structured gamma-MoN0.53 coatings, whereas the ordered gamma'-MoN0.67 coatings are slightly softer with a hardness of similar to 28 GPa.
ER  -

KLIMASHIN, Fedor F., Nikola KOUTNÁ, Holger EUCHNER, David HOLEC and Paul H. MAYRHOFER. The impact of nitrogen content and vacancies on structure and mechanical properties of Mo-N thin films. \textit{Journal of Applied Physics}. Melville: AMER INST PHYSICS, 2016, vol.~120, No~18, p.~''nestrankovano'', 10 pp. ISSN~0021-8979. Available from: https://dx.doi.org/10.1063/1.4966664.

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